loadpatents
Patent applications and USPTO patent grants for VLES; David Ferdinand.The latest application filed is for "pellicle membrane for a lithographic apparatus".
Patent | Date |
---|---|
Pellicle Membrane For A Lithographic Apparatus App 20220276553 - NIKIPELOV; Andrey ;   et al. | 2022-09-01 |
Pellicle And Pellicle Assembly App 20220252974 - VLES; David Ferdinand ;   et al. | 2022-08-11 |
Metal-silicide-nitridation For Stress Reduction App 20220187701 - VAN ZWOL; Pieter-Jan ;   et al. | 2022-06-16 |
Pellicle and pellicle assembly Grant 11,347,142 - Vles , et al. May 31, 2 | 2022-05-31 |
Membrane for EUV lithography Grant 11,320,731 - Van Zwol , et al. May 3, 2 | 2022-05-03 |
Pellicle frame and pellicle assembly Grant 11,314,163 - Duys , et al. April 26, 2 | 2022-04-26 |
Pellicle And Pellicle Assembly App 20220121111 - VLES; David Ferdinand ;   et al. | 2022-04-21 |
Metal-silicide-nitridation for stress reduction Grant 11,287,737 - Van Zwol , et al. March 29, 2 | 2022-03-29 |
Pellicle and pellicle assembly Grant 11,231,646 - Vles , et al. January 25, 2 | 2022-01-25 |
Membrane Cleaning Apparatus App 20220008963 - NIKIPELOV; Andrey ;   et al. | 2022-01-13 |
Pellicle And Pellicle Assembly App 20210208500 - VLES; David Ferdinand ;   et al. | 2021-07-08 |
Alignment measurement system Grant 11,042,096 - Witte , et al. June 22, 2 | 2021-06-22 |
Metal-silicide-nitridation For Stress Reduction App 20210181618 - VAN ZWOL; Pieter-Jan ;   et al. | 2021-06-17 |
Membrane assembly Grant 11,036,128 - Brouns , et al. June 15, 2 | 2021-06-15 |
Pellicle and pellicle assembly Grant 10,983,431 - Vles , et al. April 20, 2 | 2021-04-20 |
Membrane For Euv Lithography App 20210109438 - Nasalevich; Maxim Aleksandrovich ;   et al. | 2021-04-15 |
Sensor mark and a method of manufacturing a sensor mark Grant 10,976,196 - Klugkist , et al. April 13, 2 | 2021-04-13 |
Membrane for EUV lithography Grant 10,908,496 - Nasalevich , et al. February 2, 2 | 2021-02-02 |
Graphene Pellicle Lithographic Apparatus App 20200406244 - KURGANOVA; Evgenia ;   et al. | 2020-12-31 |
Pellicle Frame And Pellicle Assembly App 20200319546 - DUYS; Anton Wilhelmus ;   et al. | 2020-10-08 |
Lithographic apparatus Grant 10,747,127 - Van Der Meulen , et al. A | 2020-08-18 |
Method for manufacturing a membrane assembly Grant 10,712,656 - Houweling , et al. | 2020-07-14 |
Pellicle And Pellicle Assembly App 20200209736 - VLES; David Ferdinand ;   et al. | 2020-07-02 |
Simultaneous Double-side Coating Of Multilayer Graphene Pellicle By Local Thermal Processing App 20200159107 - KURGANOVA; Evgenia ;   et al. | 2020-05-21 |
Alignment Measurement System App 20200142319 - WITTE; Stefan Michiel ;   et al. | 2020-05-07 |
Pellicle And Pellicle Assembly App 20200064731 - VLES; David Ferdinand ;   et al. | 2020-02-27 |
Sensor Mark And A Method Of Manufacturing A Sensor Mark App 20200064183 - KLUGKIST; Joost Andre ;   et al. | 2020-02-27 |
Pellicle and pellicle assembly Grant 10,466,585 - Vles , et al. No | 2019-11-05 |
Lithographic Apparatus App 20190227445 - VAN DER MEULEN; Frits ;   et al. | 2019-07-25 |
A Membrane For Euv Lithography App 20190129299 - NASALEVICH; Maxim Aleksandrovich ;   et al. | 2019-05-02 |
Substrate Support, Lithographic Apparatus And Loading Method App 20190113853 - ONVLEE; Johannes ;   et al. | 2019-04-18 |
Method Of Manufacturing A Pellicle For A Lithographic Apparatus, A Pellicle For A Lithographic Apparatus, A Lithographic Apparatus, A Device Manufacturing Method, An Apparatus For Processing A Pellicle, And A Method For Processing A Pellicle App 20190056654 - PETER; Maria ;   et al. | 2019-02-21 |
A Membrane For Euv Lithography App 20190011828 - VAN ZWOL; Pieter-Jan ;   et al. | 2019-01-10 |
A Membrane Assembly App 20180373141 - BROUNS; Derk Servatius Gertruda ;   et al. | 2018-12-27 |
Pellicle And Pellicle Assembly App 20180364561 - VLES; David Ferdinand ;   et al. | 2018-12-20 |
Method For Manufacturing A Membrane Assembly App 20180239240 - HOUWELING; Zomer Silvester ;   et al. | 2018-08-23 |
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