| Patent | Date |
|---|
Element for homogenizing the illumination with simultaneous setting of the polarization degree
Grant 8,390,927 - Heiden March 5, 2 | 2013-03-05 |
Interferometric device for position measurement and coordinate measuring machine
Grant 8,351,049 - Boesser , et al. January 8, 2 | 2013-01-08 |
Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the Device
App 20120320382 - Heiden; Michael | 2012-12-20 |
Method and apparatus for processing the image data of the surface of a wafer recorded by at least one camera
Grant 8,264,534 - Michelsson September 11, 2 | 2012-09-11 |
Method for determining positions of structures on a mask
Grant 8,248,618 - Rinn , et al. August 21, 2 | 2012-08-21 |
Method for inspecting a surface of a wafer with regions of different detection sensitivity
Grant 8,200,004 - Michelsson , et al. June 12, 2 | 2012-06-12 |
Method for the optical inspection and visualization of optical measuring values obtained from disk-like objects
Grant 8,200,003 - Michelsson June 12, 2 | 2012-06-12 |
Apparatus and method for inspecting micro-structured devices on a semiconductor substrate
Grant 8,154,718 - Graf , et al. April 10, 2 | 2012-04-10 |
Method for determining the systematic error in the measurement of positions of edges of structures on a substrate resulting from the substrate topology
Grant 8,149,383 - Czerkas April 3, 2 | 2012-04-03 |
Coordinate measuring machine and method for calibrating the coordinate measuring machine
Grant 8,115,808 - Fricke , et al. February 14, 2 | 2012-02-14 |
Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the Device
App 20120033230 - Heiden; Michael | 2012-02-09 |
Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the Device
App 20120033691 - Heiden; Michael | 2012-02-09 |
Apparatus and method for measuring structures on a mask and or for calculating structures in a photoresist resulting from the structures
Grant 8,102,541 - Heiden January 24, 2 | 2012-01-24 |
Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafers
Grant 8,089,622 - Birkner , et al. January 3, 2 | 2012-01-03 |
Method for optical inspection, detection and visualization of defects on disk-shaped objects
Grant 8,090,185 - Friedrich , et al. January 3, 2 | 2012-01-03 |
Illumination means and inspection means having an illumination means
Grant 8,087,799 - Hahn , et al. January 3, 2 | 2012-01-03 |
Advancing means for a multi-coordinate measurement table of a coordinate measuring device and method for controlling such an advancing means
Grant 8,056,434 - Ehrenberg November 15, 2 | 2011-11-15 |
Method for determining the centrality of masks
Grant 7,986,409 - Heiden July 26, 2 | 2011-07-26 |
Measuring system for structures on a substrate for semiconductor manufacture
Grant 7,982,950 - Boesser , et al. July 19, 2 | 2011-07-19 |
System and method for determining positions of structures on a substrate
Grant 7,978,340 - Boesser , et al. July 12, 2 | 2011-07-12 |
Method for determining the position of the edge bead removal line of a disk-like object
Grant 7,973,931 - Michelsson , et al. July 5, 2 | 2011-07-05 |
Coordinate measuring machine for measuring structures on a substrate
Grant 7,961,334 - Boesser , et al. June 14, 2 | 2011-06-14 |
Method for determining positions of structures on a substrate
Grant 7,948,635 - Pietsch , et al. May 24, 2 | 2011-05-24 |
Method for reproducibly determining geometrical and/or optical object characteristics
Grant 7,939,789 - Heiden , et al. May 10, 2 | 2011-05-10 |
Coordinate measuring machine and a method for correcting non-linearities of the interferometers of a coordinate measuring machine
Grant 7,929,149 - Heiden April 19, 2 | 2011-04-19 |
Device for measuring or inspecting substrates of the semiconductor industry
Grant 7,906,978 - Ehrenberg March 15, 2 | 2011-03-15 |
Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device
Grant 7,903,259 - Heiden March 8, 2 | 2011-03-08 |
Coordinate measuring machine and method for structured illumination of substrates
Grant 7,889,338 - Heiden February 15, 2 | 2011-02-15 |
Device for measuring the position of at least one structure on a substrate
Grant 7,872,763 - Pietsch , et al. January 18, 2 | 2011-01-18 |
Method for correcting measured values resulting from the bending of a substrate
Grant 7,826,068 - Czerkas November 2, 2 | 2010-11-02 |
Method for calibration of a measuring table of a coordinate measuring machine
Grant 7,823,295 - Rinn November 2, 2 | 2010-11-02 |
Device for measuring positions of structures on a substrate
Grant 7,817,262 - Ehrenberg , et al. October 19, 2 | 2010-10-19 |
Method for Determining Positions of Structures on a Mask
App 20100220339 - Rinn; Klaus ; et al. | 2010-09-02 |
Method for Calibration of a Measuring Table of a Coordinate Measuring Machine
App 20100205815 - Rinn; Klaus | 2010-08-19 |
Method for acquiring high-resolution images of defects on the upper surface of the wafer edge
Grant 7,768,637 - Schupp , et al. August 3, 2 | 2010-08-03 |
Method for correcting measuring errors caused by the lens distortion of an objective
Grant 7,769,556 - Heiden , et al. August 3, 2 | 2010-08-03 |
Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the Device
App 20100110449 - Heiden; Michael | 2010-05-06 |
Method for eliminating sources of error in the system correction of a coordinate measuring machine
Grant 7,694,426 - Heiden , et al. April 13, 2 | 2010-04-13 |
Method for correcting an error of the imaging system of a coordinate measuring machine
Grant 7,680,616 - Heiden , et al. March 16, 2 | 2010-03-16 |
Apparatus and method for determining the focus position
App 20100060883 - Heiden; Michael | 2010-03-11 |
Method for measuring positions of structures on a substrate with a coordinate measuring machine
Grant 7,675,633 - Schmidt March 9, 2 | 2010-03-09 |
Detecting defects by three-way die-to-die comparison with false majority determination
Grant 7,657,077 - Michelsson , et al. February 2, 2 | 2010-02-02 |
Method for improving the reproducibility of a coordinate measuring apparatus and its accuracy
Grant 7,654,007 - Heiden , et al. February 2, 2 | 2010-02-02 |
Interferometric device for position measurement and coordinate measuring machine
App 20100020332 - Boesser; Hans-Artur ; et al. | 2010-01-28 |
Method and device for inspecting a disk-shaped object
App 20090316981 - Brueck; Hans-Juergen ; et al. | 2009-12-24 |
Device And Method For The Inspection Of Defects On The Edge Region Of A Wafer
App 20090279080 - Danner; Lambert ; et al. | 2009-11-12 |
Method and apparatus for inspecting a surface
Grant 7,602,481 - Kreh October 13, 2 | 2009-10-13 |
Method for determining correction values for the measured values of positions of structures on a substrate
Grant 7,584,072 - Fricke , et al. September 1, 2 | 2009-09-01 |
Device for measuring or inspecting substrates of the semiconductor industry
App 20090189157 - Ehrenberg; Tillmann | 2009-07-30 |
Apparatus for illuminating and inspecting a surface
Grant 7,561,263 - Danner , et al. July 14, 2 | 2009-07-14 |
Method for optical inspection, detection and visualization of defects on disk-shaped Objects
App 20090161097 - Friedrich; Ralf ; et al. | 2009-06-25 |
Method for inspecting a surface of a wafer with regions of different detection sensitivity
App 20090161942 - Michelsson; Detlef ; et al. | 2009-06-25 |
Method for determining the focal position of at least two edges of structures on a substrate
Grant 7,551,296 - Boesser , et al. June 23, 2 | 2009-06-23 |
Coordinate Measuring Machine With Temperature Adapting Station
App 20090153875 - Czerkas; Slawomir | 2009-06-18 |
Method and apparatus for processing the image of the surface of a wafer recorded by at least one camera
App 20090153657 - Michelsson; Detlef | 2009-06-18 |
Method for enhancing the measuring accuracy when determining the coordinates of structures on a substrate
Grant 7,548,321 - Rinn June 16, 2 | 2009-06-16 |
Apparatus and method of inspecting the surface of a wafer
Grant 7,545,489 - Sulik , et al. June 9, 2 | 2009-06-09 |
Apparatus and method for supporting a substrate at a position with high precision
App 20090126525 - Pietsch; Katrin ; et al. | 2009-05-21 |
Device for measuring the position of at least one structure on a substrate
App 20090128828 - Pietsch; Katrin ; et al. | 2009-05-21 |
Method for determining the position of the edge bead removal line of a disk-like object
App 20090130784 - Michelsson; Detlef ; et al. | 2009-05-21 |
Method for enhancing the measuring accuracy when determining the coordinates of structures on a substrate
Grant 7,528,960 - Boesser , et al. May 5, 2 | 2009-05-05 |
Method for determining positions of structures on a substrate
App 20090109443 - Pietsch; Katrin ; et al. | 2009-04-30 |
Method for determining the centrality of masks
App 20090097041 - Heiden; Michael | 2009-04-16 |
Means And Method For Determining The Spatial Position Of Moving Elements Of A Coordinate Measuring Machine
App 20090073458 - Heiden; Michael ; et al. | 2009-03-19 |
Device and method for determining an optical property of a mask
App 20090066955 - Boesser; Hans-Artur ; et al. | 2009-03-12 |
Method for correcting measuring errors caused by the lens distortion of an objective
App 20090070059 - Heiden; Michael ; et al. | 2009-03-12 |
Method For Determining The Position Of A Measurement Objective In The Z-coordinate Direction Of An Optical Measuring Machine Having Maximum Reproducibility Of Measured Structure Widths
App 20090051932 - Heiden; Michael ; et al. | 2009-02-26 |
Method for measuring positions of structures on a substrate with a coordinate measuring machine
App 20090051936 - Schmidt; Karl-Heinrich | 2009-02-26 |
Method for the optical inspection and visualization of optical measuring values obtained from disk-like objects
App 20090052766 - Michelsson; Detlef | 2009-02-26 |
Method for reproducibly determining object characteristics
App 20090045318 - Heiden; Michael ; et al. | 2009-02-19 |
Coordinate Measuring Machine And A Method For Correcting Non-linearities Of The Interferometers Of A Coordinate Measuring Machine
App 20090040530 - Heiden; Michael | 2009-02-12 |
Apparatus for inspecting a disk-like object
Grant 7,489,394 - Wienecke , et al. February 10, 2 | 2009-02-10 |
Coordinate measuring machine for measuring structures on a substrate
App 20090031572 - Boesser; Hans-Artur ; et al. | 2009-02-05 |
System and method for determining positions of structures on a substrate
App 20090033508 - Boesser; Hans-Artur ; et al. | 2009-02-05 |
Method for determining the systematic error in the measurement of positions of edges of structures on a substrate resulting from the substrate topology
App 20090033894 - Czerkas; Slawomir | 2009-02-05 |
Device and method for scanning the whole surface of a wafer
App 20090034832 - Vollrath; Wolfgang ; et al. | 2009-02-05 |
Method for Correcting Measured Values Resulting from the Bending of a Substrate
App 20090030639 - Czerkas; Slawomir | 2009-01-29 |
Method for Determining Correction Values for the Measured Values of Positions of Structures on a Substrate
App 20090024351 - Fricke; Wolfgang ; et al. | 2009-01-22 |
Method for correcting an error of the imaging system of a coordinate measuring machine
App 20090024344 - Heiden; Michael ; et al. | 2009-01-22 |
Advancing means for a multi-coordinate measurement table of a coordinate measuring device and method for controlling such an advancing means
App 20090013808 - Ehrenberg; Tillmann | 2009-01-15 |
Device And Method For Improving The Measurement Accuracy In An Optical Cd Measurement System
App 20090015833 - Heiden; Michael ; et al. | 2009-01-15 |
Method of detecting incomplete edge bead removal from a disk-like object
Grant 7,477,370 - Michelsson , et al. January 13, 2 | 2009-01-13 |
Coordinate measuring machine with vibration decoupling and method for vibration decoupling of a coordinate measuring machine
App 20090002715 - Goetz; Uwe ; et al. | 2009-01-01 |
Device for measuring positions of structures on a substrate
App 20090002720 - Ehrenberg; Tillmann ; et al. | 2009-01-01 |
Coordinate measuring machine and method for calibrating the coordinate measuring machine
App 20090002486 - Fricke; Wolfgang ; et al. | 2009-01-01 |
Coordinate measuring machine and method for structured illumination of substrates
App 20080304058 - Heiden; Michael | 2008-12-11 |
Element for homogenizing the illumination with simultaneous setting of the polarization degree
App 20080304152 - Heiden; Michael | 2008-12-11 |
Method for improving the reproducibility of a coordinate measuring apparatus and its accuracy
App 20080295348 - Heiden; Michael ; et al. | 2008-12-04 |
Method for optically inspecting a wafer by sequentially illuminating with bright and dark field light beams wherein the images from the bright and dark field illuminated regions are spatially offset
Grant 7,460,219 - Jung , et al. December 2, 2 | 2008-12-02 |
Apparatus With Enhanced Resolution For Measuring Structures On A Substrate For Semiconductor Manufacture And Use Of Apertures In A Measuring Apparatus
App 20080278790 - Boesser; Hans-Artur ; et al. | 2008-11-13 |
Measuring device and method for determining relative positions of a positioning stage configured to be moveable in at least one direction
Grant 7,450,246 - Boesser , et al. November 11, 2 | 2008-11-11 |
Device for Inspecting a Microscopic Component
App 20080259327 - Brueck; Hans-Juergen ; et al. | 2008-10-23 |
Method For Determining The Focal Position Of At Least Two Edges Of Structures On A Substrate
App 20080252903 - Boesser; Hans-Artur ; et al. | 2008-10-16 |
Method For Detecting Defects On The Back Side Of A Semiconductor Wafer
App 20080249728 - Michelsson; Detlef ; et al. | 2008-10-09 |
Device And Method For Evaluating Defects In The Edge Area Of A Wafer And Use Of The Device In Inspection System For Wafers
App 20080232672 - Birkner; Andreas ; et al. | 2008-09-25 |
Wafer inspection device
Grant 7,424,393 - Halama , et al. September 9, 2 | 2008-09-09 |
Measuring instrument and method for operating a measuring instrument for optical inspection of an object
Grant 7,420,670 - Rinn , et al. September 2, 2 | 2008-09-02 |
Method of determining geometric parameters of a wafer
App 20080208523 - Schenck; Rene ; et al. | 2008-08-28 |
Method For Eliminating Sources Of Error In The System Correction Of A Coordinate Measuring Machine
App 20080201971 - Heiden; Michael ; et al. | 2008-08-28 |
Apparatus And Method For Measuring Structures On A Mask And Or For Calculating Structures In A Photoresist Resulting From The Structures
App 20080204735 - Heiden; Michael | 2008-08-28 |
Method for acquiring high-resolution images of defects on the upper surface of the wafer edge
App 20080204738 - Schupp; Detlef ; et al. | 2008-08-28 |
Test mask for optical and electron optical systems
Grant 7,416,819 - Steinberg , et al. August 26, 2 | 2008-08-26 |
Device for Determining the Position of at Least One Structure on an Object, Use of an Illumination Apparatus with the Device and Use of Protective Gas with the Device
App 20080192264 - Heiden; Michael | 2008-08-14 |
Method and apparatus for inspecting a surface
App 20080174780 - Kreh; Albert | 2008-07-24 |
Apparatus for wafer inspection
App 20080144014 - Vollrath; Wolfgang ; et al. | 2008-06-19 |
Apparatus for wafer inspection
App 20080144025 - Vollrath; Wolfgang ; et al. | 2008-06-19 |
Method for measuring overlay shift
Grant 7,387,859 - Gerlach June 17, 2 | 2008-06-17 |
Method of detecting an edge bead removal line on a wafer
Grant 7,382,450 - Heiden June 3, 2 | 2008-06-03 |
Method of optically inspecting and visualizing optical measuring values obtained from disk-like objects
App 20080062415 - Michelsson; Detlef | 2008-03-13 |
Method for Selecting a Wavelength, and a Microscope
App 20080062510 - Spill; Burkhard ; et al. | 2008-03-13 |
Apparatus and method for measuring the height profile of a structured substrate
App 20080031509 - Heiden; Michael ; et al. | 2008-02-07 |
Apparatus for inspection of a wafer
Grant 7,327,450 - Kreh , et al. February 5, 2 | 2008-02-05 |
Wafer handling device
App 20070298951 - Hofmann; Michael | 2007-12-27 |
Apparatus and method for inspection of a wafer
Grant 7,307,713 - Kreh , et al. December 11, 2 | 2007-12-11 |
Method for enhancing the measuring accuracy when determining the coordinates of structures on a substrate
App 20070268495 - Rinn; Klaus | 2007-11-22 |
Method for enhancing the measuring accuracy when determining the coordinates of structures on a substrate
App 20070268496 - Boesser; Artur ; et al. | 2007-11-22 |
Method for inspection of a wafer
Grant 7,292,328 - Kreh , et al. November 6, 2 | 2007-11-06 |
Apparatus and Method for Inspecting Microstructures in Reflected or Transmitted Infrared Light
App 20070247618 - Graf; Uwe ; et al. | 2007-10-25 |
Method for automatically providing data for the focus monitoring of a lithographic process
Grant 7,277,160 - Kirsch October 2, 2 | 2007-10-02 |
Illuminating device
Grant 7,268,940 - Veith , et al. September 11, 2 | 2007-09-11 |
Apparatus and method for inspecting a semiconductor component
Grant 7,268,867 - Vollrath , et al. September 11, 2 | 2007-09-11 |
Device For Inspecting A Microscopic Component By Means Of An Immersion Objective
App 20070206279 - Brueck; Hans-Juergen ; et al. | 2007-09-06 |
Apparatus and method for calibration of an optoelectronic sensor and for mensuration of features on a substrate
Grant 7,265,343 - Bosser September 4, 2 | 2007-09-04 |
System for the detection of macrodefects
Grant 7,265,823 - Kreh , et al. September 4, 2 | 2007-09-04 |
Apparatus for inspection of a wafer
Grant 7,248,354 - Kreh , et al. July 24, 2 | 2007-07-24 |
Method and apparatus for scanning a specimen using an optical imaging system
Grant 7,247,825 - Sonksen , et al. July 24, 2 | 2007-07-24 |
Apparatus for illuminating and inspecting a surface
App 20070159700 - Danner; Lambart ; et al. | 2007-07-12 |
Apparatus, method, and computer program for wafer inspection
Grant 7,224,446 - Kreh , et al. May 29, 2 | 2007-05-29 |
Apparatus For Measuring The Position Of An Object With A Laser Interferometer System
App 20070103696 - Pohlmann; Harald | 2007-05-10 |
Substrate Support Apparatus For Use In A Position Measuring Device
App 20070103667 - Ferber; Michael ; et al. | 2007-05-10 |
Method of detecting incomplete edge bead removal from a disk-like object
App 20070076194 - Michelsson; Detlef ; et al. | 2007-04-05 |
Device for handling disk-like objects
App 20070077136 - Schenck; Rene | 2007-04-05 |
Method and apparatus for scanning a semiconductor wafer
Grant 7,193,699 - Michelsson March 20, 2 | 2007-03-20 |
Apparatus And Method Of Inspecting The Surface Of A Wafer
App 20070052954 - Sulik; Wolfgang ; et al. | 2007-03-08 |
Coordinate measuring device
App 20070046949 - Heiden; Michael ; et al. | 2007-03-01 |
Apparatus and method of illuminating the surface of a wafer in a wafer inspection system
App 20070037303 - Hogenkamp; Detlef | 2007-02-15 |
Test mask for optical and electron optical systems.
App 20070031739 - Steinberg; Walter ; et al. | 2007-02-08 |
Apparatus for Inspecting a Wafer
App 20070013902 - Backhauss; Henning ; et al. | 2007-01-18 |
Method of optically imaging and inspecting a wafer in the context of edge bead removal
App 20060286811 - Heiden; Michael ; et al. | 2006-12-21 |
Measuring device and method for determining relative positions of a positioning stage configured to be moveable in at least one direction
App 20060279743 - Boesser; Hans-Artur ; et al. | 2006-12-14 |
Method of inspecting semiconductor wafers taking the SAW design into account
App 20060279729 - Heiden; Michael ; et al. | 2006-12-14 |
Apparatus and method for improving measuring accuracy in the determination of structural data
App 20060274934 - Boesser; Hans-Artur ; et al. | 2006-12-07 |
Apparatus and method for optically detecting an object
App 20060275017 - Sulik; Wolfgang ; et al. | 2006-12-07 |
Apparatus and method for inspecting a wafer
App 20060262295 - Backhauss; Henning ; et al. | 2006-11-23 |
Apparatus for inspecting a disk-like object
App 20060245965 - Wienecke; Joachim ; et al. | 2006-11-02 |
Method of detecting an edge bead removal line on a wafer
App 20060238751 - Heiden; Michael | 2006-10-26 |
Transportation system for a disk-like object and system for inspecting disk-like object
App 20060238920 - Krieg; Thomas | 2006-10-26 |
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