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Radiation system with contamination barrier Grant 8,129,702 - Bakker , et al. March 6, 2 | 2012-03-06 |
Radiation System With Contamination Barrier App 20100200772 - BAKKER; Levinus Pieter ;   et al. | 2010-08-12 |
Contamination barrier with expandable lamellas Grant 7,737,425 - Bakker , et al. June 15, 2 | 2010-06-15 |
Contamination barrier with expandable lamellas App 20070222956 - Bakker; Levinus Pieter ;   et al. | 2007-09-27 |
Contamination barrier with expandable lamellas Grant 7,247,866 - Bakker , et al. July 24, 2 | 2007-07-24 |
Grinding machine App 20060131183 - Knaapen; Raymond Jacobus Wilhelmus ;   et al. | 2006-06-22 |
Lithographic apparatus and device manufacturing method Grant 6,903,805 - Schneider , et al. June 7, 2 | 2005-06-07 |
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus Grant 6,844,922 - Bisschops , et al. January 18, 2 | 2005-01-18 |
Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses Grant 6,816,238 - Bisschops , et al. November 9, 2 | 2004-11-09 |
Contamination barrier with expandable lamellas App 20040184014 - Bakker, Levinus Pieter ;   et al. | 2004-09-23 |
Isolation mounts for use with vacuum chambers and their application in lithographic projection apparatuses Grant 6,774,374 - Driessen , et al. August 10, 2 | 2004-08-10 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,747,731 - Janssen , et al. June 8, 2 | 2004-06-08 |
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus App 20040094722 - Bisschops, Theodorus H.J. ;   et al. | 2004-05-20 |
Lithographic apparatus, device manufacturing method, and device manufactured therebyapparatus App 20040001188 - Janssen, Eric W.A. ;   et al. | 2004-01-01 |
Movable support in a vacuum chamber and its application in lithographic projection apparatuses Grant 6,618,122 - Bisschops , et al. September 9, 2 | 2003-09-09 |
Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses Grant 6,603,130 - Bisschops , et al. August 5, 2 | 2003-08-05 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,597,429 - Janssen , et al. July 22, 2 | 2003-07-22 |
Multi-stage drive arrangements and their application in lithographic projection apparatuses Grant 6,597,433 - Renkens , et al. July 22, 2 | 2003-07-22 |
Motion Feed-through Into A Vacuum Chamber And Its Application In Lithographic Projection Apparatuses App 20030098960 - Schneider, Ronald Maarten ;   et al. | 2003-05-29 |
Motion feed-through into a vacuum chamber and its application in lithographic projection apparatus App 20020180946 - Bisschops, Theodorus H.J. ;   et al. | 2002-12-05 |
Movable support in a vacuum chamber and its application in lithographic projection apparatuses App 20020163630 - Bisschops, Theodorus H.J. ;   et al. | 2002-11-07 |
Motion feed-through into a vacuum chamber and its application in lithographic projection apparatuses Grant 6,445,440 - Bisschops , et al. September 3, 2 | 2002-09-03 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20020021425 - Janssen, Eric W.A. ;   et al. | 2002-02-21 |
Holder for optoelectronic device having connection pins bent toward a connection means Grant 5,971,628 - Dona , et al. October 26, 1 | 1999-10-26 |