Veytser, Alexander M.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Veytser, Alexander M..The latest application filed is for "electrostatic chuck having dielectric member with stacked layers and manufacture".

Company Profile

0.11.4

Veytser, Alexander M. - Mountain View CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Electrostatic chuck having dielectric member with stacked layers and manufacture App 20040190215 - Weldon, Edwin C. ; et al.	2004-09-30
Electrostatic chuck having composite dielectric layer and method of manufacture Grant 6,721,162 - Weldon , et al. April 13, 2	2004-04-13
Electrostatic chuck having heater and method Grant 6,538,872 - Wang , et al. March 25, 2	2003-03-25
Substrate support having bonded sections and method Grant 6,503,368 - Kholodenko , et al. January 7, 2	2003-01-07
Plasma chamber support with coupled electrode Grant 6,494,958 - Shamouilian , et al. December 17, 2	2002-12-17
Electrostatic chuck bonded to base with a bond layer and method Grant 6,490,146 - Wang , et al. December 3, 2	2002-12-03
Plasma chamber support having dual electrodes Grant 6,478,924 - Shamouilian , et al. November 12, 2	2002-11-12
Electrostatic chuck having improved electrical connector and method Grant 6,462,928 - Shamouilian , et al. October 8, 2	2002-10-08
Electrostatic chuck having composite dielectric layer and method of manufacture App 20020135969 - Weldon, Edwin C. ; et al.	2002-09-26
Electrostatic chuck bonded to base with a bond layer and method App 20020075624 - Wang, You ; et al.	2002-06-20
Electrostatic Chuck Having Composite Base And Method App 20020036881 - SHAMOUILIAN, SHAMOUIL ; et al.	2002-03-28
Electrostatic chuck having gas cavity and method Grant 6,310,755 - Kholodenko , et al. October 30, 2	2001-10-30
Electrostatic chuck having improved gas conduits Grant 6,108,189 - Weldon , et al. August 22, 2	2000-08-22
Polymer chuck with heater and method of manufacture Grant 6,094,334 - Bedi , et al. July 25, 2	2000-07-25
Electrostatic chuck having a unidirectionally conducting coupler layer Grant 5,801,915 - Kholodenko , et al. September 1, 1	1998-09-01

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