Vetter; James C.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Vetter; James C..The latest application filed is for "edge ring assembly for improving feature profile tilting at extreme edge of wafer".

Company Profile

1.6.7

Vetter; James C. - Pine Grove CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Edge ring assembly for improving feature profile tilting at extreme edge of wafer Grant 10,854,492 - Bosch , et al. December 1, 2	2020-12-01
Measuring and controlling wafer potential in pulsed RF bias processing Grant 9,659,757 - Kuthi , et al. May 23, 2	2017-05-23
Edge Ring Assembly For Improving Feature Profile Tilting At Extreme Edge Of Wafer App 20170053820 - Bosch; William Frederick ; et al.	2017-02-23
Measuring And Controlling Wafer Potential In Pulsed Rf Bias Processing App 20130050892 - Kuthi; Andras ; et al.	2013-02-28
Measuring and controlling wafer potential in pulsed RF bias processing Grant 8,303,763 - Kuthi , et al. November 6, 2	2012-11-06
Measuring And Controlling Wafer Potential In Pulsed Rf Bias Processing App 20120206127 - Kuthi; Andras ; et al.	2012-08-16
Methods of and apparatus for measuring and controlling wafer potential in pulsed RF bias processing Grant 8,192,576 - Kuthi , et al. June 5, 2	2012-06-05
Methods of and apparatus for measuring and controlling wafer potential in pulsed RF bias processing App 20100315064 - Kuthi; Andras ; et al.	2010-12-16
Electronically diagnosing a component in a process line using a substrate signature Grant 6,946,303 - Flanner , et al. September 20, 2	2005-09-20
System and method for creating a substrate signature Grant 6,890,774 - Flanner , et al. May 10, 2	2005-05-10
System and method for creating a substrate signature App 20040110312 - Flanner, Janet M. ; et al.	2004-06-10
Electronically diagnosing a component in a process line using a substrate signature App 20040110311 - Flanner, Janet M. ; et al.	2004-06-10

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