Patent | Date |
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Methods and Apparatus for Measuring a Property of a Substrate App 20210215622 - Elings; Wouter Lodewijk ;   et al. | 2021-07-15 |
Methods and apparatus for measuring a property of a substrate Grant 10,996,176 - Elings , et al. May 4, 2 | 2021-05-04 |
Methods and apparatus for measuring a property of a substrate Grant 10,746,668 - Elings , et al. A | 2020-08-18 |
Methods and Apparatus for Measuring a Property of a Substrate App 20190301850 - ELINGS; Wouter Lodewijk ;   et al. | 2019-10-03 |
Methods and apparatus for measuring a property of a substrate Grant 10,317,191 - Elings , et al. | 2019-06-11 |
Lithographic apparatus for measuring overlay error and a device manufacturing method Grant 9,798,250 - Van De Kerkhof , et al. October 24, 2 | 2017-10-24 |
Methods and Apparatus for Measuring a Property of a Substrate App 20170160073 - ELINGS; Wouter Lodewijk ;   et al. | 2017-06-08 |
Methods and apparatus for measuring a property of a substrate Grant 9,594,029 - Elings , et al. March 14, 2 | 2017-03-14 |
Lithographic Apparatus for Measuring Overlay Error and a Device Manufacturing Method App 20160377992 - VAN DE KERKHOF; Marcus Adrianus ;   et al. | 2016-12-29 |
Method of Measuring Overlay Error and a Device Manufacturing Method App 20160018742 - VAN DE KERKHOF; Marcus Adrianus ;   et al. | 2016-01-21 |
Method of measuring overlay error and a device manufacturing method Grant 9,201,310 - Van De Kerkhof , et al. December 1, 2 | 2015-12-01 |
Methods and Apparatus for Measuring A Property of a Substrate App 20140354969 - Elings; Wouter Lodewijk ;   et al. | 2014-12-04 |
Inspection method and apparatus Grant 8,749,775 - Verstappen , et al. June 10, 2 | 2014-06-10 |
Inspection apparatus for lithography Grant 8,724,087 - Van De Kerkhof , et al. May 13, 2 | 2014-05-13 |
Method of Measuring Overlay Error and a Device Manufacturing Method App 20110200246 - Van De Kerkhof; Marcus Adrianus ;   et al. | 2011-08-18 |
Inspection Apparatus for Lithography App 20110141444 - Van De Kerkhof; Marcus Adrianus ;   et al. | 2011-06-16 |
Inspection Method and Apparatus App 20110085162 - VERSTAPPEN; Leonardus Henricus Marie ;   et al. | 2011-04-14 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method Grant 7,630,087 - Verstappen , et al. December 8, 2 | 2009-12-08 |
Device manufacturing method and computer program product Grant 7,547,495 - Verstappen , et al. June 16, 2 | 2009-06-16 |
Method of selecting a grid model for correcting a process recipe for grid deformations in a lithographic apparatus and lithographic assembly using the same Grant 7,468,795 - Simons , et al. December 23, 2 | 2008-12-23 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method App 20080117434 - Verstappen; Leonardus Henricus, Marie ;   et al. | 2008-05-22 |
Device manufacturing method and computer program product App 20070141486 - Verstappen; Leonardus Henricus Marie ;   et al. | 2007-06-21 |
Modification of an image of a pattern during an imaging process App 20050210438 - Verstappen, Leonardus Henricus Marie ;   et al. | 2005-09-22 |