Vermeulen; Johannes Petrus Martinus Bernardus
Patent Applications and Registrations
Patent applications and USPTO patent grants for Vermeulen; Johannes Petrus Martinus Bernardus.The latest application filed is for "pellicle and pellicle assembly".
Company Profile
13.79.71
- Vermeulen; Johannes Petrus Martinus Bernardus - Leende NL
- VERMEULEN; Johannes Petrus Martinus Bernardus - EINDHOVEN NL
- Vermeulen; Johannes Petrus Martinus Bernardus - Helmond NL
- Vermeulen; Johannes Petrus Martinus Bernardus - Valkenswaard NL
Patent Activity
| Patent | Date |
|---|---|
| Vibration isolation system and lithographic apparatus Grant 11,422,477 - Jacobs , et al. August 23, 2 | 2022-08-23 |
| Pellicle And Pellicle Assembly App 20220252974 - VLES; David Ferdinand ; et al. | 2022-08-11 |
| Thermo-mechanical Actuator App 20220236651 - JANSEN; Bas ; et al. | 2022-07-28 |
| Object Table, A Stage Apparatus And A Lithographic Apparatus App 20220197155 - HERMANUSSEN; Sander Jeroen ; et al. | 2022-06-23 |
| Pellicle and pellicle assembly Grant 11,347,142 - Vles , et al. May 31, 2 | 2022-05-31 |
| Pellicle And Pellicle Assembly App 20220121111 - VLES; David Ferdinand ; et al. | 2022-04-21 |
| Pellicle and pellicle assembly Grant 11,231,646 - Vles , et al. January 25, 2 | 2022-01-25 |
| X-ray Imaging Arrangment App 20210401390 - VAN PINXTEREN; Jeffrey Adrianus Wilhelmus ; et al. | 2021-12-30 |
| Substrate support, lithographic apparatus, substrate inspection apparatus, device manufacturing method Grant 11,156,924 - Vermeulen , et al. October 26, 2 | 2021-10-26 |
| Substrate Support, Lithographic Apparatus, Substrate Inspection Apparatus, Device Manufacturing Method App 20210263431 - VERMEULEN; Johannes Petrus Martinus Bernardus ; et al. | 2021-08-26 |
| Assembly Comprising a Cryostat and Layer of Superconducting Coils and Motor System Provided With Such an Assembly App 20210223706 - KOOLMEES; Hessel Bart ; et al. | 2021-07-22 |
| Pellicle And Pellicle Assembly App 20210208500 - VLES; David Ferdinand ; et al. | 2021-07-08 |
| Positioning device, magnetic support system and lithographic apparatus Grant 11,022,901 - Koolmees , et al. June 1, 2 | 2021-06-01 |
| Pellicle and pellicle assembly Grant 10,983,431 - Vles , et al. April 20, 2 | 2021-04-20 |
| Membrane For Euv Lithography App 20210109438 - Nasalevich; Maxim Aleksandrovich ; et al. | 2021-04-15 |
| Membrane for EUV lithography Grant 10,908,496 - Nasalevich , et al. February 2, 2 | 2021-02-02 |
| Lithographic apparatus and method Grant 10,908,518 - Delpuerto , et al. February 2, 2 | 2021-02-02 |
| Method for manufacturing a membrane assembly Grant 10,712,656 - Houweling , et al. | 2020-07-14 |
| Pellicle And Pellicle Assembly App 20200209736 - VLES; David Ferdinand ; et al. | 2020-07-02 |
| Pellicle And Pellicle Assembly App 20200064731 - VLES; David Ferdinand ; et al. | 2020-02-27 |
| Height Sensor, Lithographic Apparatus And Method For Manufacturing Devices App 20200057390 - BUTLER; Hans ; et al. | 2020-02-20 |
| Measurement substrate and a measurement method Grant 10,508,896 - Nihtianov , et al. Dec | 2019-12-17 |
| Pellicle and pellicle assembly Grant 10,466,585 - Vles , et al. No | 2019-11-05 |
| Positioning device, lithographic apparatus and device manufacturing method Grant 10,310,392 - Butler , et al. | 2019-06-04 |
| A Membrane For Euv Lithography App 20190129299 - NASALEVICH; Maxim Aleksandrovich ; et al. | 2019-05-02 |
| Method Of Manufacturing A Pellicle For A Lithographic Apparatus, A Pellicle For A Lithographic Apparatus, A Lithographic Apparatus, A Device Manufacturing Method, An Apparatus For Processing A Pellicle, And A Method For Processing A Pellicle App 20190056654 - PETER; Maria ; et al. | 2019-02-21 |
| Substrate table and lithographic apparatus Grant 10,192,772 - Achanta , et al. Ja | 2019-01-29 |
| Pellicle And Pellicle Assembly App 20180364561 - VLES; David Ferdinand ; et al. | 2018-12-20 |
| Measurement Substrate And A Measurement Method App 20180340767 - NIHTIANOV; Stoyan ; et al. | 2018-11-29 |
| Positioning Device, Lithographic Apparatus And Device Manufacturing Method App 20180335705 - BUTLER; Hans ; et al. | 2018-11-22 |
| Substrate Table And Lithographic Apparatus App 20180308740 - ACHANTA; Satish ; et al. | 2018-10-25 |
| Lithographic Apparatus And Method App 20180267414 - DELPUERTO; Santiago E. ; et al. | 2018-09-20 |
| Method For Manufacturing A Membrane Assembly App 20180239240 - HOUWELING; Zomer Silvester ; et al. | 2018-08-23 |
| Lithographic apparatus and method Grant 10,001,713 - Del Puerto , et al. June 19, 2 | 2018-06-19 |
| Stage system and a lithographic apparatus Grant 9,726,985 - Van De Ven , et al. August 8, 2 | 2017-08-08 |
| Multi-stage system, a control method therefor, and a lithographic apparatus Grant 9,726,988 - Butler , et al. August 8, 2 | 2017-08-08 |
| Imprint lithographic apparatus and imprint lithographic method Grant 9,715,171 - Butler , et al. July 25, 2 | 2017-07-25 |
| Multi-stage System, A Control Method Therefor, And A Lithographic Apparatus App 20160377993 - Butler; Hans ; et al. | 2016-12-29 |
| Lithographic apparatus and device manufacturing method Grant 9,507,277 - Aangenent , et al. November 29, 2 | 2016-11-29 |
| Multi-stage system, a control method therefor, and a lithographic apparatus Grant 9,442,394 - Butler , et al. September 13, 2 | 2016-09-13 |
| Lithographic apparatus and method Grant 9,410,796 - Beerens , et al. August 9, 2 | 2016-08-09 |
| Imprint lithography method Grant 9,372,396 - Kruijt-Stegeman , et al. June 21, 2 | 2016-06-21 |
| Lithographic apparatus, method of deforming a substrate table and device manufacturing method Grant 9,329,501 - Huang , et al. May 3, 2 | 2016-05-03 |
| Lithographic apparatus, and patterning device for use in a lithographic process Grant 9,268,211 - Van Eijk , et al. February 23, 2 | 2016-02-23 |
| Multi-stage System, A Control Method Therefor, And A Lithographic Apparatus App 20150338752 - BUTLER; Hans ; et al. | 2015-11-26 |
| Lithographic apparatus and device manufacturing method Grant 9,141,003 - Beerens , et al. September 22, 2 | 2015-09-22 |
| Lithographic apparatus and method Grant 9,141,004 - Vermeulen , et al. September 22, 2 | 2015-09-22 |
| Multi-stage system, a control method therefor, and a lithographic apparatus Grant 9,128,390 - Butler , et al. September 8, 2 | 2015-09-08 |
| Imprint lithography apparatus Grant 9,116,423 - Jeunink , et al. August 25, 2 | 2015-08-25 |
| Lithographic apparatus comprising a substrate table and a surface substrate actuator Grant 9,110,387 - Butler , et al. August 18, 2 | 2015-08-18 |
| Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing method Grant 9,081,307 - Hol , et al. July 14, 2 | 2015-07-14 |
| Lithographic apparatus and device manufacturing method with bearing to allow substrate holder to float with respect to substrate table Grant 9,041,913 - Vermeulen May 26, 2 | 2015-05-26 |
| Lithographic apparatus, and patterning device for use in a lithographic process Grant 9,019,470 - Van Eijk , et al. April 28, 2 | 2015-04-28 |
| System for detecting motion, lithographic apparatus and device manufacturing method Grant 8,982,359 - Van Eijk , et al. March 17, 2 | 2015-03-17 |
| Multi-stage System, A Control Method Therefor, And A Lithographic Apparatus App 20150062554 - BUTLER; Hans ; et al. | 2015-03-05 |
| Positioning device, lithographic apparatus, positioning method and device manufacturing method Grant 8,947,640 - Lafarre , et al. February 3, 2 | 2015-02-03 |
| Lithographic apparatus and device manufacturing method Grant 8,932,042 - Vermeulen , et al. January 13, 2 | 2015-01-13 |
| Stage System and a Lithographic Apparatus App 20140375975 - Van De Ven; Bastiaan Lambertus Wilhelmus Marinus ; et al. | 2014-12-25 |
| Multi-stage system, a control method therefor, and a lithographic apparatus Grant 8,913,229 - Butler , et al. December 16, 2 | 2014-12-16 |
| Positioning system and a method for positioning a substage with respect to a frame Grant 8,896,811 - Hol , et al. November 25, 2 | 2014-11-25 |
| Imprint lithography apparatus Grant 8,845,320 - De Schiffart , et al. September 30, 2 | 2014-09-30 |
| Lithographic apparatus and device manufacturing method Grant 8,755,030 - Valentin , et al. June 17, 2 | 2014-06-17 |
| Lithographic Apparatus, Programmable Patterning Device And Lithographic Method App 20140160452 - De Jager; Pieter Willem Herman ; et al. | 2014-06-12 |
| Position sensor and lithographic apparatus Grant 8,736,815 - Beerens , et al. May 27, 2 | 2014-05-27 |
| Electromagnetic actuator, stage apparatus and lithographic apparatus Grant 8,687,171 - Hol , et al. April 1, 2 | 2014-04-01 |
| Imprint lithography apparatus Grant 8,685,295 - Vermeulen , et al. April 1, 2 | 2014-04-01 |
| Lithographic Apparatus, And Patterning Device For Use In A Lithographic Process App 20140022526 - VAN EIJK; Jan ; et al. | 2014-01-23 |
| Lithographic Apparatus And Device Manufacturing Method App 20130335722 - Aangenent; Wilhelmus Henricus Theodorus Maria ; et al. | 2013-12-19 |
| Actuator Grant 8,597,014 - Cadee , et al. December 3, 2 | 2013-12-03 |
| System for Detecting Motion, Lithographic Apparatus and Device Manufacturing Method App 20130194586 - Van Eijk; Jan ; et al. | 2013-08-01 |
| Positioning system, lithographic apparatus and method Grant 8,482,719 - Van Eijk , et al. July 9, 2 | 2013-07-09 |
| Lithographic Apparatus and Method App 20130162966 - BEERENS; Ruud Antonius Catharina Maria ; et al. | 2013-06-27 |
| Lithographic Apparatus and Substrate Handling Method App 20130077078 - LAFARRE; Raymond Wilhelmus Louis ; et al. | 2013-03-28 |
| Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless Grant 8,368,868 - Vermeulen , et al. February 5, 2 | 2013-02-05 |
| Immersion lithographic apparatus, drying device, immersion metrology apparatus and device manufacturing method Grant 8,345,218 - Riepen , et al. January 1, 2 | 2013-01-01 |
| Positioning Device, Lithographic Apparatus, Positioning Method And Device Manufacturing Method App 20120327387 - LAFARRE; Raymond Wilhelmus Louis ; et al. | 2012-12-27 |
| Lithographic Apparatus, Method Of Deforming A Substrate Table And Device Manufacturing Method App 20120327386 - Huang; Yang-Shan ; et al. | 2012-12-27 |
| Lithographic apparatus and device manufacturing method Grant 8,334,983 - Beerens , et al. December 18, 2 | 2012-12-18 |
| Multi-stage System, A Control Method Therefor, And A Lithographic Apparatus App 20120300186 - BUTLER; Hans ; et al. | 2012-11-29 |
| Lithographic Apparatus Comprising A Substrate Table App 20120300188 - Butler; Hans ; et al. | 2012-11-29 |
| Imprint lithography Grant 8,319,968 - Den Boef , et al. November 27, 2 | 2012-11-27 |
| Lithographic Apparatus And Method App 20120249987 - Vermeulen; Johannes Petrus Martinus Bernardus ; et al. | 2012-10-04 |
| Electromagnetic Actuator, Stage Apparatus And Lithographic Apparatus App 20120212723 - Hol; Sven Antoin Johan ; et al. | 2012-08-23 |
| Lithographic Apparatus and Device Manufacturing Method App 20120153543 - Vermeulen; Johannes Petrus Martinus Bernardus ; et al. | 2012-06-21 |
| Variable Reluctance Device, Stage Apparatus, Lithographic Apparatus and Device Manufacturing Method App 20120019794 - HOL; Sven Antoin Johan ; et al. | 2012-01-26 |
| Position Sensor And Lithographic Apparatus App 20110304839 - BEERENS; Ruud Antonius Catharina Maria ; et al. | 2011-12-15 |
| Imprint lithography Grant 8,043,085 - Kruijt-Stegeman , et al. October 25, 2 | 2011-10-25 |
| Lithographic Apparatus And Device Manufacturing Method App 20110222039 - VALENTIN; Christiaan Louis ; et al. | 2011-09-15 |
| Imprint Lithographic Apparatus And Imprint Lithographic Method App 20110163477 - Butler; Hans ; et al. | 2011-07-07 |
| Lithographic Apparatus And Device Manufacturing Method App 20110085180 - Beerens; Ruud Antonius Catharina Maria ; et al. | 2011-04-14 |
| Positioning System And A Method For Positioning A Substage With Respect To A Frame App 20110075122 - Hol; Sven Antoin Johan ; et al. | 2011-03-31 |
| Positioning System, Lithographic Apparatus And Method App 20110026004 - VAN EIJK; Jan ; et al. | 2011-02-03 |
| Imprint Lithography Apparatus App 20110008483 - Jeunink; Andre Bernardus ; et al. | 2011-01-13 |
| Imprint Lithography Apparatus App 20110003023 - VERMEULEN; Johannes Petrus Martinus Bernardus ; et al. | 2011-01-06 |
| Lithographic Apparatus App 20100302518 - VAN EIJK; Jan ; et al. | 2010-12-02 |
| Imprint Lithography Apparatus App 20100297282 - De Schiffart; Catharinus ; et al. | 2010-11-25 |
| Lithographic Apparatus And Device Manufacturing Method App 20100297561 - BEERENS; Ruud Antonius Catharina Maria ; et al. | 2010-11-25 |
| Actuator App 20100272846 - Cadee; Theodorus Petrus Maria ; et al. | 2010-10-28 |
| Lithographic Apparatus And Device Manufacturing Method App 20100157273 - VERMEULEN; Johannes Petrus Martinus Bernardus | 2010-06-24 |
| Lithographic Apparatus, And Patterning Device For Use In A Lithographic Process App 20100157263 - Van Eijk; Jan ; et al. | 2010-06-24 |
| Lithographic Apparatus With Gas Pressure Means For Controlling A Planar Position Of A Patterning Device Contactless App 20100159399 - VERMEULEN; Johannes Petrus Martinus Bernardus ; et al. | 2010-06-24 |
| Lithographic Apparatus And Device Manufacturing Method App 20100103390 - LAFARRE; Raymond Wilhelmus Louis ; et al. | 2010-04-29 |
| Imprint Lithography App 20100065987 - DEN BOEF; Arie Jeffrey ; et al. | 2010-03-18 |
| Fluid Handling Structure, Lithographic Apparatus And Device Manufactuirng Method App 20100060868 - Tanasa; Gheorghe ; et al. | 2010-03-11 |
| Split Axes Stage Design For Semiconductor Applications App 20100044943 - Vermeulen; Johannes Petrus Martinus Bernardus ; et al. | 2010-02-25 |
| Immersion Lithographic Apparatus, Drying Device, Immersion Metrology Apparatus And Device Manufacturing Method App 20090279063 - Riepen; Michel ; et al. | 2009-11-12 |
| Lithographic Apparatus And Methods App 20090225289 - Vermeulen; Johannes Petrus Martinus Bernardus ; et al. | 2009-09-10 |
| Method and apparatus for maintaining a machine part Grant 7,576,831 - Van Groos , et al. August 18, 2 | 2009-08-18 |
| Lithographic support structure Grant 7,486,384 - Tinnemans , et al. February 3, 2 | 2009-02-03 |
| Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,397,040 - Driessen , et al. July 8, 2 | 2008-07-08 |
| Monolithic structure with at least one elastic hinge App 20070067953 - Vermeulen; Johannes Petrus Martinus Bernardus | 2007-03-29 |
| Lithographic apparatus, coil assembly, positioning device including a coil assembly, and device manufacturing method Grant 7,105,955 - Vermeulen , et al. September 12, 2 | 2006-09-12 |
| Lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,084,953 - Driessen , et al. August 1, 2 | 2006-08-01 |
| Band coil App 20050236923 - Janssen, Henricus Wilhelmus Aloysius ; et al. | 2005-10-27 |
| Lithographic apparatus, coil assembly, positioning device including a coil assembly, and device manufacturing method App 20050231043 - Vermeulen, Johannes Petrus Martinus Bernardus ; et al. | 2005-10-20 |
| Band coil Grant 6,926,588 - Janssen , et al. August 9, 2 | 2005-08-09 |
| Lithographic support structure App 20040246459 - Tinnemans, Patricius Aloysius Jacobus ; et al. | 2004-12-09 |
| Lithographic apparatus, device manufacturing method and device manufacturing thereby App 20040195527 - Driessen, Johannes Cornelis ; et al. | 2004-10-07 |
| Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,740,891 - Driessen , et al. May 25, 2 | 2004-05-25 |
| Lithographic apparatus, device manufacturing mehtod, and device manufactured thereby App 20020079464 - Driessen, Johannes Cornelis ; et al. | 2002-06-27 |
| Band coil App 20020079775 - Janssen, Henricus Wilhelmus Aloysius ; et al. | 2002-06-27 |
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