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Multimode configurable spectrometer
Grant 11,424,115 - Bullock , et al. August 23, 2 | 2022-08-23 |
Microwave plasma source
Grant 10,923,324 - Meloni February 16, 2 | 2021-02-16 |
System and method for measurement of complex structures
Grant 10,861,755 - Kueny December 8, 2 | 2020-12-08 |
Fiberoptically-coupled measurement system with reduced sensitivity to angularly-driven variation of signals upon reflection from a wafer
Grant 10,794,763 - Meloni , et al. October 6, 2 | 2020-10-06 |
Adaptable-modular optical sensor based process control system, and method of operation thereof
Grant 10,763,144 - Lynes , et al. Sep | 2020-09-01 |
Fiberoptically-coupled Measurement System With Reduced Sensitivity To Angularly-driven Variation Of Signals Upon Reflection From A Wafer
App 20200264044 - Meloni; Mark A. ; et al. | 2020-08-20 |
Microwave plasma source
Grant 10,679,832 - Meloni | 2020-06-09 |
Signal Conversion System For Optical Sensors
App 20190339130 - Bullock; Larry Arlos | 2019-11-07 |
Adaptable-modular Optical Sensor Based Process Control System, And Method Of Operation Thereof
App 20190273007 - Lynes; Sean ; et al. | 2019-09-05 |
System and method for calibration of optical signals in semiconductor process systems
Grant 10,365,212 - Kueny , et al. July 30, 2 | 2019-07-30 |
Microwave Plasma Source
App 20190157045 - Meloni; Mark A. | 2019-05-23 |
Microwave Plasma Source
App 20190013187 - Meloni; Mark A. | 2019-01-10 |
Multimode Configurable Spectrometer
App 20180286650 - Bullock; Larry Arlos ; et al. | 2018-10-04 |
System And Method For Measurement Of Complex Structures
App 20180226305 - Kueny; Andrew Weeks | 2018-08-09 |
Electron beam exciter for use in chemical analysis in processing systems
Grant 9,997,325 - Hosch , et al. June 12, 2 | 2018-06-12 |
System And Method For Calibration Of Optical Signals In Semiconductor Process Systems
App 20180136118 - Kueny; Andrew Weeks ; et al. | 2018-05-17 |
Method and apparatus for the detection of arc events during the plasma processing of a wafer, surface of substrate
Grant 9,842,726 - Daniels , et al. December 12, 2 | 2017-12-12 |
High dynamic range measurement system for process monitoring
Grant 9,801,265 - Bullock , et al. October 24, 2 | 2017-10-24 |
Referenced and stabilized optical measurement system
Grant 9,772,226 - Corless , et al. September 26, 2 | 2017-09-26 |
High Dynamic Range Measurement System For Process Monitoring
App 20160316546 - Bullock; Larry Arlos ; et al. | 2016-10-27 |
Method And Apparatus For The Detection Of Arc Events During The Plasma Processing Of A Wafer, Surface Of Substrate
App 20160268108 - DANIELS; Stephen ; et al. | 2016-09-15 |
Apparatus and method for enhancing dynamic range of charge coupled device-based spectrograph
Grant 9,386,241 - Kueny July 5, 2 | 2016-07-05 |
Workpiece characterization system
Grant 9,383,323 - Meloni , et al. July 5, 2 | 2016-07-05 |
Method and Apparatus for Monitoring Pulsed Plasma Processes
App 20160131587 - Meloni; Mark Anthony ; et al. | 2016-05-12 |
High dynamic range measurement system for process monitoring
Grant 9,310,250 - Bullock , et al. April 12, 2 | 2016-04-12 |
Calibration of a radiometric optical monitoring system used for fault detection and process monitoring
Grant 8,125,633 - Whelan , et al. February 28, 2 | 2012-02-28 |
Method and apparatus for reducing the effects of window clouding on a viewport window in a reactive environment
Grant 7,630,859 - Harvey December 8, 2 | 2009-12-08 |
Self referencing heterodyne reflectometer and method for implementing
Grant 7,589,843 - Aiyer , et al. September 15, 2 | 2009-09-15 |
Self referencing heterodyne reflectometer and method for implementing
Grant 7,545,503 - Aiyer June 9, 2 | 2009-06-09 |
Calibration of a radiometric optical monitoring system used for fault detection and process monitoring
App 20090103081 - Whelan; Mike ; et al. | 2009-04-23 |
Method and apparatus for reducing the effects of window clouding on a viewport window in a reactive environment
App 20080275658 - Harvey; Kenneth C. | 2008-11-06 |
Multichannel array as window protection
App 20080233016 - Harvey; Kenneth C. | 2008-09-25 |
Heterodyne reflectometer for film thickness monitoring and method for implementing
Grant 7,339,682 - Aiyer , et al. March 4, 2 | 2008-03-04 |
Method for monitoring film thickness using heterodyne reflectometry and grating interferometry
App 20060285120 - Aiyer; Arun Ananth | 2006-12-21 |
Heterodyne reflectomer for film thickness monitoring and method for implementing
App 20060192973 - Aiyer; Arun Ananth ; et al. | 2006-08-31 |
Non-contact optical profilometer with orthogonal beams
Grant 7,084,979 - Aiyer August 1, 2 | 2006-08-01 |
System and method for in-situ monitor and control of film thickness and trench depth
Grant 7,049,156 - Kueny May 23, 2 | 2006-05-23 |
Optical closed-loop control system for a CMP apparatus and method of manufacture thereof
Grant 6,991,514 - Meloni , et al. January 31, 2 | 2006-01-31 |
Method and apparatus for implementing an afterglow emission spectroscopy monitor
Grant 6,975,393 - Mettes December 13, 2 | 2005-12-13 |
System and method for determining endpoint in etch processes using partial least squares discriminant analysis in the time domain of optical emission spectra
Grant 6,830,939 - Harvey , et al. December 14, 2 | 2004-12-14 |
Apparatus for characterization of microelectronic feature quality
Grant 6,642,063 - Mundt , et al. November 4, 2 | 2003-11-04 |
Spectroscopic ellipsometer
Grant 6,052,188 - Fluckiger , et al. April 18, 2 | 2000-04-18 |
Ultrasonic transducer and mount
Grant 5,364,005 - Whelan , et al. November 15, 1 | 1994-11-15 |
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