Patent | Date |
---|
Fluoropolymer stamp fabrication method Grant 11,454,884 - Gouk , et al. September 27, 2 | 2022-09-27 |
Substrate Structuring Methods App 20220278248 - CHEN; Han-Wen ;   et al. | 2022-09-01 |
Drying process for high aspect ratio features Grant 11,424,137 - Gouk , et al. August 23, 2 | 2022-08-23 |
Methods Of Forming Microvias With Reduced Diameter App 20220246558 - Buch; Chintan ;   et al. | 2022-08-04 |
Laser ablation for package fabrication Grant 11,400,545 - Leschkies , et al. August 2, 2 | 2022-08-02 |
Reconstituted substrate structure and fabrication methods for heterogeneous packaging integration Grant 11,398,433 - Chen , et al. July 26, 2 | 2022-07-26 |
Methods for improved polymer-copper adhesion Grant 11,388,822 - Chakraborty , et al. July 12, 2 | 2022-07-12 |
Substrate structuring methods Grant 11,362,235 - Chen , et al. June 14, 2 | 2022-06-14 |
Method For Via Formation By Micro-imprinting App 20220171281 - GOUK; Roman ;   et al. | 2022-06-02 |
Method of fine redistribution interconnect formation for advanced packaging applications Grant 11,342,256 - Chen , et al. May 24, 2 | 2022-05-24 |
Package Structures With Built-in Emi Shielding App 20220157740 - VERHAVERBEKE; Steven ;   et al. | 2022-05-19 |
High Connectivity Device Stacking App 20220139884 - LESCHKIES; Kurtis ;   et al. | 2022-05-05 |
Methods of forming microvias with reduced diameter Grant 11,315,890 - Buch , et al. April 26, 2 | 2022-04-26 |
Method for via formation by micro-imprinting Grant 11,281,094 - Gouk , et al. March 22, 2 | 2022-03-22 |
Methods for Improved Polymer-Copper Adhesion App 20220071023 - Chakraborty; Tapash ;   et al. | 2022-03-03 |
Reconstituted substrate structure and fabrication methods for heterogeneous packaging integration Grant 11,264,333 - Chen , et al. March 1, 2 | 2022-03-01 |
Package structure and fabrication methods Grant 11,264,331 - Chen , et al. March 1, 2 | 2022-03-01 |
High connectivity device stacking Grant 11,257,790 - Leschkies , et al. February 22, 2 | 2022-02-22 |
Methods Of Forming Microvias With Reduced Diameter App 20220051999 - Buch; Chintan ;   et al. | 2022-02-17 |
Method And Apparatus For Laser Drilling Blind Vias App 20220044936 - LEI; Wei-Sheng ;   et al. | 2022-02-10 |
Laser Ablation System For Package Fabrication App 20220028709 - LESCHKIES; Kurtis ;   et al. | 2022-01-27 |
Method and apparatus for laser drilling blind vias Grant 11,232,951 - Lei , et al. January 25, 2 | 2022-01-25 |
Method And Apparatus For Laser Drilling Blind Vias App 20220020590 - LEI; Wei-Sheng ;   et al. | 2022-01-20 |
High Pressure And High Temperature Anneal Chamber App 20220013375 - DELMAS; Jean ;   et al. | 2022-01-13 |
Apparatus and methods for manufacturing semiconductor structures using protective barrier layer Grant 11,177,128 - Manna , et al. November 16, 2 | 2021-11-16 |
Laser Ablation For Package Fabrication App 20210346983 - LESCHKIES; Kurtis ;   et al. | 2021-11-11 |
Fluoropolymer Stamp Fabrication Method App 20210325776 - GOUK; Roman ;   et al. | 2021-10-21 |
Reduced volume processing chamber Grant 11,133,174 - Gouk , et al. September 28, 2 | 2021-09-28 |
High Connectivity Device Stacking App 20210288027 - LESCHKIES; Kurtis ;   et al. | 2021-09-16 |
Package Structure And Fabrication Methods App 20210257306 - CHEN; Han-Wen ;   et al. | 2021-08-19 |
Reconstituted Substrate Structure And Fabrication Methods For Heterogeneous Packaging Integration App 20210257307 - CHEN; Han-Wen ;   et al. | 2021-08-19 |
Package Core Assembly And Fabrication Methods App 20210257289 - CHEN; Han-Wen ;   et al. | 2021-08-19 |
Package Core Assembly And Fabrication Methods App 20210249345 - CHEN; Han-Wen ;   et al. | 2021-08-12 |
Substrate Structuring Methods App 20210234060 - CHEN; Han-Wen ;   et al. | 2021-07-29 |
Shadow Mask With Plasma Resistant Coating App 20210222291 - HUANG; Xi ;   et al. | 2021-07-22 |
Substrate structuring methods Grant 11,063,169 - Chen , et al. July 13, 2 | 2021-07-13 |
Package Core Assembly And Fabrication Methods App 20210159158 - CHEN; Han-Wen ;   et al. | 2021-05-27 |
Package Core Assembly And Fabrication Methods App 20210159160 - CHEN; Han-Wen ;   et al. | 2021-05-27 |
High pressure and high temperature anneal chamber Grant 11,018,032 - Delmas , et al. May 25, 2 | 2021-05-25 |
Stiction-free drying process with contaminant removal for high-aspect ratio semiconductor device structures Grant 11,011,392 - Verhaverbeke , et al. May 18, 2 | 2021-05-18 |
Package structure with embedded core Grant 10,937,726 - Chen , et al. March 2, 2 | 2021-03-02 |
Package structure and fabrication methods Grant 10,886,232 - Chen , et al. January 5, 2 | 2021-01-05 |
Method for copper plating through silicon vias using wet wafer back contact Grant 10,879,116 - Gouk , et al. December 29, 2 | 2020-12-29 |
Planarization Methods For Packaging Substrates App 20200391343 - CHEN; Han-Wen ;   et al. | 2020-12-17 |
Reconstituted Substrate Structure And Fabrication Methods For Heterogeneous Packaging Integration App 20200395304 - CHEN; Han-Wen ;   et al. | 2020-12-17 |
Reconstituted Substrate Structure And Fabrication Methods For Heterogeneous Packaging Integration App 20200395305 - CHEN; Han-Wen ;   et al. | 2020-12-17 |
Reconstituted Substrate Structure And Fabrication Methods For Heterogeneous Packaging Integration App 20200395306 - CHEN; Han-Wen ;   et al. | 2020-12-17 |
Apparatus And Methods For Manufacturing Semiconductor Structures Using Protective Barrier Layer App 20200388486 - MANNA; Pramit ;   et al. | 2020-12-10 |
Package Structure And Fabrication Methods App 20200357749 - CHEN; Han-Wen ;   et al. | 2020-11-12 |
Package Structure And Fabrication Methods App 20200357750 - CHEN; Han-Wen ;   et al. | 2020-11-12 |
Substrate Structuring Methods App 20200357947 - CHEN; Han-Wen ;   et al. | 2020-11-12 |
Controlled growth of thin silicon oxide film at low temperature Grant 10,818,490 - Jiang , et al. October 27, 2 | 2020-10-27 |
Drying process for high aspect ratio features Grant 10,777,405 - Gouk , et al. Sept | 2020-09-15 |
Method Of Fine Redistribution Interconnect Formation For Advanced Packaging Applications App 20200243432 - CHEN; Han-Wen ;   et al. | 2020-07-30 |
High Pressure And High Temperature Anneal Chamber App 20200243345 - DELMAS; Jean ;   et al. | 2020-07-30 |
Method for via formation in flowable epoxy materials by micro-imprint Grant 10,727,083 - Gouk , et al. | 2020-07-28 |
High Pressure And High Temperature Anneal Chamber App 20200234973 - DELMAS; Jean ;   et al. | 2020-07-23 |
Method For Via Formation By Micro-imprinting App 20200159113 - GOUK; Roman ;   et al. | 2020-05-21 |
High pressure and high temperature anneal chamber Grant 10,636,677 - Delmas , et al. | 2020-04-28 |
Substrate support and baffle apparatus Grant 10,573,510 - Gouk , et al. Feb | 2020-02-25 |
Techniques for filling a structure using selective surface modification Grant 10,559,496 - Leschkies , et al. Feb | 2020-02-11 |
Method for enabling self-aligned lithography on metal contacts and selective deposition using free-standing vertical carbon structures Grant 10,490,411 - Leschkies , et al. Nov | 2019-11-26 |
Stiction-free Drying Process With Contaminant Removal For High-aspect Ratio Semiconductor Device Structures App 20190287823 - VERHAVERBEKE; Steven ;   et al. | 2019-09-19 |
Small Thermal Mass Pressurized Chamber App 20190273002 - GOUK; Roman ;   et al. | 2019-09-05 |
High Pressure And High Temperature Anneal Chamber App 20190237345 - DELMAS; Jean ;   et al. | 2019-08-01 |
Stiction-free drying process with contaminant removal for high-aspect ratio semiconductor device structures Grant 10,354,892 - Verhaverbeke , et al. July 16, 2 | 2019-07-16 |
Reduced Volume Processing Chamber App 20190214247 - GOUK; Roman ;   et al. | 2019-07-11 |
Stiction-free drying process with contaminant removal for high-aspect ratio semiconductor device STR Grant 10,347,511 - Verhaverbeke , et al. July 9, 2 | 2019-07-09 |
Controlled Growth Of Thin Silicon Oxide Film At Low Temperature App 20190189435 - JIANG; Shishi ;   et al. | 2019-06-20 |
Method Of Reconstituted Substrate Formation For Advanced Packaging Applications App 20190181019 - CHEN; Han-Wen ;   et al. | 2019-06-13 |
Small thermal mass pressurized chamber Grant 10,304,703 - Gouk , et al. | 2019-05-28 |
Apparatus And Methods For Packaging Semiconductor Dies App 20190139788 - FU; Boyi ;   et al. | 2019-05-09 |
Supercritical carbon dioxide process for low-k thin films Grant 10,283,344 - Verhaverbeke , et al. | 2019-05-07 |
High pressure and high temperature anneal chamber Grant 10,276,411 - Delmas , et al. | 2019-04-30 |
Method and apparatus for aligning nanowires deposited by an electrospinning process Grant 10,259,007 - Leschkies , et al. | 2019-04-16 |
Method for creating a high refractive index wave guide Grant 10,234,630 - Meyer Timmerman Thijssen , et al. | 2019-03-19 |
Method of redistribution layer formation for advanced packaging applications Grant 10,229,827 - Chen , et al. | 2019-03-12 |
High Pressure And High Temperature Anneal Chamber App 20190057885 - DELMAS; Jean ;   et al. | 2019-02-21 |
High Pressure And High Temperature Anneal Chamber App 20190057879 - DELMAS; Jean ;   et al. | 2019-02-21 |
Method of reconstituted substrate formation for advanced packaging applications Grant 10,211,072 - Chen , et al. Feb | 2019-02-19 |
Method For Creating A High Refractive Index Wave Guide App 20190018189 - MEYER TIMMERMAN THIJSSEN; Rutger ;   et al. | 2019-01-17 |
Method Of Redistribution Layer Formation For Advanced Packaging Applications App 20180374696 - CHEN; Han-Wen ;   et al. | 2018-12-27 |
Method Of Reconstituted Substrate Formation For Advanced Packaging Applications App 20180374718 - CHEN; Han-Wen ;   et al. | 2018-12-27 |
Quality Improvement Of Films Deposited On A Substrate App 20180350563 - MANNA; Pramit ;   et al. | 2018-12-06 |
Substrate Support And Baffle Apparatus App 20180350593 - GOUK; Roman ;   et al. | 2018-12-06 |
Method For Enabling Self-aligned Lithography On Metal Contacts And Selective Deposition Using Free-standing Vertical Carbon Structures App 20180337061 - LESCHKIES; Kurtis ;   et al. | 2018-11-22 |
Method And Apparatus For Using Supercritical Fluids In Semiconductor Applications App 20180323063 - DELMAS; Jean ;   et al. | 2018-11-08 |
Method of forming a barrier layer for through via applications Grant 10,096,516 - Leschkies , et al. October 9, 2 | 2018-10-09 |
High-pressure annealing and reducing wet etch rates Grant 10,062,561 - Leschkies , et al. August 28, 2 | 2018-08-28 |
Techniques For Filling A Structure Using Selectrive Surface Modification App 20180218943 - Leschkies; Kurtis ;   et al. | 2018-08-02 |
Substrate support and baffle apparatus Grant 10,032,624 - Gouk , et al. July 24, 2 | 2018-07-24 |
High-pressure Annealing And Reducing Wet Etch Rates App 20180122630 - Leschkies; Kurtis S. ;   et al. | 2018-05-03 |
Process and chemistry of plating of through silicon vias Grant 9,935,004 - Gouk , et al. April 3, 2 | 2018-04-03 |
Techniques for filling a structure using selective surface modification Grant 9,935,005 - Leschkies , et al. April 3, 2 | 2018-04-03 |
Hdd Pattern Implant System App 20170365288 - Foad; Majeed A. ;   et al. | 2017-12-21 |
Stiction-free Drying Process With Contaminant Removal For High-aspect Ratio Semiconductor Device Str App 20170250094 - VERHAVERBEKE; Steven ;   et al. | 2017-08-31 |
Dual water tank for city water and rain water Grant 9,739,041 - Verhaverbeke August 22, 2 | 2017-08-22 |
Process And Chemistry Of Plating Of Through Silicon Vias App 20170213762 - GOUK; Roman ;   et al. | 2017-07-27 |
Resist Fortification For Magnetic Media Patterning App 20170206922 - BENCHER; Christopher Dennis ;   et al. | 2017-07-20 |
HDD pattern implant system Grant 9,685,186 - Foad , et al. June 20, 2 | 2017-06-20 |
Supercritical Carbon Dioxide Process For Low-k Thin Films App 20170148624 - VERHAVERBEKE; Steven ;   et al. | 2017-05-25 |
Pattern fortification for HDD bit patterned media pattern transfer Grant 9,660,185 - Gouk , et al. May 23, 2 | 2017-05-23 |
Techniques For Filling A Structure Using Selective Surface Modification App 20170140983 - LESCHKIES; Kurtis ;   et al. | 2017-05-18 |
Resist fortification for magnetic media patterning Grant 9,646,642 - Bencher , et al. May 9, 2 | 2017-05-09 |
Drying Process For High Aspect Ratio Features App 20170098541 - GOUK; Roman ;   et al. | 2017-04-06 |
Substrate Support And Baffle Apparatus App 20170098542 - GOUK; Roman ;   et al. | 2017-04-06 |
Small Thermal Mass Pressurized Chamber App 20170098555 - GOUK; Roman ;   et al. | 2017-04-06 |
Reduced Volume Processing Chamber App 20170098537 - GOUK; Roman ;   et al. | 2017-04-06 |
Methods for forming a molecular dopant monolayer on a substrate Grant 9,490,125 - Gouk , et al. November 8, 2 | 2016-11-08 |
Pattern Fortification For Hdd Bit Patterned Media Pattern Transfer App 20160260896 - GOUK; Roman ;   et al. | 2016-09-08 |
Buffer layers for metal oxide semiconductors for TFT Grant 9,385,239 - Leschkies , et al. July 5, 2 | 2016-07-05 |
Pattern fortification for HDD bit patterned media pattern transfer Grant 9,343,664 - Gouk , et al. May 17, 2 | 2016-05-17 |
Method For Copper Plating Through Silicon Vias Using Wet Wafer Back Contact App 20160133515 - GOUK; Roman ;   et al. | 2016-05-12 |
Patterning of magnetic thin film using energized ions Grant 9,263,078 - Verhaverbeke , et al. February 16, 2 | 2016-02-16 |
Methods For Forming A Molecular Dopant Monolayer On A Substrate App 20150380249 - GOUK; Roman ;   et al. | 2015-12-31 |
High Work-function Buffer Layers For Silicon-based Photovoltaic Devices App 20150295099 - Leschkies; Kurtis ;   et al. | 2015-10-15 |
Method And Apparatus For Aligning Nanowires Deposited By An Electrospinning Process App 20150251214 - LESCHKIES; Kurtis ;   et al. | 2015-09-10 |
Porous amorphous silicon--carbon nanotube composite based electrodes for battery applications Grant 9,105,921 - Pushparaj , et al. August 11, 2 | 2015-08-11 |
Pattern Fortification For Hdd Bit Patterned Media Pattern Transfer App 20150214475 - GOUK; Roman ;   et al. | 2015-07-30 |
HDD patterning using flowable CVD film Grant 8,986,557 - Underwood , et al. March 24, 2 | 2015-03-24 |
System for batch processing of magnetic media Grant 8,911,554 - Verhaverbeke , et al. December 16, 2 | 2014-12-16 |
Method and apparatus of forming a conductive layer Grant 8,895,351 - Leschkies , et al. November 25, 2 | 2014-11-25 |
Apparatus and methods for silicon oxide CVD resist planarization Grant 8,852,962 - Verhaverbeke , et al. October 7, 2 | 2014-10-07 |
Buffer Layers For Metal Oxide Semiconductors For Tft App 20140264354 - LESCHKIES; Kurtis ;   et al. | 2014-09-18 |
Hdd Patterning Using Flowable Cvd Film App 20140231384 - UNDERWOOD; Brian Saxton ;   et al. | 2014-08-21 |
In situ vapor phase surface activation of SiO.sub.2 Grant 8,778,816 - Sato , et al. July 15, 2 | 2014-07-15 |
Energy Storage Device With Porous Electrode App 20140178728 - NALAMASU; Omkaram ;   et al. | 2014-06-26 |
Stiction-free Drying Process With Contaminant Removal For High-aspect Ratio Semiconductor Device Structures App 20140144462 - VERHAVERBEKE; Steven ;   et al. | 2014-05-29 |
Resist Fortification For Magnetic Media Patterning App 20140147700 - BENCHER; Christopher Dennis ;   et al. | 2014-05-29 |
Pattern Fortification For Hdd Bit Patterned Media Pattern Transfer App 20140131308 - GOUK; Roman ;   et al. | 2014-05-15 |
Patterning Of Magnetic Thin Film Using Energized Ions And Thermal Excitation App 20140083363 - NALAMASU; Omkaram ;   et al. | 2014-03-27 |
Methods for substrate surface planarization during magnetic patterning by plasma immersion ion implantation Grant 8,673,162 - Gouk , et al. March 18, 2 | 2014-03-18 |
Porous Amorphous Silicon-carbon Nanotube Composite Based Electrodes For Battery Applications App 20140072876 - PUSHPARAJ; Victor L. ;   et al. | 2014-03-13 |
Resist fortification for magnetic media patterning Grant 8,658,242 - Bencher , et al. February 25, 2 | 2014-02-25 |
Patterning Of Magnetic Thin Film Using Energized Ions App 20140017518 - VERHAVERBEKE; Steven ;   et al. | 2014-01-16 |
Temperature control of a substrate during a plasma ion implantation process for patterned disc media applications Grant 8,586,952 - Hilkene , et al. November 19, 2 | 2013-11-19 |
Super-hydrophobic And Oleophobic Transparent Coatings For Displays App 20130302595 - LIU; Biao ;   et al. | 2013-11-14 |
Patterning of magnetic thin film using energized ions and thermal excitation Grant 8,551,578 - Nalamasu , et al. October 8, 2 | 2013-10-08 |
Patterning of magnetic thin film using energized ions Grant 8,535,766 - Verhaverbeke , et al. September 17, 2 | 2013-09-17 |
Method of BARC removal in semiconductor device manufacturing Grant 8,530,356 - Gouk , et al. September 10, 2 | 2013-09-10 |
Porous amorphous silicon-carbon nanotube composite based electrodes for battery applications Grant 8,526,167 - Pushparaj , et al. September 3, 2 | 2013-09-03 |
Substrate Carrier Plate App 20130221595 - VERHAVERBEKE; Steven ;   et al. | 2013-08-29 |
Apparatus And Methods For Silicon Oxide Cvd Resist Planarization App 20130130405 - VERHAVERBEKE; Steven ;   et al. | 2013-05-23 |
Method And Apparatus Of Forming A Conductive Layer App 20130102110 - LESCHKIES; Kurtis ;   et al. | 2013-04-25 |
Method And Apparatus For Aligning Nanowires Deposited By An Electrospinning Process App 20130095252 - LESCHKIES; KURTIS ;   et al. | 2013-04-18 |
Method of barc removal in semiconductor device manufacturing App 20130089987 - Gouk; Roman ;   et al. | 2013-04-11 |
Stiction-free drying of high aspect ratio devices App 20130081301 - Gouk; Roman ;   et al. | 2013-04-04 |
Method for forming transparent conductive oxide Grant 8,361,835 - Komin , et al. January 29, 2 | 2013-01-29 |
Method for removing implanted photo resist from hard disk drive substrates Grant 8,354,035 - Hilkene , et al. January 15, 2 | 2013-01-15 |
Method for forming transparent conductive oxide Grant 8,318,589 - Komin , et al. November 27, 2 | 2012-11-27 |
In Situ Vapor Phase Surface Activation Of SiO2 App 20120202357 - Sato; Tatsuya E. ;   et al. | 2012-08-09 |
Resist Fortification For Magnetic Media Patterning App 20120196155 - Bencher; Christopher D. ;   et al. | 2012-08-02 |
Silver-nickel Core-sheath Nanostructures And Methods To Fabricate App 20120164470 - Leschkies; Kurtis ;   et al. | 2012-06-28 |
Photovoltaic Devices with High Work-Function TCO Buffer Layers and Methods of Manufacture App 20120055534 - Leschkies; Kurtis ;   et al. | 2012-03-08 |
Photovoltaic Devices With Textured Glass Superstrate App 20120055535 - Gouk; Roman ;   et al. | 2012-03-08 |
Thin-film Solar Fabrication Process, Deposition Method For Tco Layer, And Solar Cell Precursor Layer Stack App 20120012172 - Schmidt; Ursula Ingeborg ;   et al. | 2012-01-19 |
Enhanced Silicon-TCO Interface in Thin Film Silicon Solar Cells Using Nickel Nanowires App 20110180133 - VERHAVERBEKE; Steven ;   et al. | 2011-07-28 |
System For Batch Processing Of Magnetic Media App 20110163065 - Verhaverbeke; Steven ;   et al. | 2011-07-07 |
Methods For Substrate Surface Planarization During Magnetic Patterning By Plasma Immersion Ion Implantation App 20110143170 - Gouk; Roman ;   et al. | 2011-06-16 |
Temperature Control Of A Substrate During A Plasma Ion Implantation Process For Patterned Disc Media Applications App 20110101247 - Hilkene; Martin A. ;   et al. | 2011-05-05 |
Plasma Ion Implantation Process For Patterned Disc Media Applications App 20110104393 - Hilkene; Martin A. ;   et al. | 2011-05-05 |
Post-ion implant cleaning for silicon on insulator substrate preparation Grant 7,914,623 - Papanu , et al. March 29, 2 | 2011-03-29 |
Porous Amorphous Silicon-carbon Nanotube Composite Based Electrodes For Battery Applications App 20110051322 - Pushparaj; Victor L. ;   et al. | 2011-03-03 |
Organically Modified Etch Chemistry For Zno Tco Texturing App 20110011828 - Gouk; Roman ;   et al. | 2011-01-20 |
Method For Removing Implanted Photo Resist From Hard Disk Drive Substrates App 20110006034 - Hilkene; Martin A. ;   et al. | 2011-01-13 |
Method For Forming Transparent Conductive Oxide App 20100311204 - KOMIN; VALERY V. ;   et al. | 2010-12-09 |
Method For Forming Transparent Conductive Oxide App 20100311228 - KOMIN; VALERY V. ;   et al. | 2010-12-09 |
Method and apparatus for wafer cleaning Grant 7,836,901 - Verhaverbeke , et al. November 23, 2 | 2010-11-23 |
Method and apparatus for wafer cleaning Grant 7,819,985 - Verhaverbeke , et al. October 26, 2 | 2010-10-26 |
high power, high energy and large area energy storage devices App 20100261049 - KWAK; BYUNG-SUNG LEO ;   et al. | 2010-10-14 |
Energy Storage Device With Porous Electrode App 20100221606 - Nalamasu; Omkaram ;   et al. | 2010-09-02 |
Hdd Pattern Implant System App 20100221583 - Foad; Majeed A. ;   et al. | 2010-09-02 |
Methods for forming connective elements on integrated circuits for packaging applications Grant 7,767,586 - Verhaverbeke August 3, 2 | 2010-08-03 |
Cleaning submicron structures on a semiconductor wafer surface Grant 7,718,009 - Verhaverbeke , et al. May 18, 2 | 2010-05-18 |
Magnetic Nanowires For Tco Replacement App 20100101829 - VERHAVERBEKE; Steven ;   et al. | 2010-04-29 |
Compound Magnetic Nanowires For Tco Replacement App 20100101832 - VERHAVERBEKE; Steven ;   et al. | 2010-04-29 |
Magnetic Nanoparticles For Tco Replacement App 20100101830 - NALAMASU; OMKARAM ;   et al. | 2010-04-29 |
Patterning Of Magnetic Thin Film Using Energized Ions App 20100098873 - VERHAVERBEKE; STEVEN ;   et al. | 2010-04-22 |
Patterning Of Magnetic Thin Film Using Energized Ions And Thermal Excitation App 20100096256 - NALAMASU; OMKARAM ;   et al. | 2010-04-22 |
Semiconductor processing using energized hydrogen gas and in combination with wet cleaning Grant 7,632,756 - Verhaverbeke December 15, 2 | 2009-12-15 |
Matching circuit for megasonic transducer device Grant 7,586,235 - Gouk , et al. September 8, 2 | 2009-09-08 |
Method and apparatus for processing a wafer Grant 7,585,686 - Verhaverbeke , et al. September 8, 2 | 2009-09-08 |
Method And Apparatus For Wafer Cleaning App 20090205677 - Thakur; Randhir ;   et al. | 2009-08-20 |
Magnetic Domain Patterning Using Plasma Ion Implantation App 20090199768 - Verhaverbeke; Steven ;   et al. | 2009-08-13 |
Method Including Magnetic Domain Patterning Using Plasma Ion Implantation For Mram Fabrication App 20090201722 - Giridhar; Kamesh ;   et al. | 2009-08-13 |
Photoresist Strip With Ozonated Acetic Acid Solution App 20090117500 - Gouk; Roman ;   et al. | 2009-05-07 |
Wet Photoresist Strip For Wafer Bumping With Ozonated Acetic Anhydride App 20090111277 - VERHAVERBEKE; STEVEN | 2009-04-30 |
Methods For Forming Connective Elements On Integrated Circuits For Packaging Applications App 20090111259 - VERHAVERBEKE; STEVEN | 2009-04-30 |
Method and apparatus for cleaning semiconductor substrates Grant 7,521,374 - Verhaverbeke , et al. April 21, 2 | 2009-04-21 |
Method and apparatus for chemical mixing in a single wafer process App 20090026150 - Verhaverbeke; Steven ;   et al. | 2009-01-29 |
Method And Apparatus For Cleaning A Substrate App 20090020144 - VERHAVERBEKE; STEVEN ;   et al. | 2009-01-22 |
Cleaning method and solution for cleaning a wafer in a single wafer process Grant 7,469,883 - Verhaverbeke , et al. December 30, 2 | 2008-12-30 |
Method and apparatus for wafer cleaning App 20080314424 - Verhaverbeke; Steven ;   et al. | 2008-12-25 |
Cleaning method and solution for cleaning a wafer in a single wafer process Grant 7,456,113 - Rayandayan , et al. November 25, 2 | 2008-11-25 |
Method and apparatus for processing a wafer App 20080286697 - Verhaverbeke; Steven ;   et al. | 2008-11-20 |
Method and apparatus for wafer cleaning Grant 7,451,774 - Verhaverbeke , et al. November 18, 2 | 2008-11-18 |
Cleaning method and solution for cleaning a wafer in a single wafer process Grant 7,449,127 - Verhaverbeke , et al. November 11, 2 | 2008-11-11 |
Semiconductor processing using energized hydrogen gas and in combination with wet cleaning Grant 7,435,686 - Verhaverbeke October 14, 2 | 2008-10-14 |
Post-ion implant cleaning for silicon on insulator substrate preparation Grant 7,432,177 - Papanu , et al. October 7, 2 | 2008-10-07 |
Method And Apparatus For Single-substrate Cleaning App 20080230092 - Ko; Alexander Sou-Kang ;   et al. | 2008-09-25 |
Stripping and removal of organic-containing materials from electronic device substrate surfaces Grant 7,402,213 - Verhaverbeke July 22, 2 | 2008-07-22 |
Method and apparatus for processing a wafer App 20080138917 - VERHAVERBEKE; STEVEN ;   et al. | 2008-06-12 |
Wet chemical treatment to form a thin oxide for high k gate dielectrics App 20080087970 - Verhaverbeke; Steven | 2008-04-17 |
Wet chemical treatment to form a thin oxide for high k gate dielectrics Grant 7,358,196 - Verhaverbeke April 15, 2 | 2008-04-15 |
Method and apparatus for wafer cleaning App 20080083436 - Verhaverbeke; Steven ;   et al. | 2008-04-10 |
Method and apparatus for wafer cleaning App 20080083437 - Verhaverbeke; Steven ;   et al. | 2008-04-10 |
Method and apparatus for processing a wafer App 20080085477 - Verhaverbeke; Steven ;   et al. | 2008-04-10 |
Post-ion implant cleaning on silicon on insulator substrate preparation App 20080081485 - Papanu; James S. ;   et al. | 2008-04-03 |
Single wafer cleaning method to reduce particle defects on a wafer surface Grant 7,341,065 - Verhaverbeke , et al. March 11, 2 | 2008-03-11 |
Methods And Systems For Performing Immersion Processing During Lithography App 20080050679 - Salek; Mohsen S. ;   et al. | 2008-02-28 |
Method and apparatus for wafer cleaning App 20080047582 - Verhaverbeke; Steven ;   et al. | 2008-02-28 |
Method and apparatus for wafer cleaning Grant 7,334,588 - Verhaverbeke , et al. February 26, 2 | 2008-02-26 |
Semiconductor substrate processing apparatus App 20080045029 - Verhaverbeke; Steven ;   et al. | 2008-02-21 |
Ammonium Hydroxide Treatments For Semiconductor Substrates App 20080032906 - Verhaverbeke; Steven | 2008-02-07 |
Removal of organic-containing layers from large surface areas App 20080000497 - Verhaverbeke; Steven | 2008-01-03 |
Ammonium hydroxide treatments for semiconductor substrates Grant 7,314,854 - Verhaverbeke January 1, 2 | 2008-01-01 |
Ammonium hydroxide treatments for semiconductor substrates App 20070183956 - Verhaverbeke; Steven | 2007-08-09 |
Stripping and removal of organic-containing materials from electronic device substrate surfaces App 20070181165 - Verhaverbeke; Steven | 2007-08-09 |
Organic solvents having ozone dissolved therein for semiconductor processing utilizing sacrificial materials Grant 7,235,479 - Verhaverbeke June 26, 2 | 2007-06-26 |
Matching circuit for megasonic transducer device App 20070138908 - Gouk; Roman ;   et al. | 2007-06-21 |
Ammonium hydroxide treatments for semiconductor substrates Grant 7,232,759 - Verhaverbeke June 19, 2 | 2007-06-19 |
Stripping and cleaning of organic-containing materials from electronic device substrate surfaces App 20070095366 - Verhaverbeke; Steven | 2007-05-03 |
Method and apparatus for processing a wafer App 20070093071 - Verhaverbeke; Steven ;   et al. | 2007-04-26 |
Method and apparatus for chemical mixing in a single wafer process Grant 7,205,023 - Verhaverbeke , et al. April 17, 2 | 2007-04-17 |
Method and apparatus for rotating a semiconductor substrate Grant 7,201,808 - Chiu , et al. April 10, 2 | 2007-04-10 |
Matching circuit for megasonic transducer device Grant 7,190,103 - Gouk , et al. March 13, 2 | 2007-03-13 |
Semiconductor processing using energized hydrogen gas and in combination with wet cleaning App 20070037396 - Verhaverbeke; Steven | 2007-02-15 |
Single wafer cleaning method to reduce particle defects on a wafer surface Grant 7,163,018 - Verhaverbeke , et al. January 16, 2 | 2007-01-16 |
Method and apparatus for processing a wafer Grant 7,159,599 - Verhaverbeke , et al. January 9, 2 | 2007-01-09 |
Post-ion implant cleaning for silicon on insulator substrate preparation App 20060286783 - Papanu; James S. ;   et al. | 2006-12-21 |
Method and apparatus for wafer cleaning App 20060278253 - Verhaverbeke; Steven ;   et al. | 2006-12-14 |
Method and apparatus for wafer cleaning App 20060266387 - Verhaverbeke; Steven ;   et al. | 2006-11-30 |
Cleaning method and solution for cleaning a wafer in a single wafer process App 20060270242 - Verhaverbeke; Steven ;   et al. | 2006-11-30 |
Method and apparatus for wafer cleaning App 20060266392 - Verhaverbeke; Steven ;   et al. | 2006-11-30 |
Method and apparatus for wafer cleaning App 20060266393 - Verhaverbeke; Steven ;   et al. | 2006-11-30 |
Method and apparatus for wafer cleaning App 20060266389 - Thakur; Randhir ;   et al. | 2006-11-30 |
Method and apparatus for chemical mixing in a single wafer process App 20060264050 - Verhaverbeke; Steven ;   et al. | 2006-11-23 |
Method and apparatus for wafer cleaning App 20060260642 - Verhaverbeke; Steven ;   et al. | 2006-11-23 |
Method and apparatus for wafer cleaning App 20060260644 - Verhaverbeke; Steven ;   et al. | 2006-11-23 |
Method and apparatus for wafer cleaning App 20060260659 - Verhaverbeke; Steven ;   et al. | 2006-11-23 |
Method and apparatus for wafer cleaning App 20060260660 - Verhaverbeke; Steven ;   et al. | 2006-11-23 |
Cleaning method and solution for cleaning a wafer in a single wafer process App 20060260647 - Verhaverbeke; Steven ;   et al. | 2006-11-23 |
Single wafer cleaning method to reduce particle defects on a wafer surface App 20060261038 - Verhaverbeke; Steven ;   et al. | 2006-11-23 |
Method and apparatus for wafer cleaning App 20060260643 - Verhaverbeke; Steven ;   et al. | 2006-11-23 |
Cleaning method and solution for cleaning a wafer in a single wafer process App 20060264343 - Verhaverbeke; Steven ;   et al. | 2006-11-23 |
Method and apparatus for wafer cleaning App 20060260661 - Verhaverbeke; Steven ;   et al. | 2006-11-23 |
Method and apparatus for cleaning semiconductor substrates App 20060237043 - Verhaverbeke; Steven ;   et al. | 2006-10-26 |
Wet chemical treatment to form a thin oxide for high k gate dielectrics App 20060178015 - Verhaverbeke; Steven | 2006-08-10 |
Method and apparatus for cleaning semiconductor substrates App 20060107970 - Verhaverbeke; Steven ;   et al. | 2006-05-25 |
Rotational thermophoretic drying App 20060102198 - Verhaverbeke; Steven | 2006-05-18 |
Method and apparatus for dissolving a gas into a liquid for single wet wafer processing Grant 7,037,842 - Verhaverbeke , et al. May 2, 2 | 2006-05-02 |
Ammonium hydroxide treatments for semiconductor substrates App 20060073673 - Verhaverbeke; Steven | 2006-04-06 |
Assisted rinsing in a single wafer cleaning process Grant 7,021,319 - Verhaverbeke , et al. April 4, 2 | 2006-04-04 |
Cleaning method and solution for cleaning a wafer in a single wafer process App 20060054181 - Rayandayan; Ronald ;   et al. | 2006-03-16 |
Rotational thermophoretic drying Grant 7,011,715 - Verhaverbeke March 14, 2 | 2006-03-14 |
Cleaning submicron structures on a semiconductor wafer surface App 20060042651 - Verhaverbeke; Steven ;   et al. | 2006-03-02 |
Semiconductor processing using energized hydrogen gas and in combination with wet cleaning App 20060046482 - Verhaverbeke; Steven | 2006-03-02 |
Organic solvents having ozone dissolved therein for semiconductor processing utilizing sacrificial materials App 20060046467 - Verhaverbeke; Steven | 2006-03-02 |
Methods and apparatuses for drying wafer Grant 7,000,621 - Verhaverbeke February 21, 2 | 2006-02-21 |
Semiconductor substrate processing apparatus App 20060035475 - Verhaverbeke; Steven ;   et al. | 2006-02-16 |
Cleaning method and solution for cleaning a wafer in a single wafer process App 20050227888 - Verhaverbeke, Steven ;   et al. | 2005-10-13 |
Matching circuit for megasonic transducer device Grant 6,954,021 - Gouk , et al. October 11, 2 | 2005-10-11 |
Using supercritical fluids and/or dense fluids in semiconductor applications App 20050191861 - Verhaverbeke, Steven | 2005-09-01 |
Cleaning method and solution for cleaning a wafer in a single wafer process Grant 6,927,176 - Verhaverbeke , et al. August 9, 2 | 2005-08-09 |
Matching circuit for megasonic transducer device App 20050156485 - Gouk, Roman ;   et al. | 2005-07-21 |
Methods for drying wafer Grant 6,843,855 - Verhaverbeke January 18, 2 | 2005-01-18 |
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber Grant 6,807,972 - Chiu , et al. October 26, 2 | 2004-10-26 |
Using supercritical fluids and/or dense fluids in semiconductor applications App 20040198066 - Verhaverbeke, Steven | 2004-10-07 |
Rotational thermophoretic drying App 20040194801 - Verhaverbeke, Steven | 2004-10-07 |
Dilute sulfuric peroxide at point-of-use App 20040163681 - Verhaverbeke, Steven | 2004-08-26 |
Rate monitor for wet wafer cleaning App 20040139985 - Hegedus, Andreas G. ;   et al. | 2004-07-22 |
Single wafer cleaning method to reduce particle defects on a wafer surface App 20040127044 - Verhaverbeke, Steven ;   et al. | 2004-07-01 |
Assisted rinsing in a single wafer cleaning process App 20040103915 - Verhaverbeke, Steven ;   et al. | 2004-06-03 |
Method and apparatus for dissolving a gas into a liquid for single wet wafer processing App 20040029388 - Verhaverbeke, Steven ;   et al. | 2004-02-12 |
Method and composition for chemical polishing App 20040009740 - Verhaverbeke, Steven | 2004-01-15 |
Point-of-use mixing with H2SO4 and H2O2 on top of a horizontally spinning wafer App 20040000322 - Verhaverbeke, Steven | 2004-01-01 |
Using a time critical wafer cleaning solution by combining a chelating agent with an oxidizer at point-of-use App 20040002430 - Verhaverbeke, Steven | 2004-01-01 |
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber and positioning such a wafer in this single wafer chamber App 20030196686 - Chiu, Ho-Man Rodney ;   et al. | 2003-10-23 |
Method and apparatus for wafer cleaning App 20030192577 - Thakur, Randhir ;   et al. | 2003-10-16 |
Method and apparatus for wafer cleaning App 20030192570 - Thakur, Randhir ;   et al. | 2003-10-16 |
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber App 20030183250 - Rodney Chiu, Ho-Man ;   et al. | 2003-10-02 |
Methods and apparatuses for drying wafer App 20030172954 - Verhaverbeke, Steven | 2003-09-18 |
Method and apparatus for processing a wafer App 20030045098 - Verhaverbeke, Steven ;   et al. | 2003-03-06 |
Methods and devices utilizing the ammonium termination of silicon dioxide films Grant 6,524,940 - Verhaverbeke , et al. February 25, 2 | 2003-02-25 |
Method for reducing particle contamination during the wet processing of semiconductor substrates Grant 6,517,636 - Verhaverbeke February 11, 2 | 2003-02-11 |
Methods And Devices Utilizing The Ammonium Termination Of Silicon Dioxide Films App 20020166608 - Verhaverbeke, Steven ;   et al. | 2002-11-14 |
Rinsing solution and rinsing and drying methods for the prevention of watermark formation on a surface App 20020121286 - Verhaverbeke, Steven ;   et al. | 2002-09-05 |
Method for etching electronic components containing tantalum App 20020119245 - Verhaverbeke, Steven | 2002-08-29 |
Cleaning method and solution for cleaning a wafer in a single wafer process App 20020102852 - Verhaverbeke, Steven ;   et al. | 2002-08-01 |
Method and apparatus for chemical mixing in a single wafer process App 20020075750 - Verhaverbeke, Steven ;   et al. | 2002-06-20 |
Apparatus for providing ozonated process fluid and methods for using same App 20020066717 - Verhaverbeke, Steven ;   et al. | 2002-06-06 |
Chuck for holding wafer App 20020066475 - Verhaverbeke, Steven ;   et al. | 2002-06-06 |
Wafer spray configurations for a single wafer processing apparatus App 20020063169 - Verhaverbeke, Steven ;   et al. | 2002-05-30 |
Method and apparatus for dissolving a gas into a liquid for single wet wafer processing App 20020064961 - Verhaverbeke, Steven ;   et al. | 2002-05-30 |
Assisted rinsing in a single wafer cleaning process App 20020062840 - Verhaverbeke, Steven ;   et al. | 2002-05-30 |
Electroless metal deposition of electronic components in an enclosable vessel Grant 6,165,912 - McConnell , et al. December 26, 2 | 2000-12-26 |
Method for sulfuric acid resist stripping Grant 6,032,682 - Verhaverbeke March 7, 2 | 2000-03-07 |
Methods for treating semiconductor wafers Grant 5,972,123 - Verhaverbeke October 26, 1 | 1999-10-26 |
Method for semiconductor processing using mixtures of HF and carboxylic acid Grant 5,922,624 - Verhaverbeke , et al. July 13, 1 | 1999-07-13 |