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Fast Neutral Generation For Plasma Processing
App 20220310357 - Ventzek; Peter ; et al. | 2022-09-29 |
Quantification of processing chamber species by electron energy sweep
Grant 11,430,643 - Zhao , et al. August 30, 2 | 2022-08-30 |
Cyclic Plasma Etch Process
App 20220246438 - Han; Yun ; et al. | 2022-08-04 |
Contact Etch Stop Layer with Improved Etch Stop Capability
App 20220246747 - Han; Yun ; et al. | 2022-08-04 |
Apparatuses and methods for plasma processing
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Methods and systems for focus ring thickness determinations and feedback control
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Defect Correction on Metal Resists
App 20220181153 - Han; Yun ; et al. | 2022-06-09 |
Impedance matching apparatus and control method
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Methods for anisotropic etch of silicon-based materials with selectivity to organic materials
Grant 11,342,195 - Han , et al. May 24, 2 | 2022-05-24 |
Broadband plasma processing systems and methods
Grant 11,295,937 - Zhao , et al. April 5, 2 | 2022-04-05 |
Quantification of Processing Chamber Species by Electron Energy Sweep
App 20220102123 - Zhao; Jianping ; et al. | 2022-03-31 |
Cyclic Low Temperature Film Growth Processes
App 20220093395 - Zhao; Jianping ; et al. | 2022-03-24 |
Impedance Matching Apparatus and Control Method
App 20220076923 - Carroll; John ; et al. | 2022-03-10 |
Plasma Processing Systems and Methods for Chemical Processing a Substrate
App 20220068601 - Ventzek; Peter ; et al. | 2022-03-03 |
Gas Cluster Assisted Plasma Processing
App 20220068607 - Ventzek; Peter ; et al. | 2022-03-03 |
Ion angle detector
Grant 11,264,212 - Chen , et al. March 1, 2 | 2022-03-01 |
Pulsed Capacitively Coupled Plasma Processes
App 20220059358 - Ventzek; Peter ; et al. | 2022-02-24 |
Apparatus and process for electron beam mediated plasma etch and deposition processes
Grant 11,257,685 - Ventzek , et al. February 22, 2 | 2022-02-22 |
Mode-switching plasma systems and methods of operating thereof
Grant 11,251,021 - Ventzek , et al. February 15, 2 | 2022-02-15 |
Broadband Plasma Processing Systems and Methods
App 20220028659 - Zhao; Jianping ; et al. | 2022-01-27 |
Plasma Processing Methods Using Low Frequency Bias Pulses
App 20220028695 - Ranjan; Alok ; et al. | 2022-01-27 |
Hybrid electron beam and RF plasma system for controlled content of radicals and ions
Grant 11,205,562 - Chen , et al. December 21, 2 | 2021-12-21 |
Monolayer film mediated precision material etch
Grant 11,205,576 - Ranjan , et al. December 21, 2 | 2021-12-21 |
Radical source with contained plasma
Grant 11,201,035 - Lane , et al. December 14, 2 | 2021-12-14 |
Ruthenium hard mask process
Grant 11,183,398 - Chen , et al. November 23, 2 | 2021-11-23 |
Broadband plasma processing systems and methods
Grant 11,170,981 - Zhao , et al. November 9, 2 | 2021-11-09 |
Plasma processing methods using low frequency bias pulses
Grant 11,158,516 - Ranjan , et al. October 26, 2 | 2021-10-26 |
Plasma processing apparatuses having a dielectric injector
Grant 11,152,194 - Chen , et al. October 19, 2 | 2021-10-19 |
Method for Dry Etching Compound Materials
App 20210296132 - Ventzek; Peter ; et al. | 2021-09-23 |
Defect correction on metal resists
Grant 11,094,543 - Han , et al. August 17, 2 | 2021-08-17 |
Plasma Processing Methods Using Low Frequency Bias Pulses
App 20210249225 - Ranjan; Alok ; et al. | 2021-08-12 |
Methods for extreme ultraviolet (EUV) resist patterning development
Grant 11,079,682 - Han , et al. August 3, 2 | 2021-08-03 |
Methods of Plasma Processing Using a Pulsed Electron Beam
App 20210210355 - Ventzek; Peter ; et al. | 2021-07-08 |
Method for dry etching compound materials
Grant 11,056,347 - Ventzek , et al. July 6, 2 | 2021-07-06 |
Plasma processing apparatuses including multiple electron sources
Grant 11,043,362 - Ventzek , et al. June 22, 2 | 2021-06-22 |
Mode-Switching Plasma Systems and Methods of Operating Thereof
App 20210151296 - Ventzek; Peter ; et al. | 2021-05-20 |
Systems and methods of control for plasma processing
Grant 10,998,169 - Ventzek , et al. May 4, 2 | 2021-05-04 |
Broadband Plasma Processing Systems And Methods
App 20210082666 - Zhao; Jianping ; et al. | 2021-03-18 |
Broadband Plasma Processing Systems and Methods
App 20210082667 - Zhao; Jianping ; et al. | 2021-03-18 |
Plasma Processing Apparatuses Including Multiple Electron Sources
App 20210082668 - Ventzek; Peter ; et al. | 2021-03-18 |
Three-phase Pulsing Systems And Methods For Plasma Processing
App 20210050183 - Ventzek; Peter ; et al. | 2021-02-18 |
Mode-switching plasma systems and methods of operating thereof
Grant 10,910,196 - Ventzek , et al. February 2, 2 | 2021-02-02 |
Mode-switching Plasma Systems And Methods Of Operating Thereof
App 20210027991 - Ventzek; Peter ; et al. | 2021-01-28 |
Equipment And Methods For Plasma Processing
App 20210020405 - Ventzek; Peter ; et al. | 2021-01-21 |
Process Control Enabled Vdc Sensor For Plasma Process
App 20210013005 - Funk; Merritt ; et al. | 2021-01-14 |
Method for Dry Etching Compound Materials
App 20200381261 - Ventzek; Peter ; et al. | 2020-12-03 |
Apparatuses And Methods For Plasma Processing
App 20200365369 - Chen; Zhiying ; et al. | 2020-11-19 |
Apparatuses And Methods For Plasma Processing
App 20200365372 - Chen; Zhiying ; et al. | 2020-11-19 |
Methods And Systems For Focus Ring Thickness Determinations And Feedback Control
App 20200273678 - Funk; Merritt ; et al. | 2020-08-27 |
Tailored Electron Energy Distribution Function by New Plasma Source: Hybrid Electron Beam and RF Plasma
App 20200135431 - Chen; Zhiying ; et al. | 2020-04-30 |
Hybrid Electron Beam And Rf Plasma System For Controlled Content Of Radicals And Ions
App 20200135432 - Chen; Zhiying ; et al. | 2020-04-30 |
Apparatus And Process For Electron Beam Mediated Plasma Etch And Deposition Processes
App 20200075346 - Ventzek; Peter ; et al. | 2020-03-05 |
Method And Apparatus For Plasma Processing
App 20200075293 - Ventzek; Peter ; et al. | 2020-03-05 |
Systems And Methods Of Control For Plasma Processing
App 20200058469 - Ranjan; Alok ; et al. | 2020-02-20 |
Systems And Methods Of Control For Plasma Processing
App 20200058470 - Ventzek; Peter ; et al. | 2020-02-20 |
Ruthenium Hard Mask Process
App 20200051833 - Chen; Zhiying ; et al. | 2020-02-13 |
Radical Source With Contained Plasma
App 20190341226 - Lane; Barton ; et al. | 2019-11-07 |
Monolayer film mediated precision film deposition
Grant 10,340,137 - Ventzek , et al. | 2019-07-02 |
Solid-state Source Of Atomic Specie For Etching
App 20190035604 - Ventzek; Peter ; et al. | 2019-01-31 |
Microwave surface-wave plasma device
Grant 9,947,515 - Funk , et al. April 17, 2 | 2018-04-17 |
Monolayer Film Mediated Precision Film Deposition
App 20180025908 - Ventzek; Peter ; et al. | 2018-01-25 |
Monolayer Film Mediated Precision Material Etch
App 20180025916 - Ranjan; Alok ; et al. | 2018-01-25 |
Microwave surface-wave plasma device
Grant 9,793,095 - Funk , et al. October 17, 2 | 2017-10-17 |
Plasma processing apparatus, plasma processing method and storage medium
Grant 9,252,001 - Sawada , et al. February 2, 2 | 2016-02-02 |
Pulsed gas plasma doping method and apparatus
Grant 9,165,771 - Ventzek , et al. October 20, 2 | 2015-10-20 |
Pulsed Gas Plasma Doping Method And Apparatus
App 20140302666 - VENTZEK; Peter ; et al. | 2014-10-09 |
Microwave Surface-Wave Plasma Device
App 20140262042 - Funk; Merritt ; et al. | 2014-09-18 |
Microwave Surface-Wave Plasma Device
App 20140262041 - Funk; Merritt ; et al. | 2014-09-18 |
Plasma Processing Apparatus, Plasma Processing Method and Storage Mediuim
App 20140138356 - Sawada; Ikuo ; et al. | 2014-05-22 |
Capacitively Coupled Plasma Equipment With Uniform Plasma Density
App 20140138030 - Sawada; Ikuo ; et al. | 2014-05-22 |
Plasma processing apparatus, plasma processing method and storage medium
Grant 8,636,871 - Sawada , et al. January 28, 2 | 2014-01-28 |
Plasma Processing Method And Plasma Processing Apparatus
App 20110017706 - Takahashi; Tetsuro ; et al. | 2011-01-27 |
Plasma Processing Apparatus
App 20100307684 - Ota; Ryosaku ; et al. | 2010-12-09 |
Plasma Processing Apparatus, Plasma Processing Method And Storage Medium
App 20100006543 - Sawada; Ikuo ; et al. | 2010-01-14 |
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