Veltrop; Robert G.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Veltrop; Robert G..The latest application filed is for "critical dimension control for integrated circuits".

Company Profile

0.5.6

Veltrop; Robert G. - Eagle ID
Veltrop; Robert G. - Boise ID

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Critical dimension control for integrated circuits Grant 7,563,723 - Abatchev , et al. July 21, 2	2009-07-21
Critical dimension control for integrated circuits Grant 7,271,106 - Abatchev , et al. September 18, 2	2007-09-18
Critical dimension control for integrated circuits App 20060270230 - Abatchev; Mirzafer K. ; et al.	2006-11-30
Inductive plasma processor having coil with plural windings and method of controlling plasma density Grant 7,096,819 - Chen , et al. August 29, 2	2006-08-29
Critical dimension control for integrated circuits App 20060046483 - Abatchev; Mirzafer K. ; et al.	2006-03-02
Inductive plasma processor method App 20040045506 - Chen, Jian J. ; et al.	2004-03-11
Inductive plasma processor having coil with plural windings and method of controlling plasma density App 20020185228 - Chen, Jian J. ; et al.	2002-12-12
Inductive plasma processor including current sensor for plasma excitation coil App 20020179250 - Veltrop, Robert G. ; et al.	2002-12-05
Multiple coil antenna for inductively-coupled plasma generation systems Grant 6,463,875 - Chen , et al. October 15, 2	2002-10-15
Stacked RF excitation coil for inductive plasma processor App 20020140359 - Chen, Jian J. ; et al.	2002-10-03
Multiple coil antenna for inductively-coupled plasma generation systems Grant 6,164,241 - Chen , et al. December 26, 2	2000-12-26

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