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Patent applications and USPTO patent grants for Vellanki; Venugopal.The latest application filed is for "process window optimizer".
Patent | Date |
---|---|
Process Window Optimizer App 20220147665 - Hunsche; Stefan ;   et al. | 2022-05-12 |
Process window optimizer Grant 11,238,189 - Hunsche , et al. February 1, 2 | 2022-02-01 |
Method and system for pattern configuration Grant 11,176,307 - Vellanki , et al. November 16, 2 | 2021-11-16 |
Method For Determining Candidate Patterns From Set Of Patterns Of A Patterning Process App 20210325786 - VELLANKI; Venugopal ;   et al. | 2021-10-21 |
Process Variability Aware Adaptive Inspection And Metrology App 20210255548 - VELLANKI; Venugopal ;   et al. | 2021-08-19 |
Process variability aware adaptive inspection and metrology Grant 11,003,093 - Vellanki , et al. May 11, 2 | 2021-05-11 |
Method And System For Pattern Configuration App 20200193080 - VELLANKI; Venugopal ;   et al. | 2020-06-18 |
Process Variability Aware Adaptive Inspection And Metrology App 20200096871 - VELLANKI; Venugopal ;   et al. | 2020-03-26 |
Process variability aware adaptive inspection and metrology Grant 10,514,614 - Vellanki , et al. Dec | 2019-12-24 |
Process Window Optimizer App 20180330030 - HUNSCHE; Stefan ;   et al. | 2018-11-15 |
Process Variability Aware Adaptive Inspection And Metrology App 20180031981 - VELLANKI; Venugopal ;   et al. | 2018-02-01 |
System and method to ensure source and image stability Grant 9,459,537 - Cao , et al. October 4, 2 | 2016-10-04 |
System and Method to Ensure Source and Image Stability App 20120327383 - Cao; Yu ;   et al. | 2012-12-27 |
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