Veldman; Andrei

Patent Applications and Registrations

Patent applications and USPTO patent grants for Veldman; Andrei.The latest application filed is for "full beam metrology for x-ray scatterometry systems".

Company Profile

11.23.17

Veldman; Andrei - Sunnyvale CA
Veldman; Andrei - Santa Clara CA US
Veldman; Andrei - Issaquah WA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Full Beam Metrology For X-Ray Scatterometry Systems App 20220268714 - Gellineau; Antonio Arion ; et al.	2022-08-25
Full beam metrology for x-ray scatterometry systems Grant 11,313,816 - Gellineau , et al. April 26, 2	2022-04-26
Visualization of three-dimensional semiconductor structures Grant 11,099,137 - Rosenberg , et al. August 24, 2	2021-08-24
Optimizing computational efficiency by multiple truncation of spatial harmonics Grant 11,086,288 - Veldman August 10, 2	2021-08-10
Methods and systems for characterization of an x-ray beam with high spatial resolution Grant 11,073,487 - Bykanov , et al. July 27, 2	2021-07-27
Optical Metrology Tool Equipped With Modulated Illumination Sources App 20210223166 - Shchegrov; Andrei V. ; et al.	2021-07-22
Optical metrology tool equipped with modulated illumination sources Grant 10,969,328 - Shchegrov , et al. April 6, 2	2021-04-06
Visualization of Three-Dimensional Semiconductor Structures App 20200393386 - Rosenberg; Aaron J. ; et al.	2020-12-17
Visualization of three-dimensional semiconductor structures Grant 10,794,839 - Rosenberg , et al. October 6, 2	2020-10-06
Full Beam Metrology For X-Ray Scatterometry Systems App 20200300790 - Gellineau; Antonio Arion ; et al.	2020-09-24
Full beam metrology for X-ray scatterometry systems Grant 10,775,323 - Gellineau , et al. Sept	2020-09-15
Visualization of Three-Dimensional Semiconductor Structures App 20200271595 - Rosenberg; Aaron J. ; et al.	2020-08-27
Hybrid metrology for patterned wafer characterization Grant 10,712,145 - Chen , et al.	2020-07-14
Phase revealing optical and X-ray semiconductor metrology Grant 10,677,586 - Hench , et al.	2020-06-09
Phase Revealing Optical and X-Ray Semiconductor Metrology App 20200080836 - Hench; John ; et al.	2020-03-12
Optical Metrology Tool Equipped with Modulated Illumination Sources App 20190195782 - Shchegrov; Andrei V. ; et al.	2019-06-27
Optimizing Computational Efficiency By Multiple Truncation Of Spatial Harmonics App 20190129376 - Veldman; Andrei	2019-05-02
Optical metrology tool equipped with modulated illumination sources Grant 10,215,688 - Shchegrov , et al. Feb	2019-02-26
Optimizing computational efficiency by multiple truncation of spatial harmonics Grant 10,185,303 - Veldman Ja	2019-01-22
Methods And Systems For Characterization Of An X-Ray Beam With High Spatial Resolution App 20180328868 - Bykanov; Alexander ; et al.	2018-11-15
Hybrid Metrology For Patterned Wafer Characterization App 20180112968 - Chen; Boxue ; et al.	2018-04-26
Full Beam Metrology For X-Ray Scatterometry Systems App 20180106735 - Gellineau; Antonio Arion ; et al.	2018-04-19
Methods and apparatus for measuring semiconductor device overlay using X-ray metrology Grant 9,885,962 - Veldman , et al. February 6, 2	2018-02-06
Optical Metrology Tool Equipped with Modulated Illumination Sources App 20170016815 - Shchegrov; Andrei V. ; et al.	2017-01-19
Computation efficiency by iterative spatial harmonics order truncation Grant 9,523,800 - Veldman , et al. December 20, 2	2016-12-20
Optimizing Computational Efficiency By Multiple Truncation Of Spatial Harmonics App 20160246285 - Veldman; Andrei	2016-08-25
Optical metrology tool equipped with modulated illumination sources Grant 9,400,246 - Shchegrov , et al. July 26, 2	2016-07-26
Metrology system optimization for parameter tracking Grant 9,255,877 - Veldman , et al. February 9, 2	2016-02-09
Methods And Apparatus For Measuring Semiconductor Device Overlay Using X-ray Metrology App 20150117610 - Veldman; Andrei ; et al.	2015-04-30
Metrology System Optimization For Parameter Tracking App 20140347666 - Veldman; Andrei ; et al.	2014-11-27
Measuring critical dimensions of a semiconductor structure Grant 8,798,966 - Hench , et al. August 5, 2	2014-08-05
Model-based metrology using tesselation-based discretization Grant 8,760,649 - Veldman , et al. June 24, 2	2014-06-24
Optical Metrology Tool Equipped with Modulated Illumination Sources App 20130169966 - Shchegrov; Andrei V. ; et al.	2013-07-04
Computation Efficiency By Iterative Spatial Harmonics Order Truncation App 20110288822 - Veldman; Andrei ; et al.	2011-11-24
Method for optimizing the configuration of a scatterometry measurement system Grant 7,826,072 - Wack , et al. November 2, 2	2010-11-02
Model-based measurement of semiconductor device features with feed forward use of data for dimensionality reduction Grant 7,716,003 - Wack , et al. May 11, 2	2010-05-11
Time-domain computation of scattering spectra for use in spectroscopic metrology Grant 7,480,047 - Ratner , et al. January 20, 2	2009-01-20

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