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Patent applications and USPTO patent grants for VAULT CREATION CO., LTD..The latest application filed is for "dry etching device and method for controlling same".
Patent | Date |
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Dry etching apparatus Grant 11,348,802 - Choi , et al. May 31, 2 | 2022-05-31 |
Dry etching device and method for controlling same Grant 11,348,810 - Choi , et al. May 31, 2 | 2022-05-31 |
Control method of dry etching apparatus Grant 10,636,674 - Choi , et al. | 2020-04-28 |
Dry Etching Device And Method For Controlling Same App 20190318942 - CHOI; Sang Jun ;   et al. | 2019-10-17 |
Dry Etching Apparatus App 20190122893 - CHOI; Sang Jun ;   et al. | 2019-04-25 |
Control Method Of Dry Etching Apparatus App 20190103286 - CHOI; Sang Jun ;   et al. | 2019-04-04 |
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