Vatus; Jean R.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Vatus; Jean R..The latest application filed is for "silicon wafers by epitaxial deposition".
- Vatus; Jean R. - San Jose CA
| Patent | Date |
|---|---|
| Silicon wafers by epitaxial deposition Grant 11,041,253 - Sivaramakrishnan , et al. June 22, 2 | 2021-06-22 |
| Silicon Wafers By Epitaxial Deposition App 20190003076 - Sivaramakrishnan; Visweswaren ; et al. | 2019-01-03 |
| Silicon wafers by epitaxial deposition Grant 9,982,363 - Sivaramakrishnan , et al. May 29, 2 | 2018-05-29 |
| Silicon Wafers By Epitaxial Deposition App 20160222544 - Sivaramakrishnan; Visweswaren ; et al. | 2016-08-04 |
| Silicon wafers by epitaxial deposition Grant 9,255,346 - Sivaramakrishnan , et al. February 9, 2 | 2016-02-09 |
| Methods for depositing layers having reduced interfacial contamination Grant 9,058,988 - Vatus , et al. June 16, 2 | 2015-06-16 |
| Method and apparatus to enhance process gas temperature in a CVD reactor Grant 8,512,472 - Vatus , et al. August 20, 2 | 2013-08-20 |
| System And Method For Pedestal Adjustment App 20130152859 - Collins; Richard O. ; et al. | 2013-06-20 |
| Non-contact substrate support position sensing system and corresponding adjustments Grant 8,441,640 - Patalay , et al. May 14, 2 | 2013-05-14 |
| System and method for pedestal adjustment Grant 8,398,777 - Collins , et al. March 19, 2 | 2013-03-19 |
| Silicon Wafers By Epitaxial Deposition App 20130032084 - Sivaramakrishnan; Visweswaren ; et al. | 2013-02-07 |
| Apparatus for improved azimuthal thermal uniformity of a substrate Grant 7,964,038 - Patalay , et al. June 21, 2 | 2011-06-21 |
| Methods For Depositing Layers Having Reduced Interfacial Contamination App 20100255661 - VATUS; JEAN R. ; et al. | 2010-10-07 |
| Method And Apparatus To Enhance Process Gas Temperature In A Cvd Reactor App 20100120259 - VATUS; JEAN R. ; et al. | 2010-05-13 |
| Methods And Apparatus For Improved Azimuthal Thermal Uniformity Of A Substrate App 20100086784 - PATALAY; KAILASH KIRAN ; et al. | 2010-04-08 |
| Pre-cleaning of substrates in epitaxy chambers Grant 7,651,948 - Kim , et al. January 26, 2 | 2010-01-26 |
| System And Method For Pedestal Adjustment App 20090272719 - Collins; Richard O. ; et al. | 2009-11-05 |
| Non-contact Substrate Support Position Sensing System And Corresponding Adjustments App 20090276097 - Patalay; Kailash Kiran ; et al. | 2009-11-05 |
| Pre-cleaning of substrates in epitaxy chambers App 20080245767 - Kim; Yihwan ; et al. | 2008-10-09 |
| Method of calibrating and using a semiconductor processing system Grant 6,876,442 - Vatus , et al. April 5, 2 | 2005-04-05 |
| Apparatuses and methods for forming a substantially facet-free epitaxial film App 20040175893 - Vatus, Jean R. ; et al. | 2004-09-09 |
| Method of calibrating and using a semiconductor processing system App 20030151733 - Vatus, Jean R. ; et al. | 2003-08-14 |
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