Vaschenko; Georgiy O.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Vaschenko; Georgiy O..The latest application filed is for "supply system for an extreme ultraviolet light source".

Company Profile

5.23.19

Vaschenko; Georgiy O. - San Diego CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Supply system for an extreme ultraviolet light source Grant 10,904,994 - Winkels , et al. January 26, 2	2021-01-26
System method and apparatus for high pressure liquid jet cleaning of sintered filters Grant 10,632,505 - Ridinger , et al.	2020-04-28
Supply System For An Extreme Ultraviolet Light Source App 20200128657 - Winkels; Koen Gerhardus ; et al.	2020-04-23
Supply system for an extreme ultraviolet light source Grant 10,499,485 - Winkels , et al. De	2019-12-03
Droplet generator for lithographic apparatus, EUV source and lithographic apparatus Grant 10,481,498 - Dijksman , et al. Nov	2019-11-19
Droplet Generator For Lithographic Apparatus, Euv Source And Lithographic Apparatus App 20180364580 - Dijksman; Johan Frederik ; et al.	2018-12-20
Supply System For An Extreme Ultraviolet Light Source App 20180368242 - Winkels; Koen Gerhardus ; et al.	2018-12-20
System Method and Apparatus for High Pressure Liquid Jet Cleaning of Sintered Filters App 20170291196 - Ridinger; Armin Bernhard ; et al.	2017-10-12
Target material supply apparatus for an extreme ultraviolet light source Grant 9,632,418 - De Dea , et al. April 25, 2	2017-04-25
Target Material Supply Apparatus For An Extreme Ultraviolet Light Source App 20160274466 - De Dea; Silvia ; et al.	2016-09-22
Target material supply apparatus for an extreme ultraviolet light source Grant 9,392,678 - De Dea , et al. July 12, 2	2016-07-12
Filter for material supply apparatus of an extreme ultraviolet light source Grant 9,029,813 - Fomenkov , et al. May 12, 2	2015-05-12
Laser produced plasma EUV light source Grant 8,969,839 - Vaschenko March 3, 2	2015-03-03
Systems and methods for protecting an EUV light source chamber from high pressure source material leaks Grant 8,969,838 - Vaschenko , et al. March 3, 2	2015-03-03
Droplet generator with actuator induced nozzle cleaning Grant 8,969,840 - Rajyaguru , et al. March 3, 2	2015-03-03
Droplet Generator With Actuator Induced Nozzle Cleaning App 20140346373 - Rajyaguru; Chirag ; et al.	2014-11-27
Laser Produced Plasma Euv Light Source App 20140264093 - Vaschenko; Georgiy O.	2014-09-18
Droplet generator with actuator induced nozzle cleaning Grant 8,829,477 - Rajyaguru , et al. September 9, 2	2014-09-09
Laser produced plasma EUV light source Grant 8,748,854 - Vaschenko June 10, 2	2014-06-10
Target Material Supply Apparatus For An Extreme Ultraviolet Light Source App 20140102875 - De Dea; Silvia ; et al.	2014-04-17
Laser Produced Plasma Euv Light Source App 20140042343 - Vaschenko; Georgiy O.	2014-02-13
Droplet Generator With Actuator Induced Nozzle Cleaning App 20130234051 - Rajyaguru; Chirag ; et al.	2013-09-12
Laser produced plasma EUV light source Grant 8,530,871 - Vaschenko September 10, 2	2013-09-10
Droplet generator with actuator induced nozzle cleaning Grant 8,513,629 - Rajyaguru , et al. August 20, 2	2013-08-20
Laser produced plasma EUV light source having a droplet stream produced using a modulated disturbance wave Grant 8,319,201 - Vaschenko November 27, 2	2012-11-27
Filter for Material Supply Apparatus App 20120292527 - Fomenkov; Igor V. ; et al.	2012-11-22
Droplet Generator With Actuator Induced Nozzle Cleaning App 20120286176 - Rajyaguru; Chirag ; et al.	2012-11-15
Laser Produced Plasma Euv Light Source App 20120228526 - Vaschenko; Georgiy O.	2012-09-13
Laser produced plasma EUV light source Grant 8,158,960 - Vaschenko , et al. April 17, 2	2012-04-17
System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamber Grant 8,138,487 - Vaschenko , et al. March 20, 2	2012-03-20
Systems and methods for target material delivery in a laser produced plasma EUV light source Grant 7,872,245 - Vaschenko , et al. January 18, 2	2011-01-18
Laser Produced Plasma EUV Light Source App 20100294953 - Vaschenko; Georgiy O. ; et al.	2010-11-25
Systems and methods for protecting an EUV light source chamber from high pressure source material leaks App 20100258747 - Vaschenko; Georgiy O. ; et al.	2010-10-14
System, Method And Apparatus For Droplet Catcher For Prevention Of Backsplash In A Euv Generation Chamber App 20100258748 - Vaschenko; Georgiy O. ; et al.	2010-10-14
Systems and methods for target material delivery in a laser produced plasma EUV light source App 20090230326 - Vaschenko; Georgiy O. ; et al.	2009-09-17

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