Patent | Date |
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Method for detecting defects in a material and a system for accomplishing the same Grant 6,870,950 - Houge , et al. March 22, 2 | 2005-03-22 |
Apparatus and method for producing a <111> orientation aluminum film for an integrated circuit device App 20040229477 - Daniel, Timothy J. ;   et al. | 2004-11-18 |
Calibration standard for high resolution electron microscopy Grant 6,750,447 - Houge , et al. June 15, 2 | 2004-06-15 |
Semiconductor manufacturing using modular substrates Grant 6,713,409 - Antonell , et al. March 30, 2 | 2004-03-30 |
Abnormal photoresist line/space profile detection through signal processing of metrology waveform Grant 6,708,574 - Houge , et al. March 23, 2 | 2004-03-23 |
Method and apparatus for minimizing semiconductor wafer contamination Grant 6,695,572 - Antonell , et al. February 24, 2 | 2004-02-24 |
Calibration standard for high resolution electron microscopy App 20030193022 - Houge, Erik Cho ;   et al. | 2003-10-16 |
Mass spectrometer particle counter Grant 6,633,032 - Houge , et al. October 14, 2 | 2003-10-14 |
Method of focused ion beam pattern transfer using a smart dynamic template Grant 6,627,885 - McIntosh , et al. September 30, 2 | 2003-09-30 |
X-ray system Grant 6,606,371 - Antonell , et al. August 12, 2 | 2003-08-12 |
Calibration method for quantitative elemental analysis Grant 6,603,119 - Giannuzzi , et al. August 5, 2 | 2003-08-05 |
Semiconductor manufacturing using modular substrates App 20030107117 - Antonell, Michael ;   et al. | 2003-06-12 |
Monitoring system for determining progress in a fabrication activity Grant 6,569,690 - Houge , et al. May 27, 2 | 2003-05-27 |
Method and apparatus for minimizing semiconductor wafer contamination App 20030063967 - Antonell, Michael ;   et al. | 2003-04-03 |
Calibration method for quantitative elemental analysis Grant 6,519,543 - Giannuzzi , et al. February 11, 2 | 2003-02-11 |
Method for detecting defects in a material and a system for accomplishing the same App 20020131631 - Houge, Erik C. ;   et al. | 2002-09-19 |
Method of determining a crystallographic quality of a material located on a substrate App 20020128789 - Houge, Erik C. ;   et al. | 2002-09-12 |
Mass spectrometer particle counter App 20020063201 - Houge, Erik Cho ;   et al. | 2002-05-30 |
Scanning electron microscope/energy dispersive spectroscopy sample preparation method and sample produced thereby Grant 6,362,475 - Bindell , et al. March 26, 2 | 2002-03-26 |
X-ray system App 20010043667 - Antonell, Michael ;   et al. | 2001-11-22 |