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Patent applications and USPTO patent grants for VARIAN SEMICONDUCTOR EQUIPMENT ASSO.The latest application filed is for "techniques for patterning resist".
Patent | Date |
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Techniques For Patterning Resist App 20140120478 - Kpissay; Armah M. | 2014-05-01 |
Techniques For Manufacturing Devices App 20140120647 - Bateman; Nicholas P.T. ;   et al. | 2014-05-01 |
Method And Apparatus For Thermal Control Of Ion Sources And Sputtering Targets App 20140099782 - Bassom; Neil J. | 2014-04-10 |
Plasma Uniformity Control Using Biased Array App 20130052811 - KOO; Bon-Woong | 2013-02-28 |
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