Patent | Date |
---|
Coating compositions suitable for use with an overcoated photoresist Grant 9,726,977 - Cameron , et al. August 8, 2 | 2017-08-08 |
Exposure photolithography methods Grant 9,235,119 - Chen , et al. January 12, 2 | 2016-01-12 |
Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Grant 8,906,591 - Liu , et al. December 9, 2 | 2014-12-09 |
Exposure Photolithography Methods App 20140349237 - Chen; Kuang-Jung ;   et al. | 2014-11-27 |
Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Grant 8,883,395 - Liu , et al. November 11, 2 | 2014-11-11 |
Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Grant 8,871,429 - Liu , et al. October 28, 2 | 2014-10-28 |
Photoresist compositions Grant 8,846,296 - Chen , et al. September 30, 2 | 2014-09-30 |
Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Grant 8,741,545 - Liu , et al. June 3, 2 | 2014-06-03 |
Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Grant 8,709,700 - Liu , et al. April 29, 2 | 2014-04-29 |
Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Grant 8,663,901 - Liu , et al. March 4, 2 | 2014-03-04 |
Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Grant 8,658,345 - Liu , et al. February 25, 2 | 2014-02-25 |
Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Grant 8,628,909 - Liu , et al. January 14, 2 | 2014-01-14 |
Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Grant 8,628,910 - Liu , et al. January 14, 2 | 2014-01-14 |
Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Grant 8,623,584 - Liu , et al. January 7, 2 | 2014-01-07 |
Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Grant 8,617,791 - Liu , et al. December 31, 2 | 2013-12-31 |
Near-infrared absorbing film compositions Grant 8,586,283 - Glodde , et al. November 19, 2 | 2013-11-19 |
Multiple exposure photolithography methods Grant 8,568,960 - Chen , et al. October 29, 2 | 2013-10-29 |
Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Grant 8,518,630 - Liu , et al. August 27, 2 | 2013-08-27 |
Fluorine-free Fused Ring Heteroaromatic Photoacid Generators And Resist Compositions Containing The Same App 20130017490 - Liu; Sen ;   et al. | 2013-01-17 |
Fluorine-free Fused Ring Heteroaromatic Photoacid Generators And Resist Compositions Containing The Same App 20130017489 - Liu; Sen ;   et al. | 2013-01-17 |
Fluorine-free Fused Ring Heteroaromatic Photoacid Generators And Resist Compositions Containing The Same App 20130017491 - Liu; Sen ;   et al. | 2013-01-17 |
Fluorine-free Fused Ring Heteroaromatic Photoacid Generators And Resist Compositions Containing The Same App 20130011789 - Liu; Sen ;   et al. | 2013-01-10 |
Fluorine-free Fused Ring Heteroaromatic Photoacid Generators And Resist Compositions Containing The Same App 20130011795 - Liu; Sen ;   et al. | 2013-01-10 |
Fluorine-free Fused Ring Heteroaromatic Photoacid Generators And Resist Compositions Containing The Same App 20130011787 - Liu; Sen ;   et al. | 2013-01-10 |
Fluorine-free Fused Ring Heteroaromatic Photoacid Generators And Resist Compositions Containing The Same App 20130011792 - Liu; Sen ;   et al. | 2013-01-10 |
Fluorine-free Fused Ring Heteroaromatic Photoacid Generators And Resist Compositions Containing The Same App 20130011786 - Liu; Sen ;   et al. | 2013-01-10 |
Fluorine-free Fused Ring Heteroaromatic Photoacid Generators And Resist Compositions Containing The Same App 20130011790 - Liu; Sen ;   et al. | 2013-01-10 |
Fluorine-free Fused Ring Heteroaromatic Photoacid Generators And Resist Compositions Containing The Same App 20130011794 - Liu; Sen ;   et al. | 2013-01-10 |
Fluorine-free Fused Ring Heteroaromatic Photoacid Generators And Resist Compositions Containing The Same App 20130011793 - Liu; Sen ;   et al. | 2013-01-10 |
Fluorine-free Fused Ring Heteroaromatic Photoacid Generators And Resist Compositions Containing The Same App 20130011788 - Liu; Sen ;   et al. | 2013-01-10 |
Near-Infrared Absorbing Film Compositions App 20130001484 - Glodde; Martin ;   et al. | 2013-01-03 |
Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same Grant 8,343,706 - Liu , et al. January 1, 2 | 2013-01-01 |
Top antireflective coating composition containing hydrophobic and acidic groups Grant 8,304,178 - Khojasteh , et al. November 6, 2 | 2012-11-06 |
Near-infrared absorbing film compositions Grant 8,293,451 - Glodde , et al. October 23, 2 | 2012-10-23 |
Photoresist Compositions App 20120214099 - Chen; Kuang-Jung ;   et al. | 2012-08-23 |
Multiple exposure photolithography methods and photoresist compositions Grant 8,236,476 - Chen , et al. August 7, 2 | 2012-08-07 |
Multiple Exposure Photolithography Methods App 20120178027 - Chen; Kuang-Jung ;   et al. | 2012-07-12 |
Wet developable bottom antireflective coating composition and method for use thereof Grant 8,202,678 - Chen , et al. June 19, 2 | 2012-06-19 |
Photoresists and methods for optical proximity correction Grant 8,053,172 - Halle , et al. November 8, 2 | 2011-11-08 |
Fluorine-free heteroaromatic photoacid generators and photoresist compositions containing the same Grant 8,034,533 - Liu , et al. October 11, 2 | 2011-10-11 |
Fused aromatic structures and methods for photolithographic applications Grant 8,029,975 - Bucchignano , et al. October 4, 2 | 2011-10-04 |
Photoresist compositions and methods related to near field masks Grant 8,021,828 - Huang , et al. September 20, 2 | 2011-09-20 |
Ultra low post exposure bake photoresist materials Grant 8,017,303 - Goldfarb , et al. September 13, 2 | 2011-09-13 |
Fluorine-free Fused Ring Heteroaromatic Photoacid Generators And Resist Compositions Containing The Same App 20110183259 - Liu; Sen ;   et al. | 2011-07-28 |
Near-Infrared Absorbing Film Compositions App 20110042653 - Glodde; Martin ;   et al. | 2011-02-24 |
Coating compositions suitable for use with an overcoated photoresist App 20100297557 - Cameron; James F. ;   et al. | 2010-11-25 |
Photoresist compositions and method for multiple exposures with multiple layer resist systems Grant 7,838,198 - Chen , et al. November 23, 2 | 2010-11-23 |
Photoresist compositions and method for multiple exposures with multiple layer resist systems Grant 7,838,200 - Chen , et al. November 23, 2 | 2010-11-23 |
Underlayer compositions containing heterocyclic aromatic structures Grant 7,816,068 - Huang , et al. October 19, 2 | 2010-10-19 |
Underlayer compositions containing heterocyclic aromatic structures Grant 7,807,332 - Huang , et al. October 5, 2 | 2010-10-05 |
Photoresist Compositions And Process For Multiple Exposures With Multiple Layer Photoresist Systems App 20100248147 - Chen; Kuang-Jung ;   et al. | 2010-09-30 |
Photoresist compositions and process for multiple exposures with multiple layer photoresist systems Grant 7,803,521 - Chen , et al. September 28, 2 | 2010-09-28 |
Ultra Low Post Exposure Bake Photoresist Materials App 20100216071 - Goldfarb; Dario Leonardo ;   et al. | 2010-08-26 |
Fluorinated half ester of maleic anhydride polymers for dry 193 nm top antireflective coating application Grant 7,754,820 - Huang , et al. July 13, 2 | 2010-07-13 |
Top Antireflective Coating Composition Containing Hydrophobic And Acidic Groups App 20100047712 - Khojasteh; Mahmoud ;   et al. | 2010-02-25 |
Wet Developable Bottom Antireflective Coating Composition And Method For Use Thereof App 20090291392 - Chen; Kuang-Jung J. ;   et al. | 2009-11-26 |
Fused Aromatic Structures And Methods For Photolithographic Applications App 20090286180 - Bucchignano; James J. ;   et al. | 2009-11-19 |
Top antireflective coating composition containing hydrophobic and acidic groups Grant 7,608,390 - Khojasteh , et al. October 27, 2 | 2009-10-27 |
Photoresists And Methods For Optical Proximity Correction App 20090214981 - Halle; Scott David ;   et al. | 2009-08-27 |
Photoresist Compositions And Methods Related To Near Field Masks App 20090214959 - Huang; Wu-Song ;   et al. | 2009-08-27 |
Fused aromatic structures and methods for photolithographic applications Grant 7,566,527 - Bucchignano , et al. July 28, 2 | 2009-07-28 |
Wet developable bottom antireflective coating composition and method for use thereof Grant 7,563,563 - Chen , et al. July 21, 2 | 2009-07-21 |
Aromatic Fluorine-free Photoacid Generators And Photoresist Compositions Containing The Same App 20090181319 - Li; Wenjie ;   et al. | 2009-07-16 |
Fluorine-free Heteroaromatic Photoacid Generators And Photoresist Compositions Containing The Same App 20090181320 - Liu; Sen ;   et al. | 2009-07-16 |
Multiple Exposure Photolithography Methods And Photoresist Compostions App 20090176174 - Chen; Kuang-Jung ;   et al. | 2009-07-09 |
Photoresist Compositions And Method For Multiple Exposures With Multiple Layer Resist Systems App 20090155718 - Chen; Kuang-Jung ;   et al. | 2009-06-18 |
Top antireflective coating composition with low refractive index at 193nm radiation wavelength Grant 7,544,750 - Huang , et al. June 9, 2 | 2009-06-09 |
Photoresist Compositions And Process For Multiple Exposures With Multiple Layer Photoresist Systems App 20090130590 - Chen; Kuang-Jung ;   et al. | 2009-05-21 |
Fused Aromatic Structures And Methods For Photolithographic Applications App 20090004596 - Bucchignano; James J. ;   et al. | 2009-01-01 |
Fluorinated Half Ester Of Maleic Anhydride Polymers For Dry 193 Nm Top Antireflective Coating Application App 20080286686 - Huang; Wu-Song S. ;   et al. | 2008-11-20 |
Fluorinated half ester of maleic anhydride polymers for dry 193 nm top antireflective coating application Grant 7,435,537 - Huang , et al. October 14, 2 | 2008-10-14 |
Underlayer Compositions Containing Heterocyclic Aromatic Structures App 20080213697 - Huang; Wu-Song S. ;   et al. | 2008-09-04 |
Underlayer compositions containing heterocyclic aromatic structures Grant 7,375,172 - Huang , et al. May 20, 2 | 2008-05-20 |
Underlayer Compositions Containing Heterocyclic Aromatic Structures App 20080044776 - Huang; Wu-Song S. ;   et al. | 2008-02-21 |
Top Antireflective Coating Composition Containing Hydrophobic And Acidic Groups App 20080032228 - Khojasteh; Mahmoud ;   et al. | 2008-02-07 |
Fluorinated Half Ester Of Maleic Anhydride Polymers For Dry 193 Nm Top Antireflective Coating Application App 20080026315 - Huang; Wu-Song S. ;   et al. | 2008-01-31 |
Wet developable bottom antireflective coating composition and method for use thereof App 20070243484 - Chen; Kuang-Jung J. ;   et al. | 2007-10-18 |
Bottom antireflective coating composition and method for use thereof App 20070231736 - Chen; Kuang-Jung J. ;   et al. | 2007-10-04 |
Negative photoresist composition including non-crosslinking chemistry Grant 7,235,342 - Li , et al. June 26, 2 | 2007-06-26 |
Top antireflective coating composition with low refractive index at 193nm radiation wavelength App 20070087285 - Huang; Wu-Song S. ;   et al. | 2007-04-19 |
Underlayer compositons containing heterocyclic aromatic structures App 20070009830 - Huang; Wu-Song S. ;   et al. | 2007-01-11 |
Negative photoresist and method of using thereof Grant 7,081,326 - Li , et al. July 25, 2 | 2006-07-25 |
Negative photoresist and method of using thereof Grant 7,011,923 - Li , et al. March 14, 2 | 2006-03-14 |
Negative photoresist composition involving non-crosslinking chemistry Grant 6,991,890 - Li , et al. January 31, 2 | 2006-01-31 |
Negative photoresist and method of using thereof App 20050227167 - Li, Wenjie ;   et al. | 2005-10-13 |
Negative photoresist and method of using thereof App 20050202339 - Li, Wenjie ;   et al. | 2005-09-15 |
Negative photoresist composition involving non-crosslinking chemistry App 20050175928 - Li, Wenjie ;   et al. | 2005-08-11 |
Negative photoresist composition including non-crosslinking chemistry App 20050164507 - Li, Wenjie ;   et al. | 2005-07-28 |
Positive photoresists containing crosslinked polymers App 20020012869 - Adams, Timothy G. ;   et al. | 2002-01-31 |
Tricyanovinyl substitution process for NLO polymers Grant 5,395,556 - Drost , et al. March 7, 1 | 1995-03-07 |