Vanhaelemeersch; Serge

Patent Applications and Registrations

Patent applications and USPTO patent grants for Vanhaelemeersch; Serge.The latest application filed is for "protective treatment for porous materials".

Company Profile

0.18.21

Vanhaelemeersch; Serge - Leuven BE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Protective treatment for porous materials Grant 8,540,890 - Baklanov , et al. September 24, 2	2013-09-24
Protective Treatment For Porous Materials App 20130119014 - Baklanov; Mikhail ; et al.	2013-05-16
High aspect ratio via etch Grant 7,807,583 - Van Aelst , et al. October 5, 2	2010-10-05
Dual damascene patterning method Grant 7,611,986 - Olmen , et al. November 3, 2	2009-11-03
Method for chip singulation Grant 7,566,634 - Beyne , et al. July 28, 2	2009-07-28
Method of producing microcystalline silicon germanium suitable for micromachining Grant 7,557,027 - Witvrouw , et al. July 7, 2	2009-07-07
Formation of deep via airgaps for three dimensional wafer to wafer interconnect Grant 7,338,896 - Vanhaelemeersch , et al. March 4, 2	2008-03-04
High Aspect Ratio Via Etch App 20080050919 - Van Aelst; Joke ; et al.	2008-02-28
Dual damascene patterning method App 20060264033 - Olmen; Jan Van ; et al.	2006-11-23
Formation of deep via airgaps for three dimensional wafer to wafer interconnect App 20060223301 - Vanhaelemeersch; Serge ; et al.	2006-10-05
Method of producing microcrystalline silicon germanium suitable for micromachining App 20060166467 - Witvrouw; Ann ; et al.	2006-07-27
Fluorinated hard mask for micropatterning of polymers Grant 7,042,091 - Baklanov , et al. May 9, 2	2006-05-09
Method for chip singulation App 20060068567 - Beyne; Eric ; et al.	2006-03-30
Anisotropic etching of organic-containing insulating layers Grant 6,900,140 - Vanhaelemeersch , et al. May 31, 2	2005-05-31
Method for removal of SiC App 20050099078 - Vanhaelemeersch, Serge ; et al.	2005-05-12
Method of fabricating a semiconductor device App 20050056941 - Vanhaelemeersch, Serge ; et al.	2005-03-17
Method of fabricating a semiconductor device App 20050048782 - Vanhaelemeersch, Serge ; et al.	2005-03-03
Anisotropic etching of organic-containing insulating layers Grant 6,844,267 - Vanhaelemeersch , et al. January 18, 2	2005-01-18
Anisotropic etching of organic-containing insulating layers Grant 6,844,266 - Maex , et al. January 18, 2	2005-01-18
Method of fabricating a semiconductor device Grant 6,821,884 - Vanhaelemeersch , et al. November 23, 2	2004-11-23
Integrated circuit having SiC layer Grant 6,806,501 - Vanhaelemeersch , et al. October 19, 2	2004-10-19
Anisotropic etching of organic-containing insulating layers App 20040175945 - Vanhaelemeersch, Serge ; et al.	2004-09-09
Surface preparation using plasma for ALD Films App 20040071878 - Schuhmacher, Jorg ; et al.	2004-04-15
Metallization structure on a fluorine-containing dielectric and a method for fabrication thereof Grant 6,635,964 - Maex , et al. October 21, 2	2003-10-21
Method to produce a porous oxygen-silicon layer App 20030181066 - Baklanov, Mikhail ; et al.	2003-09-25
Anisotropic etching of organic-containing insulating layers App 20030162407 - Maex, Karen ; et al.	2003-08-28
MIS transistors with a metal gate and high-k dielectric and method of forming Grant 6,607,950 - Henson , et al. August 19, 2	2003-08-19
Integrated circuit having SiC layer App 20030143816 - Vanhaelemeersch, Serge ; et al.	2003-07-31
Method for removal of sic Grant 6,599,814 - Vanhaelemeersch , et al. July 29, 2	2003-07-29
Method to produce a porous oxygen-silicon layer Grant 6,593,251 - Baklanov , et al. July 15, 2	2003-07-15
Method of fabricating a semiconductor device App 20020173142 - Vanhaelemeersch, Serge ; et al.	2002-11-21
Anisotropic etching of organic-containing insulating layers App 20020076935 - Maex, Karen ; et al.	2002-06-20
Metallization structure on a fluorine-containing dielectric and a method for fabrication thereof App 20020066957 - Maex, Karen ; et al.	2002-06-06
Method for stripping ion implanted photoresist layer Grant 6,352,936 - Jehoul , et al. March 5, 2	2002-03-05
Method to produce a porous oxygen-silicon layer App 20020022378 - Baklanov, Mikhail ; et al.	2002-02-21
Method for forming MIS transistors with a metal gate and high-k dielectric using a replacement gate process and devices obtained thereof App 20010049183 - Henson, Kirklen ; et al.	2001-12-06
Fluorinated hard mask for micropattering of polymers App 20010026956 - Baklanov, Mikhail Rodionovich ; et al.	2001-10-04
Method For Forming A Fet App 20010012668 - BADENES, GONCAL ; et al.	2001-08-09
Fluorinated hard mask for micropatterning of polymers Grant 6,245,489 - Baklanov , et al. June 12, 2	2001-06-12

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