Vanderberg; Bo H.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Vanderberg; Bo H..The latest application filed is for "systems and methods for beam angle adjustment in ion implanters with beam decelaration".

Company Profile

0.38.35

Vanderberg; Bo H. - Gloucester MA
Vanderberg; Bo H - Gloucester MA
Vanderberg; Bo H. - Boston MA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Beam profiling speed enhancement for scanned beam implanters Grant 10,483,086 - Ray , et al. Nov	2019-11-19
Ion implantation system having beam angle control in drift and deceleration modes Grant 10,037,877 - Vanderberg , et al. July 31, 2	2018-07-31
System and method to improve productivity of hybrid scan ion beam implanters Grant 9,711,329 - Vanderberg , et al. July 18, 2	2017-07-18
Combined electrostatic lens system for ion implantation Grant 9,679,739 - Eisner , et al. June 13, 2	2017-06-13
Hybrid scanning for ion implantation Grant 9,443,698 - Vanderberg September 13, 2	2016-09-13
Systems And Methods For Beam Angle Adjustment In Ion Implanters With Beam Decelaration App 20160189917 - Vanderberg; Bo H. ; et al.	2016-06-30
System And Method To Improve Productivity Of Hybrid Scan Ion Beam Implanters App 20160189928 - Vanderberg; Bo H. ; et al.	2016-06-30
Combined Electrostatic Lens System for Ion Implantation App 20160189912 - Eisner; Edward C. ; et al.	2016-06-30
Beam Profiling Speed Enhancement for Scanned Beam Implanters App 20160189926 - Ray; Andy M. ; et al.	2016-06-30
Beam line design to reduce energy contamination Grant 8,963,107 - Eisner , et al. February 24, 2	2015-02-24
System and method for ion implantation with improved productivity and uniformity Grant 8,637,838 - Eisner , et al. January 28, 2	2014-01-28
System and method for ion implantation with improved productivity and uniformity Grant 8,502,173 - Vanderberg , et al. August 6, 2	2013-08-06
Beam Line Design To Reduce Energy Contamination App 20130181139 - EISNER; Edward C. ; et al.	2013-07-18
System And Method For Ion Implantation With Improved Productivity And Uniformity App 20130146760 - Eisner; Edward C. ; et al.	2013-06-13
Uniformity of a scanned ion beam Grant 8,378,313 - Eisner , et al. February 19, 2	2013-02-19
System and Method for Ion Implantation with Improved Productivity and Uniformity App 20130026356 - Vanderberg; Bo H. ; et al.	2013-01-31
Uniformity of a Scanned Ion Beam App 20120248326 - Eisner; Edward C. ; et al.	2012-10-04
System and method for ion implantation with improved productivity and uniformity Grant 8,278,634 - Vanderberg , et al. October 2, 2	2012-10-02
Enhanced low energy ion beam transport in ion implantation Grant 8,237,135 - Vanderberg , et al. August 7, 2	2012-08-07
Ion implanter having combined hybrid and double mechanical scan architecture Grant 8,124,947 - Sieradzki , et al. February 28, 2	2012-02-28
Method and apparatus for measurement of beam angle in ion implantation Grant 7,897,944 - Mitchell , et al. March 1, 2	2011-03-01
System and Method for Ion Implantation with Improved Productivity and Uniformity App 20100308215 - Vanderberg; Bo H. ; et al.	2010-12-09
Plasma electron flood for ion beam implanter Grant 7,800,083 - Vanderberg , et al. September 21, 2	2010-09-21
Enhanced Low Energy Ion Beam Transport In Ion Implantation App 20100181499 - Vanderberg; Bo H. ; et al.	2010-07-22
System and method for two-dimensional beam scan across a workpiece of an ion implanter Grant 7,750,320 - Ferrara , et al. July 6, 2	2010-07-06
Method and system for ion beam profiling Grant 7,701,230 - Ye , et al. April 20, 2	2010-04-20
Beam angle adjustment in ion implanters Grant 7,696,494 - Vanderberg , et al. April 13, 2	2010-04-13
Hybrid Scanning For Ion Implantation App 20100084576 - Vanderberg; Bo H.	2010-04-08
Adjustable Deflection Optics For Ion Implantation App 20100065761 - Graf; Michael A. ; et al.	2010-03-18
Method And Apparatus For Measurement Of Beam Angle In Ion Implantation App 20100012861 - Mitchell; Robert J. ; et al.	2010-01-21
Ion Implanter Having Combined Hybrid and Double Mechanical Scan Architecture App 20090321625 - Sieradzki; Manny ; et al.	2009-12-31
System for magnetic scanning and correction of an ion beam Grant 7,615,763 - Vanderberg , et al. November 10, 2	2009-11-10
Ion implanter having combined hybrid and double mechanical scan architecture Grant 7,586,111 - Sieradzki , et al. September 8, 2	2009-09-08
Throughput enhancement for scanned beam ion implanters Grant 7,566,886 - Eisner , et al. July 28, 2	2009-07-28
Ion beam scanning control methods and systems for ion implantation uniformity Grant 7,550,751 - Benveniste , et al. June 23, 2	2009-06-23
Plasma Electron Flood For Ion Beam Implanter App 20090114815 - Vanderberg; Bo H. ; et al.	2009-05-07
Beam line architecture for ion implanter Grant 7,507,978 - Vanderberg , et al. March 24, 2	2009-03-24
Ion Implanter Having Combined Hybrid And Double Mechanical Scan Architecture App 20090032726 - Sieradzki; Manny ; et al.	2009-02-05
Method And System For Ion Beam Profiling App 20080265866 - Ye; John Zheng ; et al.	2008-10-30
Ion source Grant 7,435,971 - Vanderberg , et al. October 14, 2	2008-10-14
Systems and methods for beam angle adjustment in ion implanters Grant 7,399,980 - Vanderberg , et al. July 15, 2	2008-07-15
System and method for two-dimensional beam scan across a workpiece of an ion implanter App 20080149857 - Ferrara; Joseph ; et al.	2008-06-26
Means to establish orientation of ion beam to wafer and correct angle errors Grant 7,361,914 - Rathmell , et al. April 22, 2	2008-04-22
Beam current stabilization utilizing gas feed control loop Grant 7,361,915 - Rathmell , et al. April 22, 2	2008-04-22
Beam line architecture for ion implanter App 20080078954 - Vanderberg; Bo H. ; et al.	2008-04-03
Ion source App 20080067412 - Vanderberg; Bo H. ; et al.	2008-03-20
System for magnetic scanning and correction of an ion beam App 20080067436 - Vanderberg; Bo H. ; et al.	2008-03-20
Ion beam scanning control methods and systems for ion implantation uniformity App 20080067444 - Benveniste; Victor M. ; et al.	2008-03-20
Beam Angle Adjustment In Ion Implanters App 20080067442 - Vanderberg; Bo H. ; et al.	2008-03-20
Systems and methods for beam angle adjustment in ion implanters App 20080061228 - Vanderberg; Bo H. ; et al.	2008-03-13
Throughput enhancement for scanned beam ion implanters App 20080035862 - Eisner; Edward C. ; et al.	2008-02-14
Systems and methods for beam angle adjustment in ion implanters Grant 7,227,160 - Vanderberg , et al. June 5, 2	2007-06-05
Means to establish orientation of ion beam to wafer and correct angle errors App 20070120067 - Rathmell; Robert D. ; et al.	2007-05-31
Beam current stabilization utilizing gas feed control loop App 20070120075 - Rathmell; Robert D. ; et al.	2007-05-31
Method and apparatus for ion beam profiling Grant 7,064,340 - Vanderberg , et al. June 20, 2	2006-06-20
Method And Apparatus For Ion Beam Profiling App 20060124867 - Vanderberg; Bo H. ; et al.	2006-06-15
Biased electrostatic deflector Grant 7,022,984 - Rathmell , et al. April 4, 2	2006-04-04
Scanning Systems And Methods For Providing Ions From An Ion Beam To A Workpiece App 20060033046 - Ferrara; Joseph ; et al.	2006-02-16
Scanning systems and methods for providing ions from an ion beam to a workpiece Grant 6,992,310 - Ferrara , et al. January 31, 2	2006-01-31
Magnet for scanning ion beams App 20060017010 - Vanderberg; Bo H. ; et al.	2006-01-26
Ion beam scanning systems and methods for improved ion implantation uniformity Grant 6,903,350 - Vanderberg , et al. June 7, 2	2005-06-07
Method and system for ion beam containment using photoelectrons in an ion beam guide Grant 6,891,174 - Wenzel , et al. May 10, 2	2005-05-10
Thin magnetron structures for plasma generation in ion implantation systems Grant 6,879,109 - Benveniste , et al. April 12, 2	2005-04-12
Method And System For Ion Beam Containment Using Photoelectrons In An Ion Beam Guide App 20050023487 - Wenzel, Kevin W. ; et al.	2005-02-03
Thin magnetron structures for plasma generation in ion implantation systems App 20040227470 - Benveniste, Victor M. ; et al.	2004-11-18
Deflecting acceleration/deceleration gap Grant 6,777,696 - Rathmell , et al. August 17, 2	2004-08-17
Decaborane vaporizer having improved vapor flow App 20030030010 - Perel, Alexander S. ; et al.	2003-02-13