Patent | Date |
---|
Methods for post-epitaxial warp prediction and control Grant 9,601,395 - Bhagavat , et al. March 21, 2 | 2017-03-21 |
Methods For Post-epitaxial Warp Prediction And Control App 20150371909 - Bhagavat; Sumeet S. ;   et al. | 2015-12-24 |
Methods for mounting an ingot on a wire saw Grant 9,156,187 - Bhagavat , et al. October 13, 2 | 2015-10-13 |
Hydrostatic pad pressure modulation in a simultaneous double side wafer grinder Grant 8,712,575 - Bhagavat , et al. April 29, 2 | 2014-04-29 |
Methods and Systems For Removing Contaminants From A Wire Of A Saw App 20130206163 - Zavattari; Carlo ;   et al. | 2013-08-15 |
Methods For Mounting An Ingot On A Wire Saw App 20130174829 - Bhagavat; Sumeet S. ;   et al. | 2013-07-11 |
Systems and Methods For Controlling Surface Profiles Of Wafers Sliced In A Wire Saw App 20130174828 - Zavattari; Carlo ;   et al. | 2013-07-11 |
Methods For Controlling Displacement Of Bearings In A Wire Saw App 20130139801 - Zavattari; Carlo ;   et al. | 2013-06-06 |
Methods For Controlling Surface Profiles Of Wafers Sliced In A Wire Saw App 20130139800 - Zavattari; Carlo ;   et al. | 2013-06-06 |
Systems For Controlling Surface Profiles Of Wafers Sliced In A Wire Saw App 20130144420 - Zavattari; Carlo ;   et al. | 2013-06-06 |
Systems For Controlling Temperature Of Bearings In A Wire Saw App 20130144421 - Zavattari; Carlo ;   et al. | 2013-06-06 |
Semiconductor and solar wafers Grant 8,310,031 - Zhang , et al. November 13, 2 | 2012-11-13 |
Methods for etching the edge of a silicon wafer Grant 8,309,464 - Erk , et al. November 13, 2 | 2012-11-13 |
Methods of grinding semiconductor wafers having improved nanotopology Grant 8,267,745 - Bhagavat , et al. September 18, 2 | 2012-09-18 |
Edge etched silicon wafers Grant 8,192,822 - Erk , et al. June 5, 2 | 2012-06-05 |
Methods and systems for adjusting operation of a wafer grinder using feedback from warp data Grant 8,145,342 - Bhagavat , et al. March 27, 2 | 2012-03-27 |
Semiconductor And Solar Wafers And Method For Processing Same App 20120028439 - Zhang; Guoqiang David ;   et al. | 2012-02-02 |
Hydrostatic Pad Pressure Modulation in a Simultaneous Double Side Wafer Grinder App 20110237160 - Bhagavat; Sumeet S. ;   et al. | 2011-09-29 |
Methods of Grinding Semiconductor Wafers Having Improved Nanotopology App 20110101504 - Bhagavat; Milind S. ;   et al. | 2011-05-05 |
Nanotopography control and optimization using feedback from warp data Grant 7,930,058 - Bhagavat , et al. April 19, 2 | 2011-04-19 |
Method for assessing workpiece nanotopology using a double side wafer grinder Grant 7,927,185 - Vandamme , et al. April 19, 2 | 2011-04-19 |
Methods and Systems For Adjusting Operation Of A Wafer Grinder Using Feedback from Warp Data App 20110045740 - Bhagavat; Sumeet S. ;   et al. | 2011-02-24 |
Wire saw ingot slicing system and method with ingot preheating, web preheating, slurry temperature control and/or slurry flow rate control Grant 7,878,883 - Gupta , et al. February 1, 2 | 2011-02-01 |
Method For Assessing Workpiece Nanotopology Using A Double Side Wafer Grinder App 20100087123 - Vandamme; Roland R. ;   et al. | 2010-04-08 |
Double side wafer grinder and methods for assessing workpiece nanotopology Grant 7,601,049 - Bhagavat , et al. October 13, 2 | 2009-10-13 |
Methods For Etching The Edge Of A Silicon Wafer App 20090247055 - Erk; Henry F. ;   et al. | 2009-10-01 |
Edge Etched Silicon Wafers App 20090246444 - Erk; Henry F. ;   et al. | 2009-10-01 |
Nanotopography Control And Optimization Using Feedback From Warp Data App 20080166948 - Bhagavat; Sumeet S. ;   et al. | 2008-07-10 |
Wire saw ingot slicing system and method with ingot preheating, web preheating, slurry temperature control and/or slurry flow rate control App 20070178807 - Gupta; Puneet ;   et al. | 2007-08-02 |
Double side wafer grinder and methods for assessing workpiece nanotopology App 20070179660 - Bhagavat; Sumeet S. ;   et al. | 2007-08-02 |
Process and apparatus for etching semiconductor wafers Grant 5,340,437 - Erk , et al. August 23, 1 | 1994-08-23 |