VAN SCHOOT; Jan Bernard Plechelmus
Patent Applications and Registrations
Patent applications and USPTO patent grants for VAN SCHOOT; Jan Bernard Plechelmus.The latest application filed is for "method for controlling a lithographic system".
Company Profile
3.65.49
- VAN SCHOOT; Jan Bernard Plechelmus - Eindhoven NL
- Van Schoot; Jan Bernard Plechelmus - Veldhoven NL
Patent Activity
| Patent | Date |
|---|---|
| Method for Controlling a Lithographic System App 20220163895 - NOORDMAN; Oscar Franciscus Jozephus ; et al. | 2022-05-26 |
| Lithographic apparatus and method Grant 10,558,126 - Van Schoot , et al. Feb | 2020-02-11 |
| Beam delivery for EUV lithography Grant 10,289,006 - Van Schoot , et al. | 2019-05-14 |
| Projection system Grant 10,248,027 - Butler , et al. | 2019-04-02 |
| Lithographic apparatus, spectral purity filter and device manufacturing method Grant 10,001,709 - Banine , et al. June 19, 2 | 2018-06-19 |
| Lithographic system Grant 9,989,863 - Van Schoot , et al. June 5, 2 | 2018-06-05 |
| Method and apparatus for generating radiation Grant 9,986,628 - Loopstra , et al. May 29, 2 | 2018-05-29 |
| Lithographic method and apparatus Grant 9,958,787 - Loopstra , et al. May 1, 2 | 2018-05-01 |
| Radiation source Grant 9,860,966 - Van Schoot , et al. January 2, 2 | 2018-01-02 |
| Projection System App 20170363965 - BUTLER; Hans ; et al. | 2017-12-21 |
| Radiation source Grant 9,835,950 - Eurlings , et al. December 5, 2 | 2017-12-05 |
| Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices Grant 9,785,051 - Van Schoot , et al. October 10, 2 | 2017-10-10 |
| Lithographic Apparatus And Method App 20170176868 - VAN SCHOOT; Jan Bernard Plechelmus ; et al. | 2017-06-22 |
| Lithographic Apparatus, Spectral Purity Filter and Device Manufacturing Method App 20170160646 - BANINE; Vadim Yevgenyevich ; et al. | 2017-06-08 |
| Radiation source Grant 9,632,419 - Van Schoot , et al. April 25, 2 | 2017-04-25 |
| Lithographic apparatus and device manufacturing method Grant 9,618,859 - Koevoets , et al. April 11, 2 | 2017-04-11 |
| Lithographic apparatus, spectral purity filter and device manufacturing method Grant 9,594,306 - Banine , et al. March 14, 2 | 2017-03-14 |
| Lithographic System App 20170052456 - VAN SCHOOT; Jan Bernard Plechelmus ; et al. | 2017-02-23 |
| Radiation Source App 20160334711 - EURLINGS; Markus Franciscus Antonius ; et al. | 2016-11-17 |
| Source-collector device, lithographic apparatus, and device manufacturing method Grant 9,411,238 - Yakunin , et al. August 9, 2 | 2016-08-09 |
| Radiation source, lithographic apparatus and device manufacturing method Grant 9,414,477 - Loopstra , et al. August 9, 2 | 2016-08-09 |
| Optical apparatus for conditioning a radiation beam for use by an object, lithography apparatus and method of manufacturing devices Grant 9,372,413 - De Vries , et al. June 21, 2 | 2016-06-21 |
| Radiation source Grant 9,366,967 - Yakunin , et al. June 14, 2 | 2016-06-14 |
| Module and method for producing extreme ultraviolet radiation Grant 9,363,879 - Van Empel , et al. June 7, 2 | 2016-06-07 |
| Multilayer mirror Grant 9,329,503 - Timoshkov , et al. May 3, 2 | 2016-05-03 |
| Lithographic apparatus and device manufacturing method Grant 9,285,685 - Streefkerk , et al. March 15, 2 | 2016-03-15 |
| Beam Delivery for EUV Lithography App 20150334813 - VAN SCHOOT; Jan Bernard Plechelmus ; et al. | 2015-11-19 |
| Lithographic apparatus and device manufacturing method with corrective positioning of reflective element Grant 9,170,500 - Van Schoot , et al. October 27, 2 | 2015-10-27 |
| Projection system and lithographic apparatus Grant 9,164,401 - Loopstra , et al. October 20, 2 | 2015-10-20 |
| Method and Apparatus for Generating Radiation App 20150296602 - Loopstra; Erik Roelof ; et al. | 2015-10-15 |
| Actuation Mechanism, Optical Apparatus, Lithography Apparatus And Method Of Manufacturing Devices App 20150277233 - Van Schoot; Jan Bernard Plechelmus ; et al. | 2015-10-01 |
| Illumination system, lithographic apparatus and method of forming an illumination mode Grant 9,134,629 - Loopstra , et al. September 15, 2 | 2015-09-15 |
| Lithographic Method and Apparatus App 20150253679 - Loopstra; Erik Roelof ; et al. | 2015-09-10 |
| Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter Grant 9,097,982 - Banine , et al. August 4, 2 | 2015-08-04 |
| Illumination system for lithographic apparatus with control system to effect an adjustment of an imaging parameter Grant 9,052,605 - Van Ingen Schenau , et al. June 9, 2 | 2015-06-09 |
| Radiation Source App 20150146182 - Van Schoot; Jan Bernard Plechelmus ; et al. | 2015-05-28 |
| Module And Method For Producing Extreme Ultraviolet Radiation App 20150077729 - VAN EMPEL; Tjarko Adriaan Rudolf ; et al. | 2015-03-19 |
| Source-collector Device, Lithographic Apparatus, And Device Manufacturing Method App 20140375974 - Yakunin; Andrei Mikhailovich ; et al. | 2014-12-25 |
| Radiation Source App 20140368802 - Yakunin; Andrei Mikhailovich ; et al. | 2014-12-18 |
| Module and method for producing extreme ultraviolet radiation Grant 8,901,521 - Van Empel , et al. December 2, 2 | 2014-12-02 |
| Lithographic apparatus and device manufacturing method Grant 8,896,809 - Stoeldraijer , et al. November 25, 2 | 2014-11-25 |
| Lithographic Apparatus and Device Manufacturing Method App 20140340659 - Van Schoot; Jan Bernard Plechelmus ; et al. | 2014-11-20 |
| Illumination system, lithographic apparatus and method of adjusting an illumination mode Grant 8,867,021 - De Vries , et al. October 21, 2 | 2014-10-21 |
| Lithographic Apparatus And Device Manufacturing Method App 20140293248 - STREEFKERK; Bob ; et al. | 2014-10-02 |
| Radiation Source App 20140253894 - Van Schoot; Jan Bernard Plechelmus ; et al. | 2014-09-11 |
| Lithographic apparatus and method Grant 8,830,444 - Van Schoot , et al. September 9, 2 | 2014-09-09 |
| Lithographic apparatus and device manufacturing method Grant 8,797,504 - Nienhuys , et al. August 5, 2 | 2014-08-05 |
| Lithographic apparatus and device manufacturing method Grant 8,749,756 - Van De Vijver , et al. June 10, 2 | 2014-06-10 |
| Lithographic apparatus and device manufacturing method Grant 8,730,448 - Nienhuys , et al. May 20, 2 | 2014-05-20 |
| Lithographic apparatus and device manufacturing method Grant 8,711,330 - Streefkerk , et al. April 29, 2 | 2014-04-29 |
| Alignment of collector device in lithographic apparatus Grant 8,704,199 - Klaassen , et al. April 22, 2 | 2014-04-22 |
| Lithographic Apparatus, Spectral Purity Filter and Device Manufacturing Method App 20140085619 - Banine; Vadim Yevgenyevich ; et al. | 2014-03-27 |
| Lithographic projection apparatus and method of compensating perturbation factors Grant 8,570,489 - Van Schoot , et al. October 29, 2 | 2013-10-29 |
| Methods To Control Euv Exposure Dose And Euv Lithographic Methods And Apparatus Using Such Methods App 20130077073 - VAN SCHOOT; Jan Bernard Plechelmus ; et al. | 2013-03-28 |
| Multilayer Mirror App 20130057840 - Timoshkov; Vadim Iourievich ; et al. | 2013-03-07 |
| Optical Apparatus for Conditioning a Radiation Beam for Use by an Object, Lithography Apparatus and Method of Manufacturing Devices App 20120262688 - DE VRIES; Gosse Charles ; et al. | 2012-10-18 |
| Illumination System, Lithographic Apparatus And Illumination Method App 20120262690 - De Boeij; Wilhelmus Petrus ; et al. | 2012-10-18 |
| Lithographic Apparatus And Device Manufacturing Method App 20120262689 - Van Ingen Schenau; Koen ; et al. | 2012-10-18 |
| Lithographic Apparatus And Device Manufacturing Method App 20120229787 - Van Schoot; Jan Bernard Plechelmus ; et al. | 2012-09-13 |
| Lithographic Apparatus And Device Manufacturing Method App 20120229783 - Nienhuys; Han-Kwang ; et al. | 2012-09-13 |
| Lithographic Apparatus And Device Manufacturing Method App 20120229782 - Nienhuys; Han-Kwang ; et al. | 2012-09-13 |
| Illumination System, Lithographic Apparatus And Method Of Adjusting An Illumination Mode App 20120154777 - De Vries; Gosse Charles ; et al. | 2012-06-21 |
| Lithographic Apparatus and Method App 20120147346 - VAN SCHOOT; Jan Bernard Plechelmus ; et al. | 2012-06-14 |
| Lithographic Apparatus And Device Manufacturing Method App 20120147348 - VAN DE VIJVER; Yuri Johannes Gabriel ; et al. | 2012-06-14 |
| Lithographic Apparatus And Method App 20120105818 - Van Schoot; Jan Bernard Plechelmus ; et al. | 2012-05-03 |
| Lithographic apparatus and device manufacturing method Grant 8,115,900 - Van De Vijver , et al. February 14, 2 | 2012-02-14 |
| Illumination System, Lithographic Apparatus And Method Of Forming An Illumination Mode App 20120013882 - Loopstra; Erik Roelof ; et al. | 2012-01-19 |
| Radiation System, Radiation Collector, Radiation Beam Conditioning System, Spectral Purity Filter For Radiation System And Method For Forming A Spectral Purity Filter App 20110223543 - Banine; Vadim Yevgenyevich ; et al. | 2011-09-15 |
| Lithographic Apparatus And Device Manufacturing Method App 20110211181 - STREEFKERK; Bob ; et al. | 2011-09-01 |
| Alignment of Collector Device in Lithographic Apparatus App 20110188018 - Klaassen; Michel Fransois Hubert ; et al. | 2011-08-04 |
| Projection System and Lithographic Apparatus App 20110170078 - Loopstra; Erik Roelof ; et al. | 2011-07-14 |
| Lithographic apparatus and device manufacturing method Grant 7,961,293 - Streefkerk , et al. June 14, 2 | 2011-06-14 |
| Illumination system for illuminating a patterning device and method for manufacturing an illumination system Grant 7,889,321 - Van Schoot , et al. February 15, 2 | 2011-02-15 |
| Lithographic Projection Apparatus And Method Of Compensating Perturbation Factors App 20100321657 - VAN SCHOOT; Jan Bernard Plechelmus ; et al. | 2010-12-23 |
| Extreme ultra-violet lithographic apparatus and device manufacturing method Grant 7,816,658 - Van Schoot , et al. October 19, 2 | 2010-10-19 |
| Radiation Source, Lithographic Apparatus And Device Manufacturing Method App 20100044591 - Loopstra; Erik Roelof ; et al. | 2010-02-25 |
| Illumination System And Lithographic Method App 20090262328 - VAN SCHOOT; Jan Bernard Plechelmus ; et al. | 2009-10-22 |
| Module And Method For Producing Extreme Ultraviolet Radiation App 20090090877 - Van Empel; Tjarko Adriaan Rudolf ; et al. | 2009-04-09 |
| Lithographic apparatus and device manufacturing method App 20090047604 - Stoeldraijer; Judocus Marie Dominicus ; et al. | 2009-02-19 |
| Illumination system for illuminating a pattering device and method for manufacturing an illumination system App 20080246940 - Van Schoot; Jan Bernard Plechelmus ; et al. | 2008-10-09 |
| Lithographic processing method and device manufactured thereby Grant 7,374,869 - Kohler , et al. May 20, 2 | 2008-05-20 |
| Lithographic apparatus and device manufacturing method Grant 7,352,435 - Streefkerk , et al. April 1, 2 | 2008-04-01 |
| Lithographic apparatus and device manufacturing method Grant 7,199,861 - Janssen , et al. April 3, 2 | 2007-04-03 |
| Lithographic apparatus and device manufacturing method Grant 7,177,010 - Van Der Laan , et al. February 13, 2 | 2007-02-13 |
| Lithographic apparatus and device manufacturing method App 20060092397 - Laan; Hans Van Der ; et al. | 2006-05-04 |
| Lithographic processing method and device manufactured thereby App 20040265710 - Kohler, Carsten Andreas ; et al. | 2004-12-30 |
| Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program product Grant 6,737,662 - Mulder , et al. May 18, 2 | 2004-05-18 |
| Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program product App 20030038225 - Mulder, Heine Melle ; et al. | 2003-02-27 |
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