Van Schaik; Willem

Patent Applications and Registrations

Patent applications and USPTO patent grants for Van Schaik; Willem.The latest application filed is for "euv source chamber and gas flow regime for lithographic apparatus, multi-layer mirror and lithographic apparatus".

Company Profile

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Van Schaik; Willem - 's Hertogenbosch NL
Van Schaik; Willem - Den Bosch NL
van Schaik; Willem - GL's Hertogenbosch NL
van Schaik, Willem - s-Hertogenbosch NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
EUV source chamber and gas flow regime for lithographic apparatus, multi-layer mirror and lithographic apparatus Grant 10,295,916 - Mulder , et al.	2019-05-21
Euv Source Chamber And Gas Flow Regime For Lithographic Apparatus, Multi-layer Mirror And Lithographic Apparatus App 20180246422 - MULDER; Heine Melle ; et al.	2018-08-30
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,508,487 - Mulkens , et al. March 24, 2	2009-03-24
Lithographic projection apparatus, device manufacturing method and device manufactured thereby Grant 7,115,886 - Van Schaik , et al. October 3, 2	2006-10-03
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,924,492 - Van Schaik August 2, 2	2005-08-02
Lithographic projection apparatus, device manufacturing method and device manufactured thereby App 20050112508 - Van Schaik, Willem ; et al.	2005-05-26
Lithographic projection apparatus, device manufacturing method and device manufactured thereby Grant 6,828,569 - Van Schaik , et al. December 7, 2	2004-12-07
System for flushing at least one internal space of an objective Grant 6,825,914 - Schroeder , et al. November 30, 2	2004-11-30
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects Grant 6,724,460 - Van Schaik , et al. April 20, 2	2004-04-20
Lithographic projection apparatus, device manufacturing method and device manufactured thereby App 20030096193 - Van Schaik, Willem ; et al.	2003-05-22
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects App 20030095240 - Van Schaik, Willem ; et al.	2003-05-22
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20020134947 - Van Schaik, Willem	2002-09-26
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20020018189 - Mulkens, Johannes Catharinus Hubertus ; et al.	2002-02-14

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