Van Oosten; Anton Bernhard

Patent Applications and Registrations

Patent applications and USPTO patent grants for Van Oosten; Anton Bernhard.The latest application filed is for "process window based on defect probability".

Company Profile

11.12.17

Van Oosten; Anton Bernhard - Lommel BE
Van Oosten; Anton Bernhard - Veldhoven NL
Van Oosten; Anton Bernhard - Eindhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method Grant 11,314,174 - De Winter , et al. April 26, 2	2022-04-26
Guided patterning device inspection Grant 11,287,748 - Van Oosten , et al. March 29, 2	2022-03-29
Process Window Based On Defect Probability App 20210356874 - SLACHTER; Abraham ; et al.	2021-11-18
Projection system and mirror and radiation source for a lithographic apparatus Grant 11,150,560 - Van De Kerkhof , et al. October 19, 2	2021-10-19
Matching Pupil Determination App 20210302844 - VAN OOSTEN; Anton Bernhard	2021-09-30
Process window based on defect probability Grant 11,079,687 - Slachter , et al. August 3, 2	2021-08-03
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method Grant 11,054,754 - Staals , et al. July 6, 2	2021-07-06
Guided Patterning Device Inspection App 20210041788 - VAN OOSTEN; Anton Bernhard ; et al.	2021-02-11
Process Window Based On Defect Probability App 20210018850 - SLACHTER; Abraham ; et al.	2021-01-21
Patterning stack optimization Grant 10,775,705 - Tel , et al. Sept	2020-09-15
Projection System and Mirror and Radiation Source for a Lithographic Apparatus App 20200285155 - VAN DE KERKHOF; Marcus Adrianus ; et al.	2020-09-10
Methods and Patterning Devices and Apparatuses for Measuring Focus Performance of a Lithographic Apparatus, Device Manufacturing App 20200264522 - DE WINTER; Laurentius Cornelius ; et al.	2020-08-20
Projection system and mirror and radiation source for a lithographic apparatus Grant 10,732,511 - Van De Kerkhof , et al.	2020-08-04
Methods and Patterning Devices and Apparatuses for Measuring Focus Performance of a Lithographic Apparatus, Device Manufacturing App 20200142324 - STAALS; Frank ; et al.	2020-05-07
Method of calibrating focus measurements, measurement method and metrology apparatus, lithographic system and device manufacturing method Grant 10,571,812 - Li , et al. Feb	2020-02-25
Metrology Apparatus and Method for Determining a Characteristic of One or More Structures on a Substrate App 20190378012 - Tripodi; Lorenzo ; et al.	2019-12-12
Patterning Stack Optimization App 20190204749 - TEL; Wim Tjibbo ; et al.	2019-07-04
Projection System and Mirror and Radiation Source for a Lithographic Apparatus App 20190171109 - VAN DE KERKHOF; Marcus Adrianus ; et al.	2019-06-06
Projection system and minor and radiation source for a lithographic apparatus Grant 10,216,093 - Van De Kerkhof , et al. Feb	2019-02-26
Method of Calibrating Focus Measurements, Measurement Method and Metrology Apparatus, Lithographic System and Device Manufacturing Method App 20190056673 - LI; Fahong ; et al.	2019-02-21
Inspection apparatus, inspection method, lithographic apparatus, patterning device and manufacturing method Grant 10,054,862 - Van Oosten , et al. August 21, 2	2018-08-21
Inspection apparatus, inspection method, lithographic apparatus and manufacturing method Grant 10,001,710 - Staals , et al. June 19, 2	2018-06-19
Inspection Apparatus, Inspection Method, Lithographic Apparatus, Patterning Device and Manufacturing Method App 20180046091 - VAN OOSTEN; Anton Bernhard ; et al.	2018-02-15
Method of characterizing, method of forming a model, method of simulating, mask manufacturing method and device manufacturing method Grant 9,798,225 - Van Setten , et al. October 24, 2	2017-10-24
Inspection Apparatus, Inspection Method, Lithographic Apparatus and Manufacturing Method App 20170023867 - STAALS; Frank ; et al.	2017-01-26
Inspection Apparatus, Inspection Method, Lithographic Apparatus, Patterning Device and Manufacturing Method App 20160363871 - VAN OOSTEN; Anton Bernhard ; et al.	2016-12-15
Method Of Characterizing, Method Of Forming A Model, Method Of Simulating, Mask Manufacturing Method And Device Manufacturing Method App 20160266483 - VAN SETTEN; Eelco ; et al.	2016-09-15
Projection System and Mirror and Radiation Source for a Lithographic Apparatus App 20150323872 - VAN DE KERKHOF; Marcus Adrianus ; et al.	2015-11-12
Lithographic Method And Apparatus App 20110310369 - MICKAN; Uwe ; et al.	2011-12-22

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