Patent | Date |
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Lithographic apparatus and device manufacturing method Grant 10,466,595 - Streefkerk , et al. No | 2019-11-05 |
Lithographic Apparatus And Device Manufacturing Method App 20180046089 - STREEFKERK; Bob ;   et al. | 2018-02-15 |
Lithographic apparatus and device manufacturing method Grant 9,798,246 - Streefkerk , et al. October 24, 2 | 2017-10-24 |
Lithographic apparatus and device manufacturing method Grant 9,477,160 - Streefkerk , et al. October 25, 2 | 2016-10-25 |
Lithographic Apparatus And Device Manufacturing Method App 20160299440 - STREEFKERK; Bob ;   et al. | 2016-10-13 |
Lithographic apparatus and device manufacturing method Grant 8,964,164 - Streefkerk , et al. February 24, 2 | 2015-02-24 |
Calibration method and lithographic apparatus for calibrating an optimum take over height of a substrate Grant 8,384,882 - Compen , et al. February 26, 2 | 2013-02-26 |
Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus Grant 8,154,709 - Alberti , et al. April 10, 2 | 2012-04-10 |
Method of placing a substrate, method of transferring a substrate, support system and lithographic projection apparatus Grant 8,149,387 - Alberti , et al. April 3, 2 | 2012-04-03 |
Method of transferring a substrate, transfer system and lithographic projection apparatus Grant 8,086,348 - Alberti , et al. December 27, 2 | 2011-12-27 |
Method of transferring a substrate, transfer system and lithographic projection apparatus Grant 8,064,045 - Alberti , et al. November 22, 2 | 2011-11-22 |
Lithographic Apparatus And Device Manufacturing Method App 20110279795 - STREEFKERK; Bob ;   et al. | 2011-11-17 |
Lithographic Apparatus And Device Manufacturing Method App 20110273683 - STREEFKERK; Bob ;   et al. | 2011-11-10 |
Lithographic Apparatus And Device Manufacturing Method App 20110181859 - Streefkerk; Bob ;   et al. | 2011-07-28 |
Lithographic apparatus and device manufacturing method Grant 7,936,444 - Streefkerk , et al. May 3, 2 | 2011-05-03 |
Method of Placing a Substrate, Method of Transferring a Substrate, Support System and Lithographic Projection Apparatus App 20100265488 - Alberti; Jozef Augustinus Maria ;   et al. | 2010-10-21 |
Method of Placing a Substrate, Method of Transferring a Substrate, Support System and Lithographic Projection Apparatus App 20090180095 - ALBERTI; Jozef Augustinus Maria ;   et al. | 2009-07-16 |
Method of Transferring a Substrate, Transfer System and Lithographic Projection Apparatus App 20090153816 - ALBERTI; Jozef Augustinus Maria ;   et al. | 2009-06-18 |
Method of Transferring a Substrate, Transfer System and Lithographic Projection Apparatus App 20090155026 - ALBERTI; Jozef Augustinus Maria ;   et al. | 2009-06-18 |
Lithographic apparatus and device manufacturing method Grant 7,352,434 - Streefkerk , et al. April 1, 2 | 2008-04-01 |
Lithographic apparatus, device manufacturing method and substrate holder Grant 7,030,967 - Van Ballegoij , et al. April 18, 2 | 2006-04-18 |
Lithographic apparatus and device manufacturing method App 20050007569 - Streefkerk, Bob ;   et al. | 2005-01-13 |
Lithographic apparatus, device manufacturing method and substrate holder App 20040179183 - Van Ballegoij, Robertus Nicodemus Jacobus ;   et al. | 2004-09-16 |