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Patent applications and USPTO patent grants for Van Kempen; Robertus Jacobus Theodorus.The latest application filed is for "substrate positioning device and electron beam inspection tool".
Patent | Date |
---|---|
Electron beam inspection apparatus stage positioning Grant 11,302,512 - Baggen , et al. April 12, 2 | 2022-04-12 |
Substrate Positioning Device And Electron Beam Inspection Tool App 20200373118 - BAGGEN; Marcel Koenraad Marie ;   et al. | 2020-11-26 |
Electron Beam Inspection Apparatus Stage Positioning App 20200203118 - BAGGEN; Marcel Koenraad Marie ;   et al. | 2020-06-25 |
Lithographic apparatus and device manufacturing method Grant 8,885,147 - Vervoordeldonk , et al. November 11, 2 | 2014-11-11 |
Lithographic Apparatus And Device Manufacturing Method App 20100214548 - Vervoordeldonk; Michael Johannes ;   et al. | 2010-08-26 |
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