Van Kampen; Maarten

Patent Applications and Registrations

Patent applications and USPTO patent grants for Van Kampen; Maarten.The latest application filed is for "apparatus and method for cleaning an inspection system".

Company Profile

2.9.17

Van Kampen; Maarten - Eindhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Apparatus And Method For Cleaning An Inspection System App 20220205900 - NIKIPELOV; Andrey ; et al.	2022-06-30
Method And Apparatus For Forming A Patterned Layer Of Material App 20210079519 - DE JAGER; Pieter Willem Herman ; et al.	2021-03-18
Graphene spectral purity filter Grant 10,481,510 - Yakunin , et al. Nov	2019-11-19
Radiation system and optical device Grant 10,359,710 - Schimmel , et al.	2019-07-23
A Radiation System and Optical Device App 20180307146 - SCHIMMEL; Hendrikus Gijsbertus ; et al.	2018-10-25
Pellicle For Reticle And Multilayer Mirror App 20180259846 - YAKUNIN; Andrei Mikhailovich ; et al.	2018-09-13
Radiation source-collector and method for manufacture Grant 9,773,578 - Kuznetsov , et al. September 26, 2	2017-09-26
Lithographic apparatus and method of manufacturing a device Grant 9,606,445 - Banine , et al. March 28, 2	2017-03-28
Pellicle For Reticle And Multilayer Mirror App 20170017150 - YAKUNIN; Andrei Mikhailovich ; et al.	2017-01-19
Pellicle for reticle and multilayer mirror Grant 9,482,960 - Yakunin , et al. November 1, 2	2016-11-01
Lithographic apparatus and method Grant 9,395,630 - Yakunin , et al. July 19, 2	2016-07-19
Arrangement for use in a projection exposure tool for microlithography having a reflective optical element Grant 9,354,529 - Ehm , et al. May 31, 2	2016-05-31
Radiation Source-Collector and Method for Manufacture App 20160012929 - KUZNETSOV; Alexey Sergeevich ; et al.	2016-01-14
Lithographic Apparatus and Method of Manufacturing a Device App 20150192861 - Banine; Vadim Yevgenyevich ; et al.	2015-07-09
Pellicle For Reticle And Multilayer Mirror App 20140160455 - YAKUNIN; Andrei Mikhailovich ; et al.	2014-06-12
Components for EUV Lithographic Apparatus, EUV Lithographic Apparatus Including Such Components and Method for Manufacturing Such Components App 20130114059 - Jak; Martin Jacobus Johan ; et al.	2013-05-09
Lithographic Apparatus And Method App 20130088699 - Yakunin; Andrei Mikhailovich ; et al.	2013-04-11
Reflective Optical Element And Method Of Producing It App 20120200913 - VAN KAMPEN; MAARTEN ; et al.	2012-08-09
Spectral Purity Filter, Lithographic Apparatus, Method For Manufacturing A Spectral Purity Filter And Method Of Manufacturing A Device Using Lithographic Apparatus App 20120170015 - Yakunin; Andrei Mikhailovich ; et al.	2012-07-05
Lithographic Apparatus, Device Manufacturing Method, Cleaning System And Method For Cleaning A Patterning Device App 20110037960 - Scaccabarozzi; Luigi ; et al.	2011-02-17
System for Contactless Cleaning, Lithographic Apparatus and Device Manufacturing Method App 20100151394 - Scaccabarozzi; Luigi ; et al.	2010-06-17

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