Patent | Date |
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Configuring interaction control in multi-controller network Grant 10,785,097 - Van Herpen , et al. Sept | 2020-09-22 |
Detecting target molecules in a sample Grant 10,670,589 - Van Herpen , et al. | 2020-06-02 |
Medicine Container, Housing And Display For Medicine Container App 20200121557 - VAN DE WOUW; Doortje ;   et al. | 2020-04-23 |
A Transmitting Device, A Receiving Device And Methods Of Operating The Devices App 20200065327 - KANE; Grace McAlpine ;   et al. | 2020-02-27 |
Camera-based calibration of an ambience lighting system Grant 10,492,274 - De Bruijn , et al. Nov | 2019-11-26 |
Light emitting tufted carpet Grant 10,436,399 - Van Herpen O | 2019-10-08 |
Floor covering system comprising a lighting system Grant 10,309,640 - Van Herpen , et al. | 2019-06-04 |
Solid state lighting strip for mounting in or on a panel support element of a modular panel system Grant 10,281,639 - Pijlman , et al. | 2019-05-07 |
Wall or ceiling covering with lighting system layer Grant 10,060,137 - Van Herpen , et al. August 28, 2 | 2018-08-28 |
Conductive layer of a large surface for distribution of power using capacitive power transfer Grant 9,941,930 - Waffenschmidt , et al. April 10, 2 | 2018-04-10 |
Lighting arrangement comprising a carpet with back lighting for providing dynamic light effects with the carpet Grant 9,927,115 - Van Herpen , et al. March 27, 2 | 2018-03-27 |
Detecting Target Molecules In A Sample App 20180074047 - VAN HERPEN; MAARTEN MARINUS JOHANNES WILHELMUS ;   et al. | 2018-03-15 |
Floor covering system comprising a lighting system Grant 9,869,465 - Van Herpen , et al. January 16, 2 | 2018-01-16 |
Milk cooler Grant D798,118 - Karagkouni , et al. September 26, 2 | 2017-09-26 |
Use Of Ambience Light For Copy Protection Of Video Content Displayed On A Screen App 20170208215 - VAN HERPEN; MAARTEN MARINUS JOHANNES WILHELMUS ;   et al. | 2017-07-20 |
Use of ambience light for copy protection of video content displayed on a screen Grant 9,641,725 - Van Herpen , et al. May 2, 2 | 2017-05-02 |
Light-emitting acoustic building element Grant 9,618,171 - Sepkhanov , et al. April 11, 2 | 2017-04-11 |
Dust mite killing carpet Grant 9,551,100 - Van Herpen January 24, 2 | 2017-01-24 |
Carpet unit arrangement having a light source Grant 9,534,777 - Van Herpen January 3, 2 | 2017-01-03 |
Wall Or Ceiling Covering With Lighting System Layer App 20160369515 - VAN HERPEN; MAARTEN MARINUS JOHANNES WILHELMUS ;   et al. | 2016-12-22 |
Wall or ceiling covering with lighting system layer Grant 9,453,340 - Van Herpen , et al. September 27, 2 | 2016-09-27 |
Stack arrangement comprising a lighting unit in between a support and a support cover Grant 9,395,058 - Van Herpen July 19, 2 | 2016-07-19 |
Method for guiding a human to a reference location, and lighting system comprising a plurality of light sources for use in such method Grant 9,357,615 - Van Herpen May 31, 2 | 2016-05-31 |
Medicine Containaer, Housing And Display For Medicine Container App 20160106622 - VAN DE WOUW; Doortje ;   et al. | 2016-04-21 |
Camera-based Calibration Of An Ambience Lighting System App 20160081164 - DE BRUIJN; FREDERIK JAN ;   et al. | 2016-03-17 |
Configuring Interaction Control In Multi-controller Network App 20160013975 - VAN HERPEN; MAARTEN MARINUS JOHANNES WILHELMUS ;   et al. | 2016-01-14 |
Floor Covering System Comprising A Lighting System App 20150369470 - VAN HERPEN; MAARTEN MARINUS JOHANNES WILHELMUS ;   et al. | 2015-12-24 |
Ambience cinema lighting system Grant 9,220,158 - Van Herpen , et al. December 22, 2 | 2015-12-22 |
Spectral purity filter, radiation source, lithographic apparatus, and device manufacturing method Grant 9,195,144 - Jak , et al. November 24, 2 | 2015-11-24 |
Use Of Ambience Light For Copy Protection Of Video Content Displayed On A Screen App 20150304522 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ;   et al. | 2015-10-22 |
Illumination Device Based On Thermally Conductive Sheet With Light Diffusing Particles App 20150212258 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2015-07-30 |
Optical element Grant 9,075,170 - Cornelissen , et al. July 7, 2 | 2015-07-07 |
Surgical lamp for broadband and narrowband illumination Grant 9,057,492 - Van Herpen , et al. June 16, 2 | 2015-06-16 |
Spectral purity filters for use in a lithographic apparatus Grant 9,041,912 - Soer , et al. May 26, 2 | 2015-05-26 |
Light-emitting acoustic building element App 20150109765 - Sepkhanov; Ruslan Akhmedovich ;   et al. | 2015-04-23 |
Carpet back lighting system with anti-slip coating Grant 8,974,073 - Van Herpen , et al. March 10, 2 | 2015-03-10 |
Carpet back lighting system Grant 8,894,233 - Van Herpen , et al. November 25, 2 | 2014-11-25 |
Padding for a carpet and carpet-padding combination Grant 8,851,701 - Van Herpen October 7, 2 | 2014-10-07 |
Conductive Layer Of A Large Surface For Distribution Of Power Using Capacitive Power Transfer App 20140292103 - Waffenschmidt; Eberhard ;   et al. | 2014-10-02 |
Zone plate Grant 8,836,917 - Soer , et al. September 16, 2 | 2014-09-16 |
Laminate Surface For Wireless Capacitive Power App 20140210279 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2014-07-31 |
Light output device Grant 8,748,922 - Van Herpen , et al. June 10, 2 | 2014-06-10 |
Radiation source with cleaning apparatus Grant 8,742,381 - Banine , et al. June 3, 2 | 2014-06-03 |
Method for guiding a human to a reference location, and lighting system comprising a plurality of light sources for use in such method App 20140132183 - Van Herpen; Maarten Marinus Johannes Wilhelmus | 2014-05-15 |
Spectral purity filter and lithographic apparatus Grant 8,665,420 - Van Herpen , et al. March 4, 2 | 2014-03-04 |
Solid State Lighting Strip for Mounting in or on a Panel Support Element of a Modular Panel System App 20140049980 - Pijlman; Fetze ;   et al. | 2014-02-20 |
Carpet Unit Arrangement and Carpet Unit App 20140016307 - Van Herpen; Maarten Marinus Johannes Wilhelmus | 2014-01-16 |
Lithographic apparatus, plasma source, and reflecting method Grant 8,593,617 - Van Herpen , et al. November 26, 2 | 2013-11-26 |
Carpet unit comprising optical sensor Grant 8,564,207 - Van Herpen October 22, 2 | 2013-10-22 |
Molecular diagnostic system based on evanescent illumination and fluorescence Grant 8,502,166 - Boamfa , et al. August 6, 2 | 2013-08-06 |
Light emitting tufted carpet Grant 8,475,026 - Van Herpen , et al. July 2, 2 | 2013-07-02 |
Radiation Source With Cleaning Apparatus App 20130161542 - BANINE; Vadim Yevgenyevich ;   et al. | 2013-06-27 |
Surgical Lamp For Broadband And Narrowband Illumination App 20130147400 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2013-06-13 |
Stack Arrangement Comprising A Lighting Unit In Between A Support And A Support Cover App 20130120975 - Van Herpen; Maarten Marinus Johannes Wilhelmus | 2013-05-16 |
Radiation source, lithographic apparatus and device manufacturing method Grant 8,416,391 - Banine , et al. April 9, 2 | 2013-04-09 |
Light Emitting Tufted Carpet App 20130077312 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus | 2013-03-28 |
Method for removing a deposition on an uncapped multilayer mirror of a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 8,405,051 - Banine , et al. March 26, 2 | 2013-03-26 |
Spectral purity filters for use in a lithographic apparatus Grant 8,390,788 - Soer , et al. March 5, 2 | 2013-03-05 |
Light emitting tufted carpet Grant 8,388,184 - Van Herpen March 5, 2 | 2013-03-05 |
Light output device Grant 8,382,339 - Van Herpen , et al. February 26, 2 | 2013-02-26 |
Light output device Grant 8,382,319 - Van Herpen , et al. February 26, 2 | 2013-02-26 |
Light output device Grant 8,378,591 - Van Herpen , et al. February 19, 2 | 2013-02-19 |
System, computer-readable medium, method, and use for combined epithelial early cancer diagnosis and staging Grant 8,374,685 - Van Gogh , et al. February 12, 2 | 2013-02-12 |
Textile Product Having A Lighting Function And Method For The Production Thereof App 20130027963 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2013-01-31 |
Compartment Grant 8,353,602 - Van Herpen , et al. January 15, 2 | 2013-01-15 |
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby Grant 8,345,223 - Soer , et al. January 1, 2 | 2013-01-01 |
Ambience Cinema Lighting System App 20120262072 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2012-10-18 |
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby Grant 8,289,499 - Soer , et al. October 16, 2 | 2012-10-16 |
Radiation source Grant 8,263,950 - Soer , et al. September 11, 2 | 2012-09-11 |
Radiation source and lithographic apparatus including a contamination trap Grant 8,242,471 - Soer , et al. August 14, 2 | 2012-08-14 |
Light output device Grant 8,242,717 - Van Herpen , et al. August 14, 2 | 2012-08-14 |
Floor Covering System Comprising A Lighting System App 20120201014 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2012-08-09 |
Debris prevention system and lithographic apparatus Grant 8,227,771 - Soer , et al. July 24, 2 | 2012-07-24 |
Textile light emitting device Grant 8,226,259 - Van Pieterson , et al. July 24, 2 | 2012-07-24 |
Light output device Grant 8,227,999 - Van Herpen , et al. July 24, 2 | 2012-07-24 |
Spectral Purity Filter, Lithographic Apparatus, And Device Manufacturing Method App 20120182537 - Yakunin; Andrei Mikhailovich ;   et al. | 2012-07-19 |
Wall Or Ceiling Covering Material App 20120176776 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2012-07-12 |
Tufted textile Grant 8,215,788 - Van Herpen July 10, 2 | 2012-07-10 |
Optical Element App 20120163014 - Cornelissen; Hugo Johan ;   et al. | 2012-06-28 |
Light output device Grant 8,207,541 - Van Herpen , et al. June 26, 2 | 2012-06-26 |
Zone Plate App 20120105961 - Soer; Wouter Anthon ;   et al. | 2012-05-03 |
Self-cleaning system and window-glass Grant 8,147,971 - Van Herpen April 3, 2 | 2012-04-03 |
Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method Grant 8,139,200 - Van Herpen , et al. March 20, 2 | 2012-03-20 |
Lithographic apparatus Grant 8,120,752 - Soer , et al. February 21, 2 | 2012-02-21 |
Light output device Grant 8,093,789 - Van Herpen , et al. January 10, 2 | 2012-01-10 |
Debris mitigation system and lithographic apparatus Grant 8,071,963 - Van Herpen , et al. December 6, 2 | 2011-12-06 |
Carpet Back Lighting System App 20110292641 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2011-12-01 |
Carpet Back Lighting System With Anti-slip Coating App 20110292650 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2011-12-01 |
Light Transmissive Multi-layer Carpet Tile And Carpeted Floor Comprising A Lighting System And A Plurality Of Such Carpet Tiles App 20110286213 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2011-11-24 |
Padding For A Carpet And Carpet-padding Combination App 20110242803 - Van Herpen; Maarten Marinus Johannes Wilhelmus | 2011-10-06 |
Spectral Purity Filter, Radiation Source, Lithographic Apparatus, and Device Manufacturing Method App 20110211185 - Jak; Martin Jacobus Johan ;   et al. | 2011-09-01 |
Lighting Arrangement Comprising A Carpet With Back Lighting For Providing Dynamic Light Effects With The Carpet App 20110203147 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2011-08-25 |
Spectral Purity Filter, Lithographic Apparatus Including Such A Spectral Purity Filter And Device Manufacturing Method App 20110157573 - Soer; Wouter Anthon ;   et al. | 2011-06-30 |
Spectral Purity Filter And Lithographic Apparatus App 20110149262 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2011-06-23 |
Radiation Source, Lithographic Apparatus And Device Manufacturing Method App 20110134405 - Banine; Vadim Yevgenyevich ;   et al. | 2011-06-09 |
Spectral Purity Filter For Multi-layer Mirror, Lithographic Apparatus Including Such Multi-layer Mirror, Method For Enlarging The Ratio Of Desired Radiation And Undesired Radiation, And Device Manufacturing Method App 20110134410 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ;   et al. | 2011-06-09 |
Light Output Device App 20110127552 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2011-06-02 |
Radiation Source App 20110128519 - SOER; Wouter Anthon ;   et al. | 2011-06-02 |
Radiation source and lithographic apparatus Grant 7,952,084 - Soer , et al. May 31, 2 | 2011-05-31 |
Method For Removing A Deposition On An Uncapped Multilayer Mirror Of A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20110117504 - Banine; Vadim Yevgenyevich ;   et al. | 2011-05-19 |
Source Module Of An Euv Lithographic Apparatus, Lithographic Apparatus, And Method For Manufacturing A Device App 20110109892 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2011-05-12 |
Dust Mite Killing Carpet App 20110110091 - Van Herpen; Maarten Marinus Johannes Wilhelmus | 2011-05-12 |
Catheter With Separable Sections App 20110092956 - Soer; Wouter Anthon ;   et al. | 2011-04-21 |
Lithographic apparatus, and device manufacturing method Grant 7,928,412 - Van Herpen , et al. April 19, 2 | 2011-04-19 |
Spectral Purity Filters For Use In A Lithographic Apparatus App 20110043782 - Soer; Wouter Anthon ;   et al. | 2011-02-24 |
Spectral Purity Filters For Use In A Lithographic Apparatus App 20110044425 - Jak; Martin Jacobus Johan ;   et al. | 2011-02-24 |
Luminous Device App 20110037376 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2011-02-17 |
Radiation System And Method, And A Spectral Purity Filter App 20110024651 - Schimmel; Hendrikus Gijsbertus ;   et al. | 2011-02-03 |
Optical Element, Lithographic Apparatus Including Such An Optical Element, Device Manufacturing Method, And Device Manufactured Thereby App 20110019174 - Soer; Wouter Anthon ;   et al. | 2011-01-27 |
Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing method Grant 7,875,863 - Van Herpen , et al. January 25, 2 | 2011-01-25 |
Lithographic Apparatus, Plasma Source, And Reflecting Method App 20110007292 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2011-01-13 |
Device Constructed And Arranged To Generate Radiation, Lithographic Apparatus, And Device Manufacturing Method App 20110007289 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2011-01-13 |
Radiation system and lithographic apparatus comprising the same Grant 7,863,591 - Van Herpen , et al. January 4, 2 | 2011-01-04 |
Spectral Purity Filter, Lithographic Apparatus, And Method For Manufacturing A Spectral Purity Filter App 20100328639 - Jak; Martin Jacobus Johan ;   et al. | 2010-12-30 |
Molecular Diagnostic System Based On Evanescent Illumination And Fluorescence App 20100320397 - Boamfa; Marius Iosif ;   et al. | 2010-12-23 |
Light Emitting Tufted Carpet App 20100309666 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2010-12-09 |
Assembly comprising a radiation source, a reflector and a contaminant barrier Grant 7,839,482 - Soer , et al. November 23, 2 | 2010-11-23 |
Tufted Textile App 20100271805 - Van Herpen; Maarten Marinus Johannes Wilhelmus | 2010-10-28 |
Light Output Device App 20100265707 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2010-10-21 |
Compartment App 20100265731 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2010-10-21 |
Spectral Filter, Lithographic Apparatus Including Such A Spectral Filter, Device Manufacturing Method, And Device Manufactured Thereby App 20100259744 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2010-10-14 |
Radical cleaning arrangement for a lithographic apparatus Grant 7,812,330 - Banine , et al. October 12, 2 | 2010-10-12 |
Light Emitting Tufted Carpet App 20100254141 - Van Herpen; Maarten Marinus Johannes Wilhelmus | 2010-10-07 |
Light Output Device App 20100244695 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2010-09-30 |
Light Output Device App 20100244734 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2010-09-30 |
Patterning device, method of providing a patterning device, photolithographic apparatus and device manufacturing method Grant 7,771,896 - Soer , et al. August 10, 2 | 2010-08-10 |
Light Output Device App 20100188005 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2010-07-29 |
Self-shading electrodes for debris suppression in an EUV source Grant 7,759,663 - Van Herpen , et al. July 20, 2 | 2010-07-20 |
Light Output Device App 20100176705 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2010-07-15 |
Light Output Device App 20100171437 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2010-07-08 |
Lithographic apparatus and cleaning method therefor Grant 7,750,326 - Van Herpen , et al. July 6, 2 | 2010-07-06 |
Self-cleaning System And Window-glass App 20100163754 - Van Herpen; Maarten Marinus Johannes Wilhelmus | 2010-07-01 |
Spectral Purity Filter For Multi-layer Mirror, Lithographic Apparatus Including Such Multi-layer Mirror, Method For Enlarging The Ratio Of Desired Radiation And Undesired Radiation, And Device Manufacturing Method App 20100149512 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ;   et al. | 2010-06-17 |
Anti-reflection coating for an EUV mask Grant 7,736,820 - Van Herpen , et al. June 15, 2 | 2010-06-15 |
Debris mitigation system and lithographic apparatus Grant 7,737,418 - Van Herpen , et al. June 15, 2 | 2010-06-15 |
Radiation System And Lithographic Apparatus App 20100141909 - Wassink; Arnoud Cornelis ;   et al. | 2010-06-10 |
Device arranged to measure a quantity relating to radiation and lithographic apparatus Grant 7,724,349 - Soer , et al. May 25, 2 | 2010-05-25 |
Light Output Device App 20100110675 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2010-05-06 |
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method Grant 7,706,057 - Van Herpen , et al. April 27, 2 | 2010-04-27 |
Luminescence Sensor App 20100096563 - Ponjee; Marc Wilhelmus Gijsbert ;   et al. | 2010-04-22 |
Light Output Device App 20100096647 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2010-04-22 |
Methods And Systems For Detection With Front Irradiation App 20100096561 - Johnson; Mark Thomas ;   et al. | 2010-04-22 |
Radiation system and lithographic apparatus Grant 7,696,492 - Wassink , et al. April 13, 2 | 2010-04-13 |
Radiation system and lithographic apparatus Grant 7,696,493 - Van Herpen , et al. April 13, 2 | 2010-04-13 |
Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus Grant 7,692,169 - Bakker , et al. April 6, 2 | 2010-04-06 |
Debris prevention system, radiation system, and lithographic apparatus Grant 7,687,788 - Van Herpen , et al. March 30, 2 | 2010-03-30 |
Textile Light Emitting Device App 20100061101 - Van Pieterson; Liesbeth ;   et al. | 2010-03-11 |
Radiation Source, Lithographic Apparatus And Device Manufacturing Method App 20100039632 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ;   et al. | 2010-02-18 |
Spectral Purity Filters for Use in a Lithographic Apparatus App 20100020304 - Soer; Wouter Anthon ;   et al. | 2010-01-28 |
Radiation System and Lithographic Apparatus Comprising the Same App 20090309048 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ;   et al. | 2009-12-17 |
Lithographic apparatus, and device manufacturing method Grant 7,629,594 - Van Herpen , et al. December 8, 2 | 2009-12-08 |
Lithographic apparatus, radiation system, device manufacturing method, and radiation generating method Grant 7,629,593 - Buis , et al. December 8, 2 | 2009-12-08 |
Optical Cavity-enhanced Photo Acoustic Trace Gas Detector With Variable Light Intensity Modulator App 20090288474 - Kalkman; Jeroen ;   et al. | 2009-11-26 |
Lithographic Apparatus App 20090284725 - SOER; Wouter Anthon ;   et al. | 2009-11-19 |
Integrated Biosensing Device Having Photo Detector App 20090279093 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2009-11-12 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby Grant 7,615,767 - Soer , et al. November 10, 2 | 2009-11-10 |
Radiation Source App 20090272917 - Soer; Wouter Anthon ;   et al. | 2009-11-05 |
Lithographic apparatus and cleaning method therefor Grant 7,598,503 - Van Herpen , et al. October 6, 2 | 2009-10-06 |
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus Grant 7,561,247 - Van Herpen , et al. July 14, 2 | 2009-07-14 |
Lithographic Apparatus, and Device Manufacturing Method App 20090173360 - VAN HERPEN; Maarten Marinus Johannes Wilhelmus ;   et al. | 2009-07-09 |
Radiation system and lithographic apparatus comprising the same Grant 7,541,603 - Van Herpen , et al. June 2, 2 | 2009-06-02 |
Lithographic apparatus comprising a cleaning arrangement, cleaning arrangement and method for cleaning a surface to be cleaned Grant 7,518,128 - Van Herpen , et al. April 14, 2 | 2009-04-14 |
Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement Grant 7,504,643 - Freriks , et al. March 17, 2 | 2009-03-17 |
Breath test for total organic carbon App 20090042309 - Van Herpen; Maarten Marinus Johannes Wilhelmus | 2009-02-12 |
Getter and cleaning arrangement for a lithographic apparatus and method for cleaning a surface Grant 7,473,908 - Van Herpen , et al. January 6, 2 | 2009-01-06 |
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method App 20080316595 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2008-12-25 |
Lithographic apparatus and device manufacturing method Grant 7,468,521 - Klunder , et al. December 23, 2 | 2008-12-23 |
Controlling the flow through the collector during cleaning Grant 7,465,943 - Banine , et al. December 16, 2 | 2008-12-16 |
Sensor with Improved Signal-to Noise Ratio and Improved Accuracy App 20080302976 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2008-12-11 |
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method Grant 7,463,413 - Van Herpen , et al. December 9, 2 | 2008-12-09 |
Radical cleaning arrangement for a lithographic apparatus Grant 7,462,850 - Banine , et al. December 9, 2 | 2008-12-09 |
Bio Chip Device with a Sample Compartment and a Light Sensitive Element, Method for the Detection of Fluorescent Particles Within at Least One Sample Compartment of a Bio Chip Device App 20080300146 - Ponjee; Marc Wilhelmus Gijsbert ;   et al. | 2008-12-04 |
Spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby Grant 7,453,645 - Klunder , et al. November 18, 2 | 2008-11-18 |
Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby App 20080277599 - Soer; Wouter Anthon ;   et al. | 2008-11-13 |
Device arranged to measure a quantity relating to radiation and lithographic apparatus App 20080273188 - Soer; Wouter Anthon ;   et al. | 2008-11-06 |
Non-Invasive System and Method for Measuring Skin Hydration of a Subject App 20080275319 - Van Gogh; Antonius Theodorus Martinus ;   et al. | 2008-11-06 |
System for Non-Invasive Measurement of Bloold Glucose Concentration App 20080269580 - Balistreri; Marcello Leonardo Mario ;   et al. | 2008-10-30 |
Luminescence Sensor Comprising at Least Two Wire Grids App 20080217558 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2008-09-11 |
Luminescence Sensor Using Multi-Layer Substrate Structure App 20080197292 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2008-08-21 |
Glucose Sensor App 20080200781 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2008-08-21 |
Method For Recording Data In Holographic Data Storage Systems App 20080198724 - Balistreri; Marcello Leonardo Mario ;   et al. | 2008-08-21 |
Photo-Acoustic Spectrometer Apparatus App 20080196477 - Van Herpen; Maarten Marinus Johannes Wilhelmus | 2008-08-21 |
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus Grant 7,414,700 - Van Herpen , et al. August 19, 2 | 2008-08-19 |
Radiation system and lithographic apparatus Grant 7,397,538 - Box , et al. July 8, 2 | 2008-07-08 |
Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing method App 20080149854 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2008-06-26 |
Radiation system and lithographic apparatus App 20080142741 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2008-06-19 |
Lithographic apparatus including a cleaning device and method for cleaning an optical element Grant 7,372,049 - Van Herpen , et al. May 13, 2 | 2008-05-13 |
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus Grant 7,355,672 - Van Herpen , et al. April 8, 2 | 2008-04-08 |
Radiation system and lithographic apparatus Grant 7,332,731 - Klunder , et al. February 19, 2 | 2008-02-19 |
Getter and cleaning arrangement for a lithographic apparatus and method for cleaning a surface App 20080011967 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2008-01-17 |
Anti-reflection coating for an EUV mask App 20070259275 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2007-11-08 |
Radiation system and lithographic apparatus Grant 7,262,423 - Van Herpen , et al. August 28, 2 | 2007-08-28 |
Radiation system and lithographic apparatus Grant 7,233,010 - Van Herpen , et al. June 19, 2 | 2007-06-19 |
Radiation System And Lithographic Apparatus App 20070125963 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2007-06-07 |
Lithographic apparatus including a cleaning device and method for cleaning an optical element App 20070125964 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2007-06-07 |
Radiation system and lithographic apparatus App 20070115445 - Box; Wilhelmus Josephus ;   et al. | 2007-05-24 |
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby Grant 7,196,343 - Van Herpen , et al. March 27, 2 | 2007-03-27 |
Lithographic apparatus, illumination system and debris trapping system Grant 7,145,132 - Bakker , et al. December 5, 2 | 2006-12-05 |
Lithographic apparatus, illumination system and method for mitigating debris particles Grant 7,145,631 - Van Herpen December 5, 2 | 2006-12-05 |
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method App 20060245058 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2006-11-02 |
Apparatus including a radiation source, a filter system for filtering particles out of radiation emitted by the source, and a processing system for processing the radiation, a lithographic apparatus including such an apparatus, and a method of filtering particles out of radiation emitting and propag Grant 7,106,832 - Klunder , et al. September 12, 2 | 2006-09-12 |
Spectral purity filter, lithographic apparatus including such a spectral purity filter, device manufacturing method, and device manufactured thereby App 20060146413 - Klunder; Derk Jan Wilfred ;   et al. | 2006-07-06 |
Lithographic apparatus, illumination system and method for mitigating debris particles App 20060138361 - Van Herpen; Maarten Marinus Johannes Wilhelmus | 2006-06-29 |
Lithographic Apparatus, Illumination System And Debris Trapping System App 20060138362 - Bakker; Levinus Pieter ;   et al. | 2006-06-29 |
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus App 20060072084 - Van Herpen; Maarten Marinus Johannes Wilhelmus ;   et al. | 2006-04-06 |