Van Herpen; Maarten Marinus Johannes W
Patent Applications and Registrations
Patent applications and USPTO patent grants for Van Herpen; Maarten Marinus Johannes W.The latest application filed is for "spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method".
- Van Herpen; Maarten Marinus Johannes W - Heesch NL
- Van Herpen; Maarten Marinus Johannes W. - Heesch NL
| Patent | Date |
|---|---|
| Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method Grant 7,336,416 - Van Herpen , et al. February 26, 2 | 2008-02-26 |
| Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method App 20060245057 - Van Herpen; Maarten Marinus Johannes W. ; et al. | 2006-11-02 |
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