Van Hanehem; Matthew

Patent Applications and Registrations

Patent applications and USPTO patent grants for Van Hanehem; Matthew.The latest application filed is for "chemical mechanical polishing composition and method of polishing silicon nitride over silicon dioxide and simultaneously inhibiting damage to silicon dioxide".

Company Profile

7.10.6

Van Hanehem; Matthew - Middletown DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Chemical mechanical polishing composition and method of polishing silicon nitride over silicon dioxide and simultaneously inhibiting damage to silicon dioxide Grant 10,954,411 - Penta , et al. March 23, 2	2021-03-23
Chemical Mechanical Polishing Composition And Method Of Polishing Silicon Nitride Over Silicon Dioxide And Simultaneously Inhibiting Damage To Silicon Dioxide App 20200362198 - Penta; Naresh Kumar ; et al.	2020-11-19
Aqueous compositions of low dishing silica particles for polysilicon polishing Grant 10,822,524 - Penta , et al. November 3, 2	2020-11-03
Chemical mechanical polishing compositions and methods having enhanced defect inhibition and selectively polishing silicon nitride over silicon dioxide in an acid environment Grant 10,787,592 - Penta , et al. September 29, 2	2020-09-29
Chemical mechanical polishing compositions and methods for suppressing the removal rate of amorphous silicon Grant 10,626,298 - Penta , et al.	2020-04-21
Aqueous silica slurry and amine carboxylic acid compositions selective for nitride removal in polishing and methods of using them Grant 10,584,265 - Penta , et al.	2020-03-10
Chemical mechanical polishing method for cobalt Grant 10,377,921 - Theivanayagam , et al. A	2019-08-13
Aqueous Compositions Of Low Dishing Silica Particles For Polysilicon Polishing App 20190185714 - Penta; Naresh Kumar ; et al.	2019-06-20
Aqueous silica slurry compositions for use in shallow trench isolation and methods of using them Grant 10,316,218 - Penta , et al.	2019-06-11
Aqueous Silica Slurry And Amine Carboxylic Acid Compositions Selective For Nitride Removal In Polishing And Methods Of Using Them App 20190092972 - Penta; Naresh Kumar ; et al.	2019-03-28
Chemical Mechanical Polishing Method For Cobalt App 20190085206 - Theivanayagam; Murali G. ; et al.	2019-03-21
Aqueous silica slurry compositions for use in shallow trench isolation and methods of using them Grant 10,221,336 - Kozhukh , et al.	2019-03-05
Aqueous Silica Slurry Compositions For Use In Shallow Trench Isolation And Methods Of Using Them App 20190062593 - Penta; Naresh Kumar ; et al.	2019-02-28
Chemical mechanical polishing method for cobalt Grant 10,170,335 - Theivanayagam , et al. J	2019-01-01
Aqueous Silica Slurry Compositions For Use In Shallow Trench Isolation And Methods Of Using Them App 20180362805 - Kozhukh; Julia ; et al.	2018-12-20
Aqueous compositions of low abrasive silica particles Grant 9,783,702 - Guo , et al. October 10, 2	2017-10-10

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