Van Greevenbroek; Hendrikus Robertus Marie

Patent Applications and Registrations

Patent applications and USPTO patent grants for Van Greevenbroek; Hendrikus Robertus Marie.The latest application filed is for "laser beam monitoring system".

Company Profile

1.21.22

Van Greevenbroek; Hendrikus Robertus Marie - Eindhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Laser beam monitoring system Grant 11,366,399 - Van Greevenbroek June 21, 2	2022-06-21
Laser Beam Monitoring System App 20200341386 - VAN GREEVENBROEK; Hendrikus Robertus Marie	2020-10-29
Lithographic apparatus and method Grant 10,222,703 - Mulder , et al.	2019-03-05
Lithographic Apparatus And Method App 20170315450 - MULDER; Heine Melle ; et al.	2017-11-02
Lithographic apparatus and method Grant 9,778,575 - Mulder , et al. October 3, 2	2017-10-03
Method and apparatus for generating radiation Grant 9,442,380 - Badie , et al. September 13, 2	2016-09-13
Lithographic Apparatus And Method App 20160116848 - MULDER; Heine Melle ; et al.	2016-04-28
Lithographic apparatus and method for reducing stray radiation Grant 9,188,881 - Dierichs , et al. November 17, 2	2015-11-17
Lithographic apparatus and a method for determining a polarization property of a projection system using an adjustable polarizer and interferometric sensor Grant 9,170,498 - Van De Kerkhof , et al. October 27, 2	2015-10-27
Method and Apparatus for Generating Radiation App 20150268559 - Badie; Ramin ; et al.	2015-09-24
Lithographic apparatus and method Grant 8,937,706 - Mulder , et al. January 20, 2	2015-01-20
Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensation Grant 8,629,973 - Zimmerman , et al. January 14, 2	2014-01-14
Lithographic Apparatus and a Method for Determining a Polarization Property App 20130176547 - VAN DE KERKHOF; Marcus Adrianus ; et al.	2013-07-11
Lithographic apparatus and method Grant 8,441,611 - Van Greevenbroek May 14, 2	2013-05-14
Methods To Control Euv Exposure Dose And Euv Lithographic Methods And Apparatus Using Such Methods App 20130077073 - VAN SCHOOT; Jan Bernard Plechelmus ; et al.	2013-03-28
Lithographic apparatus and device manufacturing method Grant 8,279,405 - Dierichs , et al. October 2, 2	2012-10-02
Lithographic Apparatus And Method For Reducing Stray Radiation App 20120075610 - Dierichs; Marcel Mathijs Theodore Marie ; et al.	2012-03-29
Illuminator for a lithographic apparatus and method Grant 7,952,685 - Klaassen , et al. May 31, 2	2011-05-31
Lithographic apparatus and device manufacturing method Grant 7,872,731 - Klaassen , et al. January 18, 2	2011-01-18
Lithographic Apparatus and Method for Illumination Uniformity Correction and Uniformity Drift Compensation App 20100302525 - ZIMMERMAN; Richard Carl ; et al.	2010-12-02
Passive reticle tool, a lithographic apparatus and a method of patterning a device in a lithography tool App 20100182582 - Van De Kerkhof; Marcus Adrianus ; et al.	2010-07-22
Lithographic Apparatus And Device Manufacturing Method App 20100141918 - Marie Dierichs; Marcel Mathijs Theodore ; et al.	2010-06-10
Lithographic projection system and projection lens polarization sensor App 20100118288 - Van De Kerkhof; Marcus Adrianus ; et al.	2010-05-13
Lithographic apparatus and device manufacturing method Grant 7,697,116 - Dierichs , et al. April 13, 2	2010-04-13
Lithographic Apparatus, Method for Determining at Least One Polarization Property Thereof, Polarization Analyzer and Polarization Sensor Thereof App 20100045956 - Van De Kerkhof; Marcus Adrianus ; et al.	2010-02-25
Lithographic apparatus and method App 20090135394 - Van Greevenbroek; Hendrikus Robertus Marie	2009-05-28
System and method for uniformity correction Grant 7,525,641 - Zimmerman , et al. April 28, 2	2009-04-28
Lithographic apparatus and device manufacturing method App 20080259300 - Klaassen; Michel Fransois Hubert ; et al.	2008-10-23
Lithographic apparatus and method App 20080239268 - Mulder; Heine Melle ; et al.	2008-10-02
Lithographic apparatus Grant 7,375,799 - Van De Kerkhof , et al. May 20, 2	2008-05-20
Lithographic apparatus and device manufacturing method App 20070115449 - Dierichs; Marcel Mathijs Theodore Maria ; et al.	2007-05-24
Optical element for use in lithography apparatus and method of conditioning radiation beam App 20070058151 - Eurlings; Markus Franciscus Antonius ; et al.	2007-03-15
Lithographic apparatus and a method for determining a polarization property App 20060203221 - Van De Kerkhof; Marcus Adrianus ; et al.	2006-09-14
Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method Grant 7,038,763 - Mulder , et al. May 2, 2	2006-05-02
Lithographic apparatus and device manufacturing method App 20040227922 - Dierichs, Marcel Mathijs Theodore Marie ; et al.	2004-11-18
Method of operating a lithographic apparatus, lithographic apparatus, method of manufacturing a device, and device manufactured thereby Grant 6,710,856 - Van Der Laan , et al. March 23, 2	2004-03-23
Kit of parts for assembling an optical element, method of assembling an optical element, optical element, lithographic apparatus, and device manufacturing method App 20040012764 - Mulder, Heine Melle ; et al.	2004-01-22
Method of operating a lithographic apparatus, lithographic apparatus, method of manufacturing a device, and device manufactured thereby App 20020027648 - Van Der Laan, Hans ; et al.	2002-03-07

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