loadpatents
Patent applications and USPTO patent grants for Van Gogh; James.The latest application filed is for "platform architecture to improve system productivity".
Patent | Date |
---|---|
Platform architecture to improve system productivity Grant 10,559,483 - Gould , et al. Feb | 2020-02-11 |
Platform Architecture To Improve System Productivity App 20180047598 - Gould; Richard H. ;   et al. | 2018-02-15 |
Method and apparatus for ionized plasma deposition Grant 7,407,565 - Wang , et al. August 5, 2 | 2008-08-05 |
Coil and coil support for generating a plasma App 20040118521 - Pancham, Ian A. ;   et al. | 2004-06-24 |
Method and apparatus for ionized plasma deposition Grant 6,627,056 - Wang , et al. September 30, 2 | 2003-09-30 |
Method And Apparatus For Ionized Plasma Deposition App 20030141186 - Wang, Wei ;   et al. | 2003-07-31 |
Use of variable impedance to control coil sputter distribution Grant 6,579,426 - van Gogh , et al. June 17, 2 | 2003-06-17 |
Magnetron for low pressure, full face erosion Grant 6,228,235 - Tepman , et al. May 8, 2 | 2001-05-08 |
Sputter magnetron having two rotation diameters Grant 6,228,236 - Rosenstein , et al. May 8, 2 | 2001-05-08 |
Method for improved chamber bake-out and cool-down Grant 6,193,811 - Sundarrajan , et al. February 27, 2 | 2001-02-27 |
Sputter target for eliminating redeposition on the target sidewall Grant 6,059,945 - Fu , et al. May 9, 2 | 2000-05-09 |
Resistive heating of powered coil to reduce transient heating/start up effects multiple loadlock system Grant 6,023,038 - van Gogh February 8, 2 | 2000-02-08 |
Multiple edge deposition exclusion rings Grant 5,922,133 - Tepman , et al. July 13, 1 | 1999-07-13 |
Target and dark space shield for a physical vapor deposition system Grant 5,658,442 - Van Gogh , et al. August 19, 1 | 1997-08-19 |
Variable cell size collimator Grant 5,650,052 - Edelstein , et al. July 22, 1 | 1997-07-22 |
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