Van Drent; William Peter
Patent Applications and Registrations
Patent applications and USPTO patent grants for Van Drent; William Peter.The latest application filed is for "prolonging optical element lifetime in an euv lithography system".
- Van Drent; William Peter - Best NL
- Van Drent; William Peter - Veldhoven NL
| Patent | Date |
|---|---|
| Prolonging Optical Element Lifetime In An Euv Lithography System App 20220291591 - Ma; Yue ; et al. | 2022-09-15 |
| Prolonging optical element lifetime in an EUV lithography system Grant 11,340,532 - Ma , et al. May 24, 2 | 2022-05-24 |
| Optical diffraction component for suppressing at least one target wavelength by destructive interference Grant 11,194,256 - Feldmann , et al. December 7, 2 | 2021-12-07 |
| Optical Diffraction Component For Suppressing At Least One Target Wavelength By Destructive Interference App 20210318622 - Feldmann; Heiko ; et al. | 2021-10-14 |
| Sensor, lithographic apparatus, and device manufacturing method Grant 11,022,902 - Den Boef , et al. June 1, 2 | 2021-06-01 |
| Prolonging Optical Element Lifetime In An Euv Lithography System App 20210109452 - Ma; Yue ; et al. | 2021-04-15 |
| Sensor, Lithographic Apparatus, and Device Manufacturing Method App 20210072647 - DEN BOEF; Arie Jeffrey ; et al. | 2021-03-11 |
| Optical diffraction component for suppressing at least one target wavelength by destructive interference Grant 10,852,640 - Feldmann , et al. December 1, 2 | 2020-12-01 |
| Optical Diffraction Component For Suppressing At Least One Target Wavelength By Destructive Interference App 20200225586 - Feldmann; Heiko ; et al. | 2020-07-16 |
| Lithographic apparatus Grant 9,696,638 - Van Der Pasch , et al. July 4, 2 | 2017-07-04 |
| Lithographic Apparatus App 20160109812 - VAN DER PASCH; Engelbertus Antonius Fransiscus ; et al. | 2016-04-21 |
| Lithographic apparatus Grant 9,229,340 - Van Der Pasch , et al. January 5, 2 | 2016-01-05 |
| Lithographic Apparatus App 20140022527 - VAN DER PASCH; Engelbertus Antonius Fransiscus ; et al. | 2014-01-23 |
| Lithographic apparatus and device manufacturing method Grant 8,619,235 - Van Drent December 31, 2 | 2013-12-31 |
| Lithographic apparatus Grant 8,570,492 - Van Der Pasch , et al. October 29, 2 | 2013-10-29 |
| Lithographic Apparatus App 20120242969 - VAN DER PASCH; Engelbertus Antonius Fransiscus ; et al. | 2012-09-27 |
| Lithographic Apparatus And Device Manufacturing Method App 20110222044 - VAN DRENT; William Peter | 2011-09-15 |
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