loadpatents
Patent applications and USPTO patent grants for Van Dijsseldonk; Antonius Johannes Josephus.The latest application filed is for "lithographic apparatus, spectral purity filter and device manufacturing method".
Patent | Date |
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Lithographic apparatus, spectral purity filter and device manufacturing method Grant 10,001,709 - Banine , et al. June 19, 2 | 2018-06-19 |
Lithographic method and apparatus Grant 9,958,787 - Loopstra , et al. May 1, 2 | 2018-05-01 |
Radiation source Grant 9,835,950 - Eurlings , et al. December 5, 2 | 2017-12-05 |
Lithographic Apparatus, Spectral Purity Filter and Device Manufacturing Method App 20170160646 - BANINE; Vadim Yevgenyevich ;   et al. | 2017-06-08 |
EUV radiation system and lithographic apparatus Grant 9,523,921 - Van Dijsseldonk , et al. December 20, 2 | 2016-12-20 |
Radiation Source App 20160334711 - EURLINGS; Markus Franciscus Antonius ;   et al. | 2016-11-17 |
Lithographic apparatus and device manufacturing method Grant 9,341,960 - Van Dijsseldonk , et al. May 17, 2 | 2016-05-17 |
Lithographic Method and Apparatus App 20150253679 - Loopstra; Erik Roelof ;   et al. | 2015-09-10 |
Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter Grant 9,097,982 - Banine , et al. August 4, 2 | 2015-08-04 |
Lithographic apparatus and device manufacturing method Grant 8,908,144 - Groeneveld , et al. December 9, 2 | 2014-12-09 |
Lithographic Apparatus And Device Manufacturing Method App 20140285782 - Van Dijsseldonk; Antonius Johannes Josephus ;   et al. | 2014-09-25 |
Lithographic apparatus and method Grant 8,830,444 - Van Schoot , et al. September 9, 2 | 2014-09-09 |
Lithographic Apparatus, Spectral Purity Filter and Device Manufacturing Method App 20140085619 - Banine; Vadim Yevgenyevich ;   et al. | 2014-03-27 |
Lithographic projection apparatus and method of compensating perturbation factors Grant 8,570,489 - Van Schoot , et al. October 29, 2 | 2013-10-29 |
Euv Radiation System And Lithographic Apparatus App 20120147349 - Van Dijsseldonk; Antonius Johannes Josephus ;   et al. | 2012-06-14 |
Lithographic Apparatus and Method App 20120147346 - VAN SCHOOT; Jan Bernard Plechelmus ;   et al. | 2012-06-14 |
Radiation System, Radiation Collector, Radiation Beam Conditioning System, Spectral Purity Filter For Radiation System And Method For Forming A Spectral Purity Filter App 20110223543 - Banine; Vadim Yevgenyevich ;   et al. | 2011-09-15 |
Lithographic Projection Apparatus And Method Of Compensating Perturbation Factors App 20100321657 - VAN SCHOOT; Jan Bernard Plechelmus ;   et al. | 2010-12-23 |
Optical apparatus Grant 7,817,246 - Mickan , et al. October 19, 2 | 2010-10-19 |
Device manufacturing method and apparatus with applied electric field Grant 7,463,336 - Mickan , et al. December 9, 2 | 2008-12-09 |
Lithographic apparatus Grant 7,423,721 - Van Dijsseldonk , et al. September 9, 2 | 2008-09-09 |
Lithographic apparatus and device manufacturing method App 20080074629 - Groeneveld; Rogier Herman Mathijs ;   et al. | 2008-03-27 |
Optical apparatus App 20070296943 - Mickan; Uwe ;   et al. | 2007-12-27 |
Test pattern, inspection method, and device manufacturing method Grant 7,312,860 - Den Boef , et al. December 25, 2 | 2007-12-25 |
Lithographic apparatus and device manufacturing method Grant 7,307,262 - Van Dijsseldonk , et al. December 11, 2 | 2007-12-11 |
Lithographic apparatus and device manufacturing method Grant 7,253,880 - Loopstra , et al. August 7, 2 | 2007-08-07 |
Test pattern, inspection method, and device manufacturing method App 20070052948 - Den Boef; Arie Jeffrey ;   et al. | 2007-03-08 |
Test pattern, inspection method, and device manufacturing method Grant 7,151,594 - Den Boef , et al. December 19, 2 | 2006-12-19 |
Lithographic apparatus and device manufacturing method Grant 7,148,952 - Eurlings , et al. December 12, 2 | 2006-12-12 |
Lithographic apparatus, device manufacturing method and variable attenuator Grant 7,145,640 - Voorma , et al. December 5, 2 | 2006-12-05 |
Lithographic apparatus with autofocus system Grant 7,136,149 - Mickan , et al. November 14, 2 | 2006-11-14 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,116,399 - Box , et al. October 3, 2 | 2006-10-03 |
Lithographic apparatus and device manufacturing method App 20060139598 - Van Dijsseldonk; Antonius Johannes Josephus ;   et al. | 2006-06-29 |
Lithographic apparatus with autofocus system App 20060132743 - Mickan; Uwe ;   et al. | 2006-06-22 |
Lithographic apparatus App 20060126041 - Van Dijsseldonk; Antonius Johannes Josephus ;   et al. | 2006-06-15 |
Lithographic apparatus and device manufacturing method App 20060109442 - Loopstra; Erik Roelof ;   et al. | 2006-05-25 |
Lithographic apparatus and device manufacturing method Grant 7,023,524 - Van Dijsseldonk , et al. April 4, 2 | 2006-04-04 |
Lithographic apparatus and device manufacturing method Grant 6,987,275 - Bakker , et al. January 17, 2 | 2006-01-17 |
Lithographic apparatus device manufacturing method and device manufactured thereby Grant 6,967,756 - Van Dijsseldonk , et al. November 22, 2 | 2005-11-22 |
Device manufacturing method App 20050231704 - Mickan, Uwe ;   et al. | 2005-10-20 |
Lithographic apparatus, device manufacturing method and variable attenuator App 20050206869 - Voorma, Harm-Jan ;   et al. | 2005-09-22 |
Lithographic apparatus and a measurement system Grant 6,940,587 - Van Der Laan , et al. September 6, 2 | 2005-09-06 |
Mask for use in lithography, method of making a mask, lithographic apparatus, and device manufacturing method Grant 6,927,004 - Eurlings , et al. August 9, 2 | 2005-08-09 |
Lithographic apparatus and device manufacturing method App 20050134818 - Van Dijsseldonk, Antonius Johannes Josephus ;   et al. | 2005-06-23 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050018154 - Box, Wilhelmus Josephus ;   et al. | 2005-01-27 |
Lithographic apparatus device manufacturing method and device manufactured thereby App 20040202898 - Van Dijsseldonk, Antonius Johannes Josephus ;   et al. | 2004-10-14 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 6,765,712 - Van Dijsseldonk , et al. July 20, 2 | 2004-07-20 |
Lithographic apparatus and a measurement system App 20040114119 - Van Der Laan, Hans ;   et al. | 2004-06-17 |
Test pattern, inspection method, and device manufacturing method App 20040114132 - Den Boef, Arie Jeffrey ;   et al. | 2004-06-17 |
Lithographic apparatus and device manufacturing method Grant 6,750,949 - Loopstra , et al. June 15, 2 | 2004-06-15 |
Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program product Grant 6,737,662 - Mulder , et al. May 18, 2 | 2004-05-18 |
Lithographic apparatus and device manufacturing method App 20040013226 - Bakker, Levinus Pieter ;   et al. | 2004-01-22 |
Mask for use in lithography, method of making a mask, lithographic apparatus, and device manufacturing method App 20030180632 - Eurlings, Markus Franciscus Antonius ;   et al. | 2003-09-25 |
Lithographic projection apparatus and device manufacturing method Grant 6,597,431 - Benschop , et al. July 22, 2 | 2003-07-22 |
Lithographic apparatus and device manufacturing method App 20030058422 - Loopstra, Erik Roelof ;   et al. | 2003-03-27 |
Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program product App 20030038225 - Mulder, Heine Melle ;   et al. | 2003-02-27 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20020011573 - Van Dijsseldonk, Antonius Johannes Josephus ;   et al. | 2002-01-31 |
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