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Wavelength Selection Module, Illumination System And Metrology System
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Method and apparatus for measuring a parameter of interest using image plane detection techniques
Grant 10,983,445 - Pandey , et al. April 20, 2 | 2021-04-20 |
Method of determining a value of a parameter of interest, method of cleaning a signal containing information about a parameter of interest, device manufacturing method
Grant 10,795,269 - Zhou , et al. October 6, 2 | 2020-10-06 |
Focus control arrangement and method
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Method of inspecting a substrate, metrology apparatus, and lithographic system
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Measurement system, lithographic system, and method of measuring a target
Grant 10,437,159 - Tukker , et al. O | 2019-10-08 |
Metrology method and apparatus, computer program and lithographic system
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Method And Apparatus For Measuring A Parameter Of Interest Using Image Plane Detection Techniques
App 20190250094 - PANDEY; Nitesh ; et al. | 2019-08-15 |
Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method
Grant 10,338,401 - Van Der Zouw , et al. | 2019-07-02 |
Radiation conditioning system, illumination system and metrology apparatus, device manufacturing method
Grant 10,303,064 - Goorden , et al. | 2019-05-28 |
Metrology Method and Apparatus, Computer Program and Lithographic System
App 20190146356 - Pandey; Nitesh ; et al. | 2019-05-16 |
Method Of Determining A Value Of A Parameter Of Interest, Method Of Cleaning A Signal Containing Information About A Parameter Of Interest, Device Manufacturing Method
App 20190129316 - ZHOU; Zili ; et al. | 2019-05-02 |
Focus monitoring arrangement and inspection apparatus including such an arrangement
Grant 10,215,954 - Van Der Zouw Feb | 2019-02-26 |
Metrology method and apparatus, computer program and lithographic system
Grant 10,191,391 - Pandey , et al. Ja | 2019-01-29 |
Inspection apparatus and device manufacturing method
Grant 10,126,237 - Van Der Zouw November 13, 2 | 2018-11-13 |
Measurement System, Lithographic System, and Method Of Measuring a Target
App 20180164699 - TUKKER; Teunis Willem ; et al. | 2018-06-14 |
Method of Inspecting a Substrate, Metrology Apparatus, and Lithographic System
App 20180107124 - TUKKER; Teunis Willem ; et al. | 2018-04-19 |
Illumination System, Inspection Apparatus Including Such an Illumination System, Inspection Method and Manufacturing Method
App 20180088347 - Van Der Zouw; Gerbrand ; et al. | 2018-03-29 |
Radiation Conditioning System, Illumination System And Metrology Apparatus, Device Manufacturing Method
App 20170329232 - GOORDEN; Sebastianus Adrianus ; et al. | 2017-11-16 |
Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method
Grant 9,753,296 - Van Der Zouw , et al. September 5, 2 | 2017-09-05 |
Focus Monitoring Arrangement and Inspection Apparatus Including Such an Arrangement
App 20170176714 - VAN DER ZOUW; Gerbrand | 2017-06-22 |
Focus Control Arrangement And Method
App 20170176328 - JAK; Martin Jacobus Johan ; et al. | 2017-06-22 |
Metrology Method and Apparatus, Computer Program and Lithographic System
App 20170097575 - PANDEY; Nitesh ; et al. | 2017-04-06 |
Photon source, metrology apparatus, lithographic system and device manufacturing method
Grant 9,357,626 - Pellemans , et al. May 31, 2 | 2016-05-31 |
Inspection Apparatus And Device Manufacturing Method
App 20160091422 - Van Der Zouw; Gerbrand | 2016-03-31 |
Illumination System, Inspection Apparatus Including Such an Illumination System, Inspection Method and Manufacturing Method
App 20160025992 - VAN DER ZOUW; Gerbrand ; et al. | 2016-01-28 |
Photon Source, Metrology Apparatus, Lithographic System and Device Manufacturing Method
App 20150108373 - PELLEMANS; Henricus Petrus Maria ; et al. | 2015-04-23 |
Photon source, metrology apparatus, lithographic system and device manufacturing method
Grant 8,921,814 - Pellemans , et al. December 30, 2 | 2014-12-30 |
Photon Source, Metrology Apparatus, Lithographic System and Device Manufacturing Method
App 20130329204 - PELLEMANS; Henricus Petrus Maria ; et al. | 2013-12-12 |
Calibration method and apparatus
Grant 8,553,218 - Tinnemans , et al. October 8, 2 | 2013-10-08 |
Lithographic apparatus, stage apparatus and device manufacturing method
Grant 8,384,881 - Ottens , et al. February 26, 2 | 2013-02-26 |
Calibration Method and Apparatus
App 20110178785 - TINNEMANS; Patricius Aloysius Jacobus ; et al. | 2011-07-21 |
Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
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Lithographic Apparatus, Stage Apparatus And Device Manufacturing Method
App 20090086180 - OTTENS; Joost Jeroen ; et al. | 2009-04-02 |
Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
Grant 7,409,302 - Kok , et al. August 5, 2 | 2008-08-05 |
Lithographic device and method for wafer alignment with reduced tilt sensitivity
Grant 6,891,598 - Van Der Zouw May 10, 2 | 2005-05-10 |
Lithographic device and method for wafer alignment with reduced tilt sensitivity
App 20040179181 - Van Der Zouw, Gerbrand | 2004-09-16 |
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