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Device manufacturing method, lithographic apparatus and device manufactured thereby
Grant 7,630,060 - Ottens , et al. December 8, 2 | 2009-12-08 |
Lithographic apparatus and device manufacturing method
Grant 7,505,116 - Van Der Werf , et al. March 17, 2 | 2009-03-17 |
Holographic mask for lithographic apparatus and device manufacturing method
Grant 7,499,149 - Hendriks , et al. March 3, 2 | 2009-03-03 |
Device manufacturing method, device manufactured thereby and a mask for use in the method
Grant 7,492,443 - Van Der Werf , et al. February 17, 2 | 2009-02-17 |
Optical Read-out
App 20090041077 - Andersen; Ole Klembt ; et al. | 2009-02-12 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 7,459,690 - Van Der Werf , et al. December 2, 2 | 2008-12-02 |
Apparatus and method for inspecting a patterned part of a sample
Grant 7,453,577 - Van Der Werf , et al. November 18, 2 | 2008-11-18 |
Device manufacturing method, lithographic apparatus and device manufactured thereby
App 20080212053 - Ottens; Joost Jeroen ; et al. | 2008-09-04 |
Lithographic apparatus, device manufacturing method and radiation system
Grant 7,309,869 - Kurt , et al. December 18, 2 | 2007-12-18 |
Method of detecting mask defects, a computer program and reference substrate
Grant 7,307,712 - Van Der Werf , et al. December 11, 2 | 2007-12-11 |
Alignment system and lithographic apparatus equipped with such an alignment system
Grant 7,283,236 - Presura , et al. October 16, 2 | 2007-10-16 |
Method of measuring overlay
Grant 7,277,185 - Monshouwer , et al. October 2, 2 | 2007-10-02 |
Optical pick-up unit
App 20070115782 - Andersen; Ole Klembt ; et al. | 2007-05-24 |
Alignment of Holographic Images on Detector
App 20070103753 - Liedenbaum; Coen Theodorus Hubertus ; et al. | 2007-05-10 |
Lithographic apparatus, device manufacturing method and radiation system
Grant 7,105,837 - Kurt , et al. September 12, 2 | 2006-09-12 |
Method of measuring alignment of a substrate with respect to a reference alignment mark
Grant 7,095,499 - Monshouwer , et al. August 22, 2 | 2006-08-22 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 7,075,620 - Van Der Werf , et al. July 11, 2 | 2006-07-11 |
Inspection apparatus, sample and inspection method
App 20060126074 - Van Der Werf; Jan Evert ; et al. | 2006-06-15 |
Lithographic apparatus and device manufacturing method
Grant 7,012,673 - Kolesnychenko , et al. March 14, 2 | 2006-03-14 |
Alignment system and lithographic apparatus equipped with such an alignment system
App 20060001879 - Presura; Cristian ; et al. | 2006-01-05 |
Lithographic apparatus and device manufacturing method
App 20050280795 - Van Der Werf, Jan Evert ; et al. | 2005-12-22 |
Lithographic apparatus, device manufacturing method and radiation system
App 20050253091 - Kurt, Ralph ; et al. | 2005-11-17 |
Lithographic apparatus and device manufacturing method
Grant 6,963,391 - Van Der Werf , et al. November 8, 2 | 2005-11-08 |
Method of measuring alignment of a substrate with respect to a reference alignment mark
App 20050231698 - Monshouwer, Rene ; et al. | 2005-10-20 |
Method of measuring overlay
App 20050231732 - Monshouwer, Rene ; et al. | 2005-10-20 |
Method of measuring alignment of a substrate with respect to a reference alignment mark
Grant 6,937,334 - Monshouwer , et al. August 30, 2 | 2005-08-30 |
Method of measuring overlay
Grant 6,937,344 - Monshouwer , et al. August 30, 2 | 2005-08-30 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 6,888,151 - Kroon , et al. May 3, 2 | 2005-05-03 |
Device manufacturing method, device manufactured thereby and a mask for use in the method
Grant 6,879,374 - Van Der Werf , et al. April 12, 2 | 2005-04-12 |
Lithographic apparatus, device manufacturing method, and mask
App 20050019675 - Hendriks, Bernardus Hendrikus Wilhelmus ; et al. | 2005-01-27 |
Lithographic apparatus and device manufacturing method
App 20050002004 - Kolesnychenko, Aleksey Yurievich ; et al. | 2005-01-06 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
App 20040211922 - Kroon, Mark ; et al. | 2004-10-28 |
Lithographic apparatus and device manufacturing method
App 20040189966 - Van Der Werf, Jan Evert ; et al. | 2004-09-30 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 6,747,282 - Kroon , et al. June 8, 2 | 2004-06-08 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
App 20030001107 - Kroon, Mark ; et al. | 2003-01-02 |
Device manufacturing method, device manufactured thereby and a mask for use in the method
App 20030003383 - Van Der Werf, Jan Evert ; et al. | 2003-01-02 |
Method of measuring overlay
App 20020080364 - Monshouwer, Rene ; et al. | 2002-06-27 |
Method of measuring alignment of a substrate with respect to a reference alignment mark
App 20020080365 - Monshouwer, Rene ; et al. | 2002-06-27 |
Arrangement including a gas and/or vapor discharge lamp
Grant 4,051,407 - van der Werf , et al. September 27, 1 | 1977-09-27 |
Gas-and/or vapor discharge lamp
Grant 4,004,171 - Heuvelmans , et al. January 18, 1 | 1977-01-18 |
Device provided with a gas and/or vapor discharge tube
Grant 4,001,633 - van Tongeren , et al. January 4, 1 | 1977-01-04 |
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