Van Der Schoot; Harmen Klaas

Patent Applications and Registrations

Patent applications and USPTO patent grants for Van Der Schoot; Harmen Klaas.The latest application filed is for "lithographic apparatus".

Company Profile

3.43.38

Van Der Schoot; Harmen Klaas - Haaren NL
Van Der Schoot; Harmen Klaas - Vught NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Lithographic apparatus Grant 10,747,127 - Van Der Meulen , et al. A	2020-08-18
Graphene spectral purity filter Grant 10,481,510 - Yakunin , et al. Nov	2019-11-19
Lithographic Apparatus App 20190227445 - VAN DER MEULEN; Frits ; et al.	2019-07-25
Pellicle For Reticle And Multilayer Mirror App 20180259846 - YAKUNIN; Andrei Mikhailovich ; et al.	2018-09-13
Sensor system, substrate handling system and lithographic apparatus Grant 10,007,197 - Lof , et al. June 26, 2	2018-06-26
Pellicle For Reticle And Multilayer Mirror App 20170017150 - YAKUNIN; Andrei Mikhailovich ; et al.	2017-01-19
Sensor System, Substrate Handling System And Lithographic Apparatus App 20160370716 - LOF; Joeri ; et al.	2016-12-22
Lithographic apparatus and device manufacturing method Grant 9,494,869 - Butler , et al. November 15, 2	2016-11-15
Pellicle for reticle and multilayer mirror Grant 9,482,960 - Yakunin , et al. November 1, 2	2016-11-01
Lithographic apparatus and method Grant 9,395,630 - Yakunin , et al. July 19, 2	2016-07-19
Lithographic Apparatus And Device Manufacturing Method App 20140340666 - Butler; Hans ; et al.	2014-11-20
Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus Grant 8,781,775 - Butler , et al. July 15, 2	2014-07-15
Lithographic Apparatus, Method Of Setting Up A Lithographic Apparatus And Device Manufacturing Method App 20140192337 - Jan Bleeker; Arno ; et al.	2014-07-10
Lithographic Apparatus, Programmable Patterning Device And Lithographic Method App 20140160452 - De Jager; Pieter Willem Herman ; et al.	2014-06-12
Lithographic Apparatus And Method App 20130088699 - Yakunin; Andrei Mikhailovich ; et al.	2013-04-11
Lithographic apparatus and device manufacturing method utilizing a substrate handler Grant 8,411,252 - Jacobs , et al. April 2, 2	2013-04-02
Lithographic apparatus and device manufacturing method for clamping a patterning device Grant 8,264,670 - Loopstra , et al. September 11, 2	2012-09-11
Substrate handler, lithographic apparatus and device manufacturing method Grant 8,174,680 - Van Der Schoot , et al. May 8, 2	2012-05-08
Lithographic Apparatus And Method For Correcting A Position Of A Stage Of A Lithographic Apparatus App 20110208459 - Butler; Hans ; et al.	2011-08-25
Lithographic apparatus and device manufacturing method Grant 7,760,324 - Benschop , et al. July 20, 2	2010-07-20
Lithographic Apparatus And Device Manufacturing Method App 20100165319 - Jacobs; Hernes ; et al.	2010-07-01
Lithographic Apparatus and Device Manufacturing Method Utilizing a Substrate Handler App 20100085553 - Jacobs; Hernes ; et al.	2010-04-08
Apparatus configured to position a workpiece Grant 7,679,720 - Dansberg , et al. March 16, 2	2010-03-16
Lithographic apparatus and stage apparatus Grant 7,667,822 - Jacobs , et al. February 23, 2	2010-02-23
Lithographic apparatus and device manufacturing method utilizing a substrate handler Grant 7,656,506 - Jacobs , et al. February 2, 2	2010-02-02
Substrate Handler, Lithographic Apparatus and Device Manufacturing Method App 20090284730 - VAN DER SCHOOT; Harmen Klaas ; et al.	2009-11-19
Optimized correction of wafer thermal deformations in a lithographic process Grant 7,595,496 - Ottens , et al. September 29, 2	2009-09-29
Substrate handler, lithographic apparatus and device manufacturing method Grant 7,576,835 - Van Der Schoot , et al. August 18, 2	2009-08-18
Lithographic apparatus and device manufacturing method utilizing a substrate handler Grant 7,538,857 - Jacobs , et al. May 26, 2	2009-05-26
Lithographic apparatus and device manufacturing method Grant 7,492,440 - Zaal , et al. February 17, 2	2009-02-17
Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method Grant 7,483,120 - Luttikhuis , et al. January 27, 2	2009-01-27
Lithographic apparatus, device manufacturing method, and substrate table Grant 7,440,081 - Gui , et al. October 21, 2	2008-10-21
Lithographic apparatus and device manufacturing method utilizing a large area FPD chuck equipped with encoders an encoder scale calibration method Grant 7,408,617 - Van Der Pasch , et al. August 5, 2	2008-08-05
Apparatus configured to position a workpiece App 20080174750 - Dansberg; Michel Pieter ; et al.	2008-07-24
Lithographic apparatus and device manufacturing method Grant 7,359,032 - Dansberg , et al. April 15, 2	2008-04-15
Lithographic apparatus and device manufacturing method Grant 7,352,438 - Luttikhuis , et al. April 1, 2	2008-04-01
Lithographic apparatus and device manufacturing method App 20080073602 - Jacobs; Hernes ; et al.	2008-03-27
Positioning device having two object holders Grant RE40,043 - Kwan , et al. February 5, 2	2008-02-05
Lithographic apparatus and device manufacturing method Grant 7,310,132 - Van Der Schoot , et al. December 18, 2	2007-12-18
Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method App 20070263197 - Luttikhuis; Bernardus Antonius Johannes ; et al.	2007-11-15
Lithographic apparatus and device manufacturing method utilizing substrate stage compensating Grant 7,292,317 - Cox , et al. November 6, 2	2007-11-06
Lithographic apparatus and device manufacturing method App 20070216881 - Van Der Schoot; Harmen Klaas ; et al.	2007-09-20
Lithographic apparatus and device manufacturing method App 20070216882 - Benschop; Jozef Petrus Henricus ; et al.	2007-09-20
Lithographic apparatus and device manufacturing method Grant 7,256,867 - Luttikhuis , et al. August 14, 2	2007-08-14
Lithographic apparatus and device manufacturing method Grant 7,256,866 - Cox , et al. August 14, 2	2007-08-14
Optimized correction of wafer thermal deformations in a lithographic process Grant 7,250,237 - Ottens , et al. July 31, 2	2007-07-31
Lithographic apparatus and device manufacturing method Grant 7,245,047 - Vreugdewater , et al. July 17, 2	2007-07-17
Movable carriage for a lithographic apparatus and device manufacturing method Grant 7,230,254 - Terken , et al. June 12, 2	2007-06-12
Substrate handler, lithographic apparatus and device manufacturing method App 20070008512 - Van Der Schoot; Harmen Klaas ; et al.	2007-01-11
Lithographic apparatus and device manufacturing method utilizing a large area FPD chuck equipped with encoders an encoder scale calibration method App 20060290914 - Van Der Pasch; Engelbertus Antonius Fransiscus ; et al.	2006-12-28
Lithographic apparatus and device manufacturing method utilizing substrate stage compensating App 20060279716 - Cox; Henrikus Herman Marie ; et al.	2006-12-14
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method Grant 7,088,428 - Hol , et al. August 8, 2	2006-08-08
Lithographic apparatus and device manufacturing method utilizing a substrate handler App 20060158634 - Jacobs; Hernes ; et al.	2006-07-20
Lithographic apparatus and device manufacturing method utilizing a substrate handler App 20060139616 - Jacobs; Hernes ; et al.	2006-06-29
Lithographic apparatus and device manufacturing method App 20060132734 - Luttikhuis; Bernardus Antonius Johannes ; et al.	2006-06-22
Substrate carrier and method for making a substrate carrier Grant 7,064,808 - Gilissen , et al. June 20, 2	2006-06-20
Lithographic apparatus, device manufacturing method, and substrate table App 20060098176 - Gui; Cheng-Qun ; et al.	2006-05-11
Lithographic apparatus and device manufacturing method App 20060077364 - Cox; Henrikus Herman Marie ; et al.	2006-04-13
Lithographic apparatus and device manufacturing method Grant 7,012,264 - Terken , et al. March 14, 2	2006-03-14
Lithographic apparatus and device manufacturing method App 20050269525 - Terken, Martinus Arnoldus Henricus ; et al.	2005-12-08
Lithographic apparatus and device manufacturing method Grant 6,970,230 - Vosters , et al. November 29, 2	2005-11-29
Lithographic apparatus and motor for use in the apparatus Grant 6,943,464 - Hol , et al. September 13, 2	2005-09-13
Lithographic apparatus and device manufacturing method App 20050151945 - Van Der Schoot, Harmen Klaas ; et al.	2005-07-14
Optimized correction of wafer thermal deformations in a lithographic process App 20050136346 - Ottens, Joost Jeroen ; et al.	2005-06-23
Lithographic apparatus and device manufacturing method App 20050083496 - Dansberg, Michel Pieter ; et al.	2005-04-21
Lithographic apparatus and device manufacturing method Grant 6,879,377 - Jacobs , et al. April 12, 2	2005-04-12
Lithographic apparatus and device manufacturing method App 20040263000 - Vreugdewater, Patricia ; et al.	2004-12-30
Lithographic apparatus and device manufacturing method Grant 6,815,699 - Jacobs , et al. November 9, 2	2004-11-09
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method App 20040218167 - Johan Hol, Sven Antoin ; et al.	2004-11-04
Lithographic apparatus and motor for use in the apparatus Grant 6,717,296 - Hol , et al. April 6, 2	2004-04-06
Lithographic apparatus and device manufacturing method App 20040061844 - Vosters, Petrus Matthijs Henricus ; et al.	2004-04-01
Lithographic apparatus and device manufacturing method App 20030137643 - Jacobs, Hernes ; et al.	2003-07-24
Lithographic apparatus and device manufacturing method App 20030132400 - Jacobs, Hernes ; et al.	2003-07-17
Lithographic apparatus and motor for use in the apparatus App 20030052548 - Hol, Sven Antoin Johan ; et al.	2003-03-20
Positioning device and lithographic projection apparatus comprising such a device Grant 6,337,484 - Loopstra , et al. January 8, 2	2002-01-08