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name:-0.010165929794312
name:-0.0034918785095215
VAN DER SANDEN; Stefan Cornelis Theodorus Patent Filings

VAN DER SANDEN; Stefan Cornelis Theodorus

Patent Applications and Registrations

Patent applications and USPTO patent grants for VAN DER SANDEN; Stefan Cornelis Theodorus.The latest application filed is for "methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus".

Company Profile
3.10.13
  • VAN DER SANDEN; Stefan Cornelis Theodorus - Nijmegen NL
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Methods Of Determining Corrections For A Patterning Process, Device Manufacturing Method, Control System For A Lithographic Apparatus And Lithographic Apparatus
App 20220229373 - KOU; Weitian ;   et al.
2022-07-21
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
Grant 11,327,407 - Kou , et al. May 10, 2
2022-05-10
Lithographic Method And Lithographic Apparatus
App 20220011681 - CEKLI; Hakki Ergun ;   et al.
2022-01-13
Lithographic method and lithographic apparatus
Grant 11,156,923 - Cekli , et al. October 26, 2
2021-10-26
Method and apparatus for design of a metrology target
Grant 11,003,099 - Van Der Schaar , et al. May 11, 2
2021-05-11
Methods Of Determining Corrections For A Patterning Process, Device Manufacturing Method, Control System For A Lithographic Apparatus And Lithographic Apparatus
App 20210080836 - KOU; Weitian ;   et al.
2021-03-18
Methods of determining corrections for a patterning process
Grant 10,877,381 - Kou , et al. December 29, 2
2020-12-29
Method and Apparatus for Design of a Metrology Target
App 20200033741 - Van Der Schaar; Maurits ;   et al.
2020-01-30
Methods Of Determining Corrections For A Patterning Process
App 20200019067 - KOU; Weitian ;   et al.
2020-01-16
Method and apparatus for design of a metrology target
Grant 10,437,163 - Van Der Schaar , et al. O
2019-10-08
Lithographic Method And Lithographic Apparatus
App 20180292761 - CEKLI; Hakki Ergun ;   et al.
2018-10-11
Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product
Grant 10,025,193 - Cekli , et al. July 17, 2
2018-07-17
Method and Apparatus for Design of a Metrology Target
App 20180017881 - VAN DER SCHAAR; Maurits ;   et al.
2018-01-18
Deformation pattern recognition method, pattern transferring method, processing device monitoring method, and lithographic apparatus
Grant 9,753,377 - Cekli , et al. September 5, 2
2017-09-05
Lithographic Apparatus, Device Manufacturing Method And Associated Data Processing Apparatus And Computer Program Product
App 20160334712 - CEKLI; Hakki Ergun ;   et al.
2016-11-17
Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods
Grant 9,291,916 - Van Der Sanden , et al. March 22, 2
2016-03-22
Deformation Pattern Recognition Method, Pattern Transferring Method, Processing Device Monitoring Method, And Lithographic Apparatus
App 20150205213 - Cekli; Hakki Ergun ;   et al.
2015-07-23
Method of Applying a Pattern to a Substrate, Device Manufacturing Method and Lithographic Apparatus for Use in Such Methods
App 20150153656 - VAN DER SANDEN; Stefan Cornelis Theodorus ;   et al.
2015-06-04
Method of applying a pattern to a substrate, device manufacturing method and lithographic apparatus for use in such methods
Grant 8,976,355 - Van Der Sanden , et al. March 10, 2
2015-03-10
Method of Applying a Pattern to a Substrate, Device Manufacturing Method and Lithographic Apparatus for Use in Such Methods
App 20130230797 - VAN DER SANDEN; Stefan Cornelis Theodorus ;   et al.
2013-09-05
Method Of Calculating Model Parameters Of A Substrate, A Lithographic Apparatus And An Apparatus For Controlling Lithographic Processing By A Lithographic Apparatus
App 20120218533 - LYULINA; Irina ;   et al.
2012-08-30

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