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Manufacturing A Reflective Diffraction Grating App 20220221629 - NIENHUYS; Han-Kwang ;   et al. | 2022-07-14 |
Reflector Manufacturing Method And Associated Reflector App 20220134693 - ROOBOL; Sander Bas ;   et al. | 2022-05-05 |
Wavefront Sensor And Associated Metrology Apparatus App 20220099498 - VAN DER POST; Sietse Thijmen ;   et al. | 2022-03-31 |
Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing method Grant 11,243,470 - Kumar , et al. February 8, 2 | 2022-02-08 |
Optical systems, metrology apparatus and associated method Grant 10,725,381 - Van Der Post , et al. | 2020-07-28 |
Method of determining a property of a structure, inspection apparatus and device manufacturing method Grant 10,712,673 - Van Der Post , et al. | 2020-07-14 |
Method and apparatus for determining alignment properties of a beam of radiation Grant 10,613,448 - Van Der Post | 2020-04-07 |
Method and apparatus for inspection and metrology Grant 10,578,979 - Van Der Post , et al. | 2020-03-03 |
Method Of Determining A Property Of A Structure, Inspection Apparatus And Device Manufacturing Method App 20190361360 - VAN DER POST; Sietse Thijmen ;   et al. | 2019-11-28 |
Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus Grant 10488765 - | 2019-11-26 |
Illumination source for an inspection apparatus, inspection apparatus and inspection method Grant 10,451,559 - Van Voorst , et al. Oc | 2019-10-22 |
Method And Apparatus For Inspection And Metrology App 20190212655 - VAN DER POST; Sietse Thijmen ;   et al. | 2019-07-11 |
Method And Apparatus For Deriving Corrections, Method And Apparatus For Determining A Property Of A Structure, Device Manufactur App 20190212660 - KUMAR; Nitish ;   et al. | 2019-07-11 |
Illumination source for an inspection apparatus, inspection apparatus and inspection method Grant 10,330,606 - Van Voorst , et al. | 2019-06-25 |
Method of Optimizing the Position and/or Size of a Measurement Illumination Spot Relative to a Target on a Substrate, and Associated Apparatus App 20190107786 - VAN BOXMEER; Johan Maria ;   et al. | 2019-04-11 |
Method and Apparatus for Determining Alignment Properties of a Beam of Radiation App 20190101840 - VAN DER POST; Sietse Thijmen | 2019-04-04 |
Method and apparatus for inspection and metrology Grant 10,248,029 - Van Der Post , et al. | 2019-04-02 |
Optical Systems, Metrology Apparatus and Associated Method App 20190072853 - VAN DER POST; Sietse Thijmen ;   et al. | 2019-03-07 |
Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method App 20190003981 - Van Voorst; Peter Danny ;   et al. | 2019-01-03 |
Method and apparatus for inspection and metrology Grant 10,126,659 - Zijp , et al. November 13, 2 | 2018-11-13 |
Methods and Apparatus for Predicting Performance of a Measurement Method, Measurement Method and Apparatus App 20180254597 - VAN DER POST; Sietse Thijmen ;   et al. | 2018-09-06 |
Method And Apparatus For Inspection And Metrology App 20180188658 - VAN DER POST; Sietse Thijmen ;   et al. | 2018-07-05 |
Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method App 20180073992 - VAN VOORST; Peter Danny ;   et al. | 2018-03-15 |
Method and apparatus for inspection and metrology Grant 9,851,246 - Van Der Post December 26, 2 | 2017-12-26 |
Method And Apparatus For Inspection And Metrology App 20170102620 - ZIJP; Ferry ;   et al. | 2017-04-13 |
Method And Apparatus For Inspection And Metrology App 20160258810 - VAN DER POST; Sietse Thijmen | 2016-09-08 |