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Patent applications and USPTO patent grants for VAN DER PASCH; Engelbertus Antonius Franciscus.The latest application filed is for "metrology apparatus".
Patent | Date |
---|---|
Metrology Apparatus App 20220121127 - PANDEY; Nitesh ;   et al. | 2022-04-21 |
Lithographic apparatus and method for measuring a position Grant 9,746,312 - Butler , et al. August 29, 2 | 2017-08-29 |
Integrated circuit manufacturing methods with patterning device position determination Grant 7,804,584 - Bartray , et al. September 28, 2 | 2010-09-28 |
Integrated Circuit Manufacturing Methods with Patterning Device Position Determination App 20090061361 - Bartray; Petrus Rutgerus ;   et al. | 2009-03-05 |
Lithographic apparatus with patterning device position determination Grant 7,471,373 - Bartray , et al. December 30, 2 | 2008-12-30 |
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