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Lithographic apparatus and device manufacturing method involving a heater Grant 11,378,893 - Cadee , et al. July 5, 2 | 2022-07-05 |
Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20210063898 - CADEE; Theodorus Petrus Maria ;   et al. | 2021-03-04 |
Lithographic apparatus and device manufacturing method involving a heater Grant 10,838,310 - Cadee , et al. November 17, 2 | 2020-11-17 |
Radiation Source Module and Lithographic Apparatus App 20200124976 - PATEL; Hrishikesh ;   et al. | 2020-04-23 |
Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20190235397 - CADEE; Theodorus Petrus Maria ;   et al. | 2019-08-01 |
Lithographic apparatus and device manufacturing method involving a heater Grant 10,254,663 - Cadee , et al. | 2019-04-09 |
Lithographic apparatus and device manufacturing method Grant 10,248,033 - Mertens , et al. | 2019-04-02 |
Lithographic Apparatus And Device Manufacturing Method App 20180039188 - MERTENS; Jeroen Johannes Sophia Maria ;   et al. | 2018-02-08 |
Lithographic apparatus and method of cooling a component in a lithographic apparatus Grant 9,811,007 - Van Boxtel , et al. November 7, 2 | 2017-11-07 |
Lithographic apparatus and device manufacturing method Grant 9,753,380 - Mertens , et al. September 5, 2 | 2017-09-05 |
Lithographic apparatus and contamination removal or prevention method Grant 9,599,908 - De Jong , et al. March 21, 2 | 2017-03-21 |
Lithographic Apparatus And Device Manufacturing Method App 20160370714 - MERTENS; Jeroen Johannes Sophia Maria ;   et al. | 2016-12-22 |
Lithographic apparatus and device manufacturing method Grant 9,436,097 - Mertens , et al. September 6, 2 | 2016-09-06 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor Grant 9,268,242 - Cadee , et al. February 23, 2 | 2016-02-23 |
Lithographic Apparatus And Device Manufacturing Method Involving A Heater App 20160048085 - CADEE; Theodorus Petrus Maria ;   et al. | 2016-02-18 |
Lithographic Apparatus And Contamination Removal Or Prevention Method App 20160033875 - DE JONG; Anthonius Martinus Cornelis Petrus ;   et al. | 2016-02-04 |
Lithographic apparatus and device manufacturing method involving a heater Grant 9,188,880 - Cadee , et al. November 17, 2 | 2015-11-17 |
Lithographic apparatus and contamination removal or prevention method Grant 9,158,206 - De Jong , et al. October 13, 2 | 2015-10-13 |
Lithographic Apparatus And Device Manufacturing Method App 20150109593 - MERTENS; Jeroen Johannes Sophia Maria ;   et al. | 2015-04-23 |
Humidifying apparatus, lithographic apparatus and humidifying method Grant 9,004,459 - Van Der Net April 14, 2 | 2015-04-14 |
Lithographic apparatus and device manufacturing method Grant 8,934,082 - Mertens , et al. January 13, 2 | 2015-01-13 |
Lithographic apparatus and device manufacturing method Grant 8,885,142 - Van Der Net November 11, 2 | 2014-11-11 |
Lithographic apparatus, an illumination system, a projection system and a method of manufacturing a device using a lithographic apparatus Grant 8,810,769 - Gosen , et al. August 19, 2 | 2014-08-19 |
Lithographic apparatus and a method of operating the apparatus Grant 8,564,757 - Jansen , et al. October 22, 2 | 2013-10-22 |
Lithographic apparatus and a method of measuring flow rate in a two phase flow Grant 8,446,561 - Kramer , et al. May 21, 2 | 2013-05-21 |
Lithographic apparatus and a method of operating the apparatus Grant 8,432,531 - Hoekerd , et al. April 30, 2 | 2013-04-30 |
Lithographic Apparatus And Method Of Cooling A Component In A Lithographic Apparatus App 20130088694 - VAN BOXTEL; Frank Johannes Jacobus ;   et al. | 2013-04-11 |
Projection System, Lithographic Apparatus And Device Manufacturing Method App 20120236275 - VAN BOXTEL; Frank Johannes Jacobus ;   et al. | 2012-09-20 |
Lithographic Apparatus And Device Manufacturing Method App 20120113402 - CADEE; Theodorus Petrus Maria ;   et al. | 2012-05-10 |
Lithographic Apparatus And Device Manufacturing Method App 20110249246 - MERTENS; Jeroen Johannes Sophia Maria ;   et al. | 2011-10-13 |
Lithographic Apparatus, An Illumination System, A Projection System And A Method Of Manufacturing A Device Using A Lithographic Apparatus App 20110228239 - GOSEN; Jeroen Gerard ;   et al. | 2011-09-22 |
Lithographic apparatus and device manufacturing method Grant 8,004,652 - Mertens , et al. August 23, 2 | 2011-08-23 |
Lithographic Apparatus And Contamination Removal Or Prevention Method App 20110188013 - DE JONG; Anthonius Martinus Cornelis Petrus ;   et al. | 2011-08-04 |
Lithographic Apparatus And Device Manufacturing Method App 20110157568 - VAN DER NET; Antonius Johannus | 2011-06-30 |
Lithographic apparatus and device manufacturing method Grant 7,924,404 - Van Der Net April 12, 2 | 2011-04-12 |
Lithographic Apparatus And A Method Of Operating The Apparatus App 20110080567 - HOEKERD; Kornelis Tijmen ;   et al. | 2011-04-07 |
Humidifying Apparatus, Lithographic Apparatus And Humidifying Method App 20110074053 - VAN DER NET; Antonius Johannus | 2011-03-31 |
Lithographic apparatus and contamination removal or prevention method Grant 7,916,269 - De Jong , et al. March 29, 2 | 2011-03-29 |
Lithographic Apparatus And A Method Of Measuring Flow Rate In A Two Phase Flow App 20110013159 - Kramer; Pieter Jacob ;   et al. | 2011-01-20 |
Humidifying apparatus, lithographic apparatus and humidifying method Grant 7,866,637 - Van Der Net January 11, 2 | 2011-01-11 |
Lithographic Apparatus And A Method Of Operating The Apparatus App 20100328634 - Jansen; Bauke ;   et al. | 2010-12-30 |
Lithographic Apparatus And Device Manufacturing Method App 20100321650 - CADEE; THEODORUS PETRUS MARIA ;   et al. | 2010-12-23 |
Lithographic apparatus and device manufacturing method having liquid evaporation control Grant 7,804,575 - Cadee , et al. September 28, 2 | 2010-09-28 |
Methods Relating To Immersion Lithography And An Immersion Lithographic Apparatus App 20100110398 - DE GRAAF; Roelof Frederik ;   et al. | 2010-05-06 |
Lithographic apparatus and device manufacturing method App 20090046261 - Van Der Net; Antonius Johannus | 2009-02-19 |
Lithographic Apparatus and Contamination Removal or Prevention Method App 20090027635 - DE JONG; Anthonius Martinus Cornelis Petrus ;   et al. | 2009-01-29 |
Lithographic Apparatus And Contamination Removal Or Prevention Method App 20090025753 - DE JONG; Anthonius Martinus Cornelis Petrus ;   et al. | 2009-01-29 |
Lithographic apparatus and device manufacturing method App 20080259292 - Mertens; Jeroen Johannes Sophia Maria ;   et al. | 2008-10-23 |
Humidifying apparatus, lithographic apparatus and humidifying method App 20080179765 - Van Der Net; Antonius Johannus | 2008-07-31 |
Lithographic apparatus and device manufacturing method Grant 7,379,155 - Mertens , et al. May 27, 2 | 2008-05-27 |
Lithographic apparatus and device manufacturing method App 20060082746 - Mertens; Jeroen Johannes Sophia Maria ;   et al. | 2006-04-20 |
Lithographic apparatus and device manufacturing method App 20060033898 - Cadee; Theodorus Petrus Maria ;   et al. | 2006-02-16 |