loadpatents
Patent applications and USPTO patent grants for VAN DER MEULEN; Frits.The latest application filed is for "gas mixing for fast temperature control of a cooling hood".
Patent | Date |
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Gas Mixing For Fast Temperature Control Of A Cooling Hood App 20210356875 - DE HOOGH; Joost ;   et al. | 2021-11-18 |
Mask assembly Grant 11,009,803 - Kruizinga , et al. May 18, 2 | 2021-05-18 |
Pellicle attachment apparatus Grant 11,003,098 - Van Der Meulen , et al. May 11, 2 | 2021-05-11 |
Pellicle attachment apparatus Grant 10,969,701 - Van Der Meulen , et al. April 6, 2 | 2021-04-06 |
Lithographic apparatus Grant 10,747,127 - Van Der Meulen , et al. A | 2020-08-18 |
Lithographic apparatus and device manufacturing method Grant 10,705,439 - Kemper , et al. | 2020-07-07 |
Stage system, lithographic apparatus and device manufacturing method Grant 10,620,552 - Cox , et al. | 2020-04-14 |
Pellicle Attachment Apparatus App 20200096882 - VAN DER MEULEN; Frits ;   et al. | 2020-03-26 |
Lithographic apparatus and device manufacturing method Grant 10,599,054 - Kemper , et al. | 2020-03-24 |
Mask Assembly App 20200057394 - KRUIZINGA; Matthias ;   et al. | 2020-02-20 |
Mask assembly Grant 10,558,129 - Kruizinga , et al. Feb | 2020-02-11 |
Pellicle attachment apparatus Grant 10,539,886 - Van Der Meulen , et al. Ja | 2020-01-21 |
Pellicle Attachment Apparatus App 20200012204 - Van Der Meulen; Frits ;   et al. | 2020-01-09 |
Lithographic apparatus and device manufacturing method Grant 10,466,595 - Streefkerk , et al. No | 2019-11-05 |
Lithographic Apparatus And Device Manufacturing Method App 20190294058 - Kemper; Nicolaas Rudolf ;   et al. | 2019-09-26 |
Stage System, Lithographic Apparatus And Device Manufacturing Method App 20190294057 - Cox; Hendrikus Herman Marie ;   et al. | 2019-09-26 |
Lithographic apparatus Grant 10,394,140 - Cox , et al. A | 2019-08-27 |
Lithographic Apparatus App 20190227445 - VAN DER MEULEN; Frits ;   et al. | 2019-07-25 |
Lithographic apparatus and device manufacturing method Grant 10,331,047 - Kemper , et al. | 2019-06-25 |
Lithographic Apparatus App 20190187573 - COX; Hendrikus Herman Marie ;   et al. | 2019-06-20 |
Lithographic apparatus, object positioning system and device manufacturing method Grant 10,191,396 - De Wit , et al. Ja | 2019-01-29 |
Apparatus App 20190025717 - VAN DER MEULEN; Frits ;   et al. | 2019-01-24 |
Mask Assembly App 20180329314 - KRUIZINGA; Matthias ;   et al. | 2018-11-15 |
Lithographic Apparatus And Device Manufacturing Method App 20180188661 - KEMPER; Nicolaas Rudolf ;   et al. | 2018-07-05 |
Lithographic Apparatus, Object Positioning System And Device Manufacturing Method App 20180149986 - DE WIT; Paul Corne Henri ;   et al. | 2018-05-31 |
System for positioning an object in lithography Grant 9,946,172 - Hempenius , et al. April 17, 2 | 2018-04-17 |
Lithographic apparatus and device manufacturing method Grant 9,904,185 - Kemper , et al. February 27, 2 | 2018-02-27 |
Lithographic Apparatus And Device Manufacturing Method App 20170357165 - KEMPER; Nicolaas Rudolf ;   et al. | 2017-12-14 |
Lithographic apparatus and device manufacturing method Grant 9,798,246 - Streefkerk , et al. October 24, 2 | 2017-10-24 |
Lithographic Apparatus And Device Manufacturing Method App 20170045831 - KEMPER; Nicolaas Rudolf ;   et al. | 2017-02-16 |
Lithographic Apparatus And Device Manufacturing Method App 20170031250 - KEMPER; Nicolaas Rudolf ;   et al. | 2017-02-02 |
System For Positioning An Object In Lithography App 20160377996 - HEMPENIUS; Peter Paul ;   et al. | 2016-12-29 |
Lithographic apparatus and device manufacturing method Grant 9,507,278 - Kemper , et al. November 29, 2 | 2016-11-29 |
Lithographic apparatus and device manufacturing method Grant 9,488,923 - Kemper , et al. November 8, 2 | 2016-11-08 |
Lithographic apparatus and device manufacturing method Grant 9,477,160 - Streefkerk , et al. October 25, 2 | 2016-10-25 |
Lithographic Apparatus And Device Manufacturing Method App 20160299440 - STREEFKERK; Bob ;   et al. | 2016-10-13 |
Lithographic Apparatus And Device Manufacturing Method App 20150323876 - KEMPER; Nicolaas Rudolf ;   et al. | 2015-11-12 |
Lithographic apparatus and device manufacturing method Grant 9,097,992 - Kemper , et al. August 4, 2 | 2015-08-04 |
Lithographic Apparatus And Device Manufacturing Method App 20150168850 - STREEFKERK; Bob ;   et al. | 2015-06-18 |
Shared compliance in a rapid exchange device for reticles, and reticle stage Grant 9,025,135 - Johnson , et al. May 5, 2 | 2015-05-05 |
Lithographic apparatus and device manufacturing method Grant 8,964,164 - Streefkerk , et al. February 24, 2 | 2015-02-24 |
Lithographic apparatus and device manufacturing method Grant 8,913,228 - Wijckmans , et al. December 16, 2 | 2014-12-16 |
Lithographic Apparatus And Device Manufacturing Method App 20140300883 - Kemper; Nicolaas Rudolf ;   et al. | 2014-10-09 |
Lithographic apparatus and device manufacturing method Grant 8,755,028 - Kemper , et al. June 17, 2 | 2014-06-17 |
Lithographic apparatus and device manufacturing method Grant 8,724,084 - Streefkerk , et al. May 13, 2 | 2014-05-13 |
Lithographic apparatus and device manufacturing method Grant 8,724,083 - Streefkerk , et al. May 13, 2 | 2014-05-13 |
Lithographic apparatus and method Grant 8,564,763 - Jacobs , et al. October 22, 2 | 2013-10-22 |
Lithographic apparatus and device manufacturing method Grant 8,514,365 - De Jong , et al. August 20, 2 | 2013-08-20 |
Lithographic apparatus and device manufacturing method Grant 8,446,563 - Kemper , et al. May 21, 2 | 2013-05-21 |
Shared Compliance in a Rapid Exchange Device for Reticles, and Reticle Stage App 20120092640 - Johnson; Richard John ;   et al. | 2012-04-19 |
Lithographic Apparatus And Device Manufacturing Method App 20110310367 - KEMPER; Nicolaas Rudolf ;   et al. | 2011-12-22 |
Lithographic Apparatus And Device Manufacturing Method App 20110279795 - STREEFKERK; Bob ;   et al. | 2011-11-17 |
Lithographic Apparatus And Device Manufacturing Method App 20110273675 - Kemper; Nicolaas Rudolf ;   et al. | 2011-11-10 |
Lithographic apparatus and device manufacturing method Grant 8,031,325 - Kemper , et al. October 4, 2 | 2011-10-04 |
Lithographic Apparatus And Device Manufacturing Method App 20110181859 - Streefkerk; Bob ;   et al. | 2011-07-28 |
Lithographic apparatus and device manufacturing method Grant 7,936,444 - Streefkerk , et al. May 3, 2 | 2011-05-03 |
Lithographic apparatus, immersion projection apparatus and device manufacturing method Grant 7,859,644 - Van Der Toorn , et al. December 28, 2 | 2010-12-28 |
Lithographic apparatus and position sensor Grant 7,830,495 - Van Bruggen , et al. November 9, 2 | 2010-11-09 |
Substrate support and lithographic process Grant 7,791,709 - Hennus , et al. September 7, 2 | 2010-09-07 |
Lithographic apparatus and device manufacturing method Grant 7,760,324 - Benschop , et al. July 20, 2 | 2010-07-20 |
Lithographic Apparatus And Device Manufacturing Method App 20100157277 - KEMPER; Nicolaas Rudolf ;   et al. | 2010-06-24 |
Lithographic Apparatus And Device Manufacturing Method App 20100149514 - KEMPER; Nicolaas Rudolf ;   et al. | 2010-06-17 |
Lithographic apparatus and device manufacturing method Grant 7,705,962 - Kemper , et al. April 27, 2 | 2010-04-27 |
Lithographic apparatus and device manufacturing method Grant 7,701,550 - Kemper , et al. April 20, 2 | 2010-04-20 |
Lithographic Apparatus And Method App 20090279061 - JACOBS; Johannes Henricus Wilhelmus ;   et al. | 2009-11-12 |
Lithographic apparatus and device manufacturing method Grant 7,602,470 - Kemper , et al. October 13, 2 | 2009-10-13 |
Lithographic apparatus and position sensor App 20090015246 - Van Bruggen; Olaf Hubertus Wilhelmus ;   et al. | 2009-01-15 |
Lithographic apparatus and device manufacturing method App 20080297744 - Eduard De Jong; Frederik ;   et al. | 2008-12-04 |
Lithographic apparatus and device manufacturing method App 20080137055 - Hennus; Pieter Renaat Maria ;   et al. | 2008-06-12 |
Lithographic apparatus, immersion projection apparatus and device manufacturing method App 20080123071 - Van Der Toorn; Jan-Gerard Cornelis ;   et al. | 2008-05-29 |
Lithographic apparatus and device manufacturing method Grant 7,352,434 - Streefkerk , et al. April 1, 2 | 2008-04-01 |
Lithographic apparatus, immersion projection apparatus and device manufacturing method Grant 7,330,238 - Van Der Toorn , et al. February 12, 2 | 2008-02-12 |
Lithographic apparatus and device manufacturing method Grant 7,295,283 - Cox , et al. November 13, 2 | 2007-11-13 |
Lithographic apparatus and device manufacturing method App 20070242245 - Wijckmans; Maurice ;   et al. | 2007-10-18 |
Lithographic apparatus and device manufacturing method App 20070216882 - Benschop; Jozef Petrus Henricus ;   et al. | 2007-09-20 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,184,121 - Van Der Meulen , et al. February 27, 2 | 2007-02-27 |
Lithographic apparatus immersion damage control Grant 7,170,583 - Van Der Meulen , et al. January 30, 2 | 2007-01-30 |
Lithographic apparatus and device manufacturing method Grant 7,133,114 - Hoogendam , et al. November 7, 2 | 2006-11-07 |
Lithographic apparatus, immersion projection apparatus and device manufacturing method App 20060215131 - Van Der Toorn; Jan-Gerard Cornelis ;   et al. | 2006-09-28 |
Lithographic apparatus and device manufacturing method App 20060061739 - Hoogendam; Christiaan Alexander ;   et al. | 2006-03-23 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20050007574 - Van Der Meulen, Frits ;   et al. | 2005-01-13 |
Lithographic apparatus and device manufacturing method App 20050007569 - Streefkerk, Bob ;   et al. | 2005-01-13 |
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