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Scanning electron microscope
Grant 11,024,481 - Van Der Mast , et al. June 1, 2 | 2021-06-01 |
Scanning Electron Microscope
App 20200402760 - VAN DER MAST; Karel Diederick ; et al. | 2020-12-24 |
Scanning electron microscope
Grant 10,796,879 - Van Der Mast , et al. October 6, 2 | 2020-10-06 |
Sample stage
Grant 10,580,613 - Stamsnijder , et al. | 2020-03-03 |
Sample Stage
App 20190287756 - Stamsnijder; Gerhardus Bernardus ; et al. | 2019-09-19 |
Scanning Electron Microscope
App 20190103245 - VAN DER MAST; Karel Diederick ; et al. | 2019-04-04 |
Sample Stage
App 20170316913 - Stamsnijder; Gerhardus Bernardus ; et al. | 2017-11-02 |
Imprint lithography
Grant 9,610,727 - Kruijt-Stegeman , et al. April 4, 2 | 2017-04-04 |
Imprint Lithography
App 20140291879 - KRUIJT-STEGEMAN; Yvonne Wendela ; et al. | 2014-10-02 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method for determining a property of a substrate
Grant 8,848,195 - Leewis , et al. September 30, 2 | 2014-09-30 |
Imprint lithography
Grant 8,753,557 - Kruijt-Stegeman , et al. June 17, 2 | 2014-06-17 |
Method of determining overlay error and a device manufacturing method
Grant 8,363,220 - Coene , et al. January 29, 2 | 2013-01-29 |
Imprint Lithography
App 20120091629 - KRUIJT-STEGEMAN; Yvonne Wendela ; et al. | 2012-04-19 |
Metrology Apparatus, Lithography Apparatus and Method of Measuring a Property of a Substrate
App 20120092636 - Van Der Mast; Karel Diederick ; et al. | 2012-04-19 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method for Determining a Property of a Substrate
App 20120033223 - Leewis; Christian Marinus ; et al. | 2012-02-09 |
Imprint lithography
Grant 8,100,684 - Kruijt-Stegeman , et al. January 24, 2 | 2012-01-24 |
Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate
Grant 7,961,309 - Plug , et al. June 14, 2 | 2011-06-14 |
Imprint lithography
Grant 7,878,791 - Simon , et al. February 1, 2 | 2011-02-01 |
Method of Determining Overlay Error and a Device Manufacturing Method
App 20100284008 - COENE; Willem Marie Julia Marcel ; et al. | 2010-11-11 |
Method of measuring asymmetry in a scatterometer, a method of measuring an overlay error in a substrate and a metrology apparatus
Grant 7,656,518 - Den Boef , et al. February 2, 2 | 2010-02-02 |
Metrology Tool, System Comprising a Lithographic Apparatus and a Metrology Tool, and a Method for Determining a Parameter of a Substrate
App 20090296081 - PLUG; Reinder Teun ; et al. | 2009-12-03 |
Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate
Grant 7,586,598 - Plug , et al. September 8, 2 | 2009-09-08 |
Imprint lithography
Grant 7,517,211 - Kruijt-Stegeman , et al. April 14, 2 | 2009-04-14 |
Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate
Grant 7,502,103 - Plug , et al. March 10, 2 | 2009-03-10 |
Lithographic apparatus, method, and computer program product for generating a mask pattern and device manufacturing method using same
Grant 7,500,218 - Troost , et al. March 3, 2 | 2009-03-03 |
Method of measuring asymmetry in a scatterometer, a method of measuring an overlay error in a substrate and a metrology apparatus
App 20080239318 - Den Boef; Arie Jeffrey ; et al. | 2008-10-02 |
Maskless lithography systems and methods utilizing spatial light modulator arrays
Grant 7,403,266 - Bleeker , et al. July 22, 2 | 2008-07-22 |
Imaging apparatus
Grant 7,379,579 - Van Der Mast , et al. May 27, 2 | 2008-05-27 |
Lithographic apparatus and device manufacturing method
Grant 7,349,068 - Van Der Mast , et al. March 25, 2 | 2008-03-25 |
Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate
App 20070279644 - Teun Plug; Reinder ; et al. | 2007-12-06 |
Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate
App 20070279742 - Plug; Reinder Teun ; et al. | 2007-12-06 |
Imprint lithography
App 20070141191 - Kruijt-Stegeman; Yvonne Wendela ; et al. | 2007-06-21 |
Imprint lithography
App 20070102844 - Simon; Klaus ; et al. | 2007-05-10 |
Lithographic apparatus and device manufacturing method
Grant 7,116,403 - Troost , et al. October 3, 2 | 2006-10-03 |
Method of manufacturing a device by employing a lithographic apparatus including a sliding electron-optical element
Grant 7,102,732 - de Jager , et al. September 5, 2 | 2006-09-05 |
Lithographic apparatus and device manufacturing method
App 20060132742 - Van Der Mast; Karel Diederick ; et al. | 2006-06-22 |
Imaging apparatus
Grant 7,023,525 - Bleeker , et al. April 4, 2 | 2006-04-04 |
Lithographic apparatus, method, and computer program product for generating a mask pattern and device manufacturing method using same
App 20060040187 - Troost; Kars Zeger ; et al. | 2006-02-23 |
Lithographic apparatus and device manufacturing method
App 20050286035 - Troost, Kars Zeger ; et al. | 2005-12-29 |
Lithographic apparatus and device manufacturing method
Grant 6,930,755 - Van Der Mast August 16, 2 | 2005-08-16 |
Imaging apparatus
App 20050062948 - Van Der Mast, Karel Diederick ; et al. | 2005-03-24 |
Lithographic apparatus and device manufacturing method
App 20050012916 - Van Der Mast, Karel Diederick ; et al. | 2005-01-20 |
Imaging apparatus
App 20040239909 - Bleeker, Arno Jan ; et al. | 2004-12-02 |
Imaging apparatus
Grant 6,778,257 - Bleeker , et al. August 17, 2 | 2004-08-17 |
Method of manufacturing a device by employing a lithographic apparatus including a sliding electron-optical element
App 20030206283 - de Jager, Pieter Willem Herman ; et al. | 2003-11-06 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
Grant 6,633,366 - de Jager , et al. October 14, 2 | 2003-10-14 |
Lithographic apparatus and device manufacturing method
App 20030179352 - Van Der Mast, Karel Diederick | 2003-09-25 |
Imaging apparatus
App 20030030781 - Bleeker, Arno Jan ; et al. | 2003-02-13 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby
App 20020054284 - de Jager, Pieter Willem Herman ; et al. | 2002-05-09 |
Correction device for correcting the spherical aberration in particle-optical apparatus
Grant 6,191,423 - Krijn , et al. February 20, 2 | 2001-02-20 |
Electron Beam Apparatus Comprising A Point Cathode
Grant 3,864,572 - van der Mast , et al. February 4, 1 | 1975-02-04 |
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