loadpatents
Patent applications and USPTO patent grants for van der Jeugd; Cornelius A..The latest application filed is for "reactive curing process for semiconductor substrates".
Patent | Date |
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Method and system for delivering hydrogen peroxide to a semiconductor processing chamber Grant 10,343,907 - Jongbloed , et al. July 9, 2 | 2019-07-09 |
Process for forming silicon-filled openings with a reduced occurrence of voids Grant 9,837,271 - Van Aerde , et al. December 5, 2 | 2017-12-05 |
Cyclic aluminum nitride deposition in a batch reactor Grant 9,552,979 - Knaepen , et al. January 24, 2 | 2017-01-24 |
Reactive Curing Process For Semiconductor Substrates App 20170011910 - Jongbloed; Bert ;   et al. | 2017-01-12 |
Process for forming silicon-filled openings with a reduced occurrence of voids Grant 9,443,730 - Van Aerde , et al. September 13, 2 | 2016-09-13 |
Reactive curing process for semiconductor substrates Grant 9,431,238 - Jongbloed , et al. August 30, 2 | 2016-08-30 |
Method For Forming Oxide Layer By Oxidizing Semiconductor Substrate With Hydrogen Peroxide App 20160240373 - Tang; Fu ;   et al. | 2016-08-18 |
Process For Forming Silicon-filled Openings With A Reduced Occurrence Of Voids App 20160141176 - Van Aerde; Steven R.A. ;   et al. | 2016-05-19 |
Process For Forming Silicon-filled Openings With A Reduced Occurrence Of Voids App 20160020094 - Van Aerde; Steven R.A. ;   et al. | 2016-01-21 |
Process For Forming Silicon-filled Openings With A Reduced Occurrence Of Voids App 20160020093 - Van Aerde; Steven R.A. ;   et al. | 2016-01-21 |
Reactive Curing Process For Semiconductor Substrates App 20150357184 - Jongbloed; Bert ;   et al. | 2015-12-10 |
Method And System For Delivering Hydrogen Peroxide To A Semiconductor Processing Chamber App 20150279693 - JONGBLOED; Bert ;   et al. | 2015-10-01 |
Cyclic Aluminum Nitride Deposition In A Batch Reactor App 20140357090 - Knaepen; Werner ;   et al. | 2014-12-04 |
Methods of forming films in semiconductor devices with solid state reactants Grant 7,691,750 - Granneman , et al. April 6, 2 | 2010-04-06 |
Wafer support system Grant 7,655,093 - Halpin , et al. February 2, 2 | 2010-02-02 |
Method of manufacturing a silicon dioxide layer Grant 7,645,486 - Bourdelle , et al. January 12, 2 | 2010-01-12 |
Remote plasma activated nitridation Grant 7,629,270 - Swerts , et al. December 8, 2 | 2009-12-08 |
Low temperature silicon compound deposition Grant 7,294,582 - Haverkort , et al. November 13, 2 | 2007-11-13 |
Wafer Support System App 20070131173 - Halpin; Michael W. ;   et al. | 2007-06-14 |
Method Of Manufacturing A Silicon Dioxide Layer App 20070134887 - Bourdelle; Konstantin ;   et al. | 2007-06-14 |
Methods of forming films in semiconductor devices with solid state reactants App 20070059932 - Granneman; Ernst H.A. ;   et al. | 2007-03-15 |
Wafer support system Grant 7,186,298 - Halpin , et al. March 6, 2 | 2007-03-06 |
Methods of forming silicide films in semiconductor devices Grant 7,153,772 - Granneman , et al. December 26, 2 | 2006-12-26 |
Remote plasma activated nitridation App 20060110943 - Swerts; Johan ;   et al. | 2006-05-25 |
Low temperature silicon compound deposition App 20060088985 - Haverkort; Ruben ;   et al. | 2006-04-27 |
Methods of forming silicide films in semiconductor devices App 20050017310 - Granneman, Ernst H.A. ;   et al. | 2005-01-27 |
Wafer support system Grant 6,692,576 - Halpin , et al. February 17, 2 | 2004-02-17 |
Wafer support system App 20030075274 - Halpin, Michael W. ;   et al. | 2003-04-24 |
Wafer support system Grant 6,491,757 - Halpin , et al. December 10, 2 | 2002-12-10 |
Process chamber with rectangular temperature compensation ring App 20020179586 - Wengert, John F. ;   et al. | 2002-12-05 |
Process chamber with downstream getter plate Grant 6,464,792 - Wengert , et al. October 15, 2 | 2002-10-15 |
Wafer support system Grant 6,343,183 - Halpin , et al. January 29, 2 | 2002-01-29 |
Wafer support system App 20010054390 - Halpin, Michael W. ;   et al. | 2001-12-27 |
Wafer support system Grant 6,203,622 - Halpin , et al. March 20, 2 | 2001-03-20 |
Wafer support system Grant 6,113,702 - Halpin , et al. September 5, 2 | 2000-09-05 |
Process chamber with inner support Grant 6,093,252 - Wengert , et al. July 25, 2 | 2000-07-25 |
Low-mass susceptor Grant 6,086,680 - Foster , et al. July 11, 2 | 2000-07-11 |
Wafer support system Grant 6,053,982 - Halpin , et al. April 25, 2 | 2000-04-25 |
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