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Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 11,300,890 - Kunnen , et al. April 12, 2 | 2022-04-12 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20210088912 - ROPS; Cornelius Maria ;   et al. | 2021-03-25 |
Lithographic apparatus, method of transferring a substrate and device manufacturing method Grant 10,916,453 - Van Beuzekom , et al. February 9, 2 | 2021-02-09 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 10,859,919 - Rops , et al. December 8, 2 | 2020-12-08 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20200166851 - ROPS; Cornelius Maria ;   et al. | 2020-05-28 |
Lithographic Apparatus, Support Table For A Lithographic Apparatus And Device Manufacturing Method App 20200124993 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2020-04-23 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 10,551,748 - Rops , et al. Fe | 2020-02-04 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 10,520,837 - Kunnen , et al. Dec | 2019-12-31 |
Lithographic Apparatus, Method Of Transferring A Substrate And Device Manufacturing Method App 20190391499 - VAN BEUZEKOM; Aart Adrianus ;   et al. | 2019-12-26 |
Lithographic apparatus, method of transferring a substrate and device manufacturing method Grant 10,409,174 - Van Beuzekom , et al. Sept | 2019-09-10 |
Lithographic apparatus and a method of manufacturing a lithographic apparatus Grant 10,324,384 - Pieterse , et al. | 2019-06-18 |
Lithographic apparatus and device manufacturing method Grant 10,268,127 - Riepen , et al. | 2019-04-23 |
Lithographic apparatus and a device manufacturing method Grant 10,222,707 - Polet , et al. | 2019-03-05 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method App 20180284627 - Kunnen; Johan Gertrudis Cornelis ;   et al. | 2018-10-04 |
Lithographic Apparatus And A Method Of Manufacturing A Lithographic Apparatus App 20180210350 - PIETERSE; Gerben ;   et al. | 2018-07-26 |
Immersion lithographic apparatus and device manufacturing method Grant 10,001,712 - Polet , et al. June 19, 2 | 2018-06-19 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 9,904,177 - Thomas , et al. February 27, 2 | 2018-02-27 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 9,897,928 - Kunnen , et al. February 20, 2 | 2018-02-20 |
A Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20170363948 - ROPS; Cornelius Maria ;   et al. | 2017-12-21 |
Lithographic Apparatus And Device Manufacturing Method App 20170242348 - RIEPEN; Michel ;   et al. | 2017-08-24 |
Immersion Lithographic Apparatus And Device Manufacturing Method App 20170219939 - POLET; Theodorus Wilhelmus ;   et al. | 2017-08-03 |
Lithographic apparatus and device manufacturing method Grant 9,645,506 - Riepen , et al. May 9, 2 | 2017-05-09 |
Lithographic Apparatus, Method Of Transferring A Substrate And Device Manufacturing Method App 20170108781 - VAN BEUZEKOM; Aart Adrianus ;   et al. | 2017-04-20 |
Lithographic Apparatus And A Device Manufacturing Method App 20160179015 - POLET; Theodorus Wilhelmus ;   et al. | 2016-06-23 |
Lithographic apparatus and a device manufacturing method Grant 9,274,436 - Polet , et al. March 1, 2 | 2016-03-01 |
Lithographic apparatus and device manufacturing method involving a seal between a table and a component Grant 9,195,147 - Steffens , et al. November 24, 2 | 2015-11-24 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 8,711,326 - Van Der Ham , et al. April 29, 2 | 2014-04-29 |
Lithographic Apparatus And Device Manufacturing Method App 20140098353 - RIEPEN; Michel ;   et al. | 2014-04-10 |
Lithographic apparatus and device manufacturing method Grant 8,681,308 - Berkvens , et al. March 25, 2 | 2014-03-25 |
Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 8,675,169 - Van Boxtel , et al. March 18, 2 | 2014-03-18 |
Lithographic apparatus and device manufacturing method Grant 8,634,053 - Riepen , et al. January 21, 2 | 2014-01-21 |
Fluid handling structure, lithographic apparatus and device manufacturing method Grant 8,472,003 - Patel , et al. June 25, 2 | 2013-06-25 |
Lithographic Apparatus And A Device Manufacturing Method App 20130149649 - POLET; Theodorus Wilhelmus ;   et al. | 2013-06-13 |
Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods Grant 8,441,610 - Van Der Ham , et al. May 14, 2 | 2013-05-14 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20130050665 - Thomas; Ivo Adam Johannes ;   et al. | 2013-02-28 |
Lithographic Apparatus, Support Table For A Lithographic Apparatus And Device Manufacturing Method App 20130045447 - Kunnen; Johan Gertrudis Cornelis ;   et al. | 2013-02-21 |
Lithographic apparatus and device manufacturing method Grant 8,279,396 - Ten Kate , et al. October 2, 2 | 2012-10-02 |
Immersion lithographic apparatus and device manufacturing method Grant 8,259,283 - Direcks , et al. September 4, 2 | 2012-09-04 |
Lithographic apparatus and device manufacturing method Grant 8,218,126 - Steffens , et al. July 10, 2 | 2012-07-10 |
Gas Manifold, Module For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20120092631 - VAN BOXTEL; Frank Johannes Jacobus ;   et al. | 2012-04-19 |
Lithographic apparatus and device manufacturing method Grant 8,149,379 - Donders , et al. April 3, 2 | 2012-04-03 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20110292357 - Van Der Ham; Ronald ;   et al. | 2011-12-01 |
Assembly Comprising a Conditioning System and at Least One Object, a Conditioning System, a Lithographic Apparatus and Methods App 20110188049 - VAN DER HAM; Ronald ;   et al. | 2011-08-04 |
Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods Grant 7,924,399 - Van Der Ham , et al. April 12, 2 | 2011-04-12 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20110005603 - Patel; Hrishikesh ;   et al. | 2011-01-13 |
Lithographic Apparatus and Device Manufacturing Method App 20100231875 - TEN KATE; Nicolaas ;   et al. | 2010-09-16 |
Lithographic apparatus and method for conditioning an interior space of a device manufacturing apparatus Grant 7,728,951 - Van Empel , et al. June 1, 2 | 2010-06-01 |
Lithographic Apparatus And Device Manufacturing Method App 20100110410 - STEFFENS; KOEN ;   et al. | 2010-05-06 |
Immersion Lithographic Apparatus And Device Manufacturing Method App 20090237632 - Direcks; Daniel Jozef Maria ;   et al. | 2009-09-24 |
Lithographic apparatus having parts with a coated film adhered thereto Grant 7,561,250 - Liebregts , et al. July 14, 2 | 2009-07-14 |
Lithographic apparatus and device manufacturing method App 20090168037 - Kroonen; Roger Johannes Maria Hubertus ;   et al. | 2009-07-02 |
Lithographic apparatus and device manufacturing method App 20090168032 - Kate; Nicolaas Ten ;   et al. | 2009-07-02 |
Lithographic apparatus and device manufacturing method App 20090161083 - Donders; Sjoerd Nicolaas Lambertus ;   et al. | 2009-06-25 |
Lithographic apparatus and device manufacturing method App 20090147227 - Steffens; Koen ;   et al. | 2009-06-11 |
Lithographic apparatus having parts with a coated film adhered thereto App 20080316441 - Liebregts; Paulus Martinus Maria ;   et al. | 2008-12-25 |
Gas shower, lithographic apparatus and use of a gas shower Grant 7,432,513 - Van Empel , et al. October 7, 2 | 2008-10-07 |
Lithographic apparatus and device manufacturing method Grant 7,253,875 - Luttikhuis , et al. August 7, 2 | 2007-08-07 |
Lithographic apparatus and device manufacturing method Grant 7,227,612 - Van Der Net , et al. June 5, 2 | 2007-06-05 |
Lithographic apparatus and method for conditioning an interior space of a device manufacturing apparatus App 20070071889 - Van Empel; Tjarko Adriaan Rudolf ;   et al. | 2007-03-29 |
Lithographic apparatus having a gas flushing device Grant 7,136,142 - Beckers , et al. November 14, 2 | 2006-11-14 |
Lithographic apparatus and device manufacturing method Grant 7,057,702 - Lof , et al. June 6, 2 | 2006-06-06 |
Lithographic apparatus and device manufacturing method App 20060055899 - Van Der Net; Antonius Johannes ;   et al. | 2006-03-16 |
Lithographic apparatus and device manufacturing method App 20050286032 - Lof, Joeri ;   et al. | 2005-12-29 |