Van Der Aa; Nicolaas Petrus
Patent Applications and Registrations
Patent applications and USPTO patent grants for Van Der Aa; Nicolaas Petrus.The latest application filed is for "optical metrology system and metrology mark characterization device".
- Van Der Aa; Nicolaas Petrus - Helmond NL
| Patent | Date |
|---|---|
| Optical metrology system and metrology mark characterization device Grant 7,649,636 - Van Der Aa , et al. January 19, 2 | 2010-01-19 |
| Method for position determination, method for overlay optimization, and lithographic projection apparatus Grant 7,288,779 - Schets , et al. October 30, 2 | 2007-10-30 |
| Optical metrology system and metrology mark characterization device App 20070153274 - Van Der Aa; Nicolaas Petrus ; et al. | 2007-07-05 |
| Method for position determination, method for overlay optimization, and lithographic projection apparatus App 20050133743 - Schets, Sicco Ian ; et al. | 2005-06-23 |
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