Patent | Date |
---|
Fluid handling structure, lithographic apparatus and device manufacturing method Grant 11,143,968 - Direcks , et al. October 12, 2 | 2021-10-12 |
Lithographic apparatus Grant 10,649,341 - Van Den Dungen , et al. | 2020-05-12 |
Lithographic apparatus and a device manufacturing method involving an elongate liquid supply opening or an elongate region of relatively high pressure Grant 9,618,835 - Direcks , et al. April 11, 2 | 2017-04-11 |
Lithographic Apparatus App 20170023870 - VAN DEN DUNGEN; Clemens Johannes Gerardus ;   et al. | 2017-01-26 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20160306283 - DIRECKS; Daniel Jozef Maria ;   et al. | 2016-10-20 |
Fluid handling structure, lithographic apparatus and device manufacturing method Grant 9,383,654 - Direcks , et al. July 5, 2 | 2016-07-05 |
Lithographic Apparatus App 20150234294 - VAN DEN DUNGEN; Clemens Johannes Gerardus ;   et al. | 2015-08-20 |
Lithographic apparatus Grant 9,036,127 - Van den Dungen , et al. May 19, 2 | 2015-05-19 |
Fluid handling structure, lithographic apparatus and a device manufacturing method Grant 8,638,417 - Philips , et al. January 28, 2 | 2014-01-28 |
Fluid handling structure, lithographic apparatus and device manufacturing method Grant 8,508,712 - Van Den Dungen , et al. August 13, 2 | 2013-08-13 |
Fluid handling structure, lithographic apparatus and device manufacturing method Grant 8,421,993 - Direcks , et al. April 16, 2 | 2013-04-16 |
Fluid handling structure, lithographic apparatus and device manufacturing method Grant 8,351,018 - Direcks , et al. January 8, 2 | 2013-01-08 |
Fluid Handling Structure, Lithographic Apparatus And A Device Manufacturing Method App 20110255062 - PHILIPS; Danny Maria Hubertus ;   et al. | 2011-10-20 |
Lithographic Apparatus And A Device Manufacturing Method App 20110188012 - DIRECKS; Daniel Jozef Maria ;   et al. | 2011-08-04 |
Lithographic Apparatus, A Method Of Controlling The Apparatus And A Method Of Manufacturing A Device Using A Lithographic Apparatus App 20110007286 - DIRECKS; Daniel Jozef Maria ;   et al. | 2011-01-13 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20100103391 - VAN DEN DUNGEN; Clemens Johannes Gerardus ;   et al. | 2010-04-29 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20100085545 - DIRECKS; Daniel Jozef Maria ;   et al. | 2010-04-08 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20090279060 - DIRECKS; Daniel Jozef Maria ;   et al. | 2009-11-12 |
Fluid Handling Structure, Lithographic Apparatus And Device Manufacturing Method App 20090279062 - DIRECKS; Daniel Jozef Maria ;   et al. | 2009-11-12 |
Lithographic Apparatus App 20090262318 - VAN DEN DUNGEN; Clemens Johannes Gerardus ;   et al. | 2009-10-22 |