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Patent applications and USPTO patent grants for Van Den Biggelaar; Petrus Marinus Christianus Maria.The latest application filed is for "lithographic apparatus having a drive system with coordinate transformation, and device manufacturing method".
Patent | Date |
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Lithographic apparatus and device manufacturing method Grant 8,014,881 - Baggen , et al. September 6, 2 | 2011-09-06 |
Lithographic apparatus having a drive system with coordinate transformation, and device manufacturing method Grant 7,679,719 - Van Den Biggelaar March 16, 2 | 2010-03-16 |
Lithographic apparatus and device manufacturing method Grant 7,446,854 - Van Den Biggelaar November 4, 2 | 2008-11-04 |
Lithographic apparatus having a drive system with coordinate transformation, and device manufacturing method App 20080246934 - Van Den Biggelaar; Petrus Marinus Christianus Maria | 2008-10-09 |
Lithographic apparatus and device manufacturing method App 20080200998 - Baggen; Mark Constant Johannes ;   et al. | 2008-08-21 |
Lithographic apparatus and device manufacturing method Grant 7,295,283 - Cox , et al. November 13, 2 | 2007-11-13 |
Lithographic motion control system and method Grant 7,289,858 - Van Donkelaar , et al. October 30, 2 | 2007-10-30 |
Lithographic apparatus and device manufacturing method Grant 7,224,428 - De Jongh , et al. May 29, 2 | 2007-05-29 |
Lithographic apparatus and device manufacturing method with feed-forward focus control Grant 7,113,256 - Butler , et al. September 26, 2 | 2006-09-26 |
Lithographic apparatus and device manufacturing method Grant 7,016,019 - Van Den Biggelaar , et al. March 21, 2 | 2006-03-21 |
Lithographic apparatus and device manufacturing method App 20050219481 - Cox, Henrikus Herman Marie ;   et al. | 2005-10-06 |
Lithographic apparatus and device manufacturing method with feed-forward focus control App 20050179880 - Butler, Hans ;   et al. | 2005-08-18 |
Lithographic apparatus and device manufacturing method App 20050128460 - Van Den Biggelaar, Petrus Marinus Christianus Maria ;   et al. | 2005-06-16 |
Lithographic apparatus and device manufacturing method App 20050036123 - De Jongh, Robertus Johannes Marinus ;   et al. | 2005-02-17 |
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