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Tool For Modifying A Support Surface App 20210263418 - SCHOLTEN; Bert Dirk ;   et al. | 2021-08-26 |
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Lithographic Apparatus And A Device Manufacturing Method App 20210072649 - Poiesz; Thomas ;   et al. | 2021-03-11 |
System, Device And Method For Reconditioning A Substrate Support App 20210053177 - SCHOLTEN; Bert Dirk ;   et al. | 2021-02-25 |
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Inspection substrate and an inspection method Grant 10,725,390 - Saeed , et al. | 2020-07-28 |
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Inspection substrate and an inspection method Grant 10,216,100 - Saeed , et al. Feb | 2019-02-26 |
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Lithographic apparatus and a device manufacturing method Grant 9,274,436 - Polet , et al. March 1, 2 | 2016-03-01 |
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Lithographic Apparatus And A Method Of Operating The Apparatus App 20150055102 - WATSO; Robert Douglas ;   et al. | 2015-02-26 |
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Fluid Extraction System, Lithographic Apparatus And Device Manufacturing Method App 20140300879 - KEMPER; Nicolaas Rudolf ;   et al. | 2014-10-09 |
Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method Grant 8,836,915 - Mulder , et al. September 16, 2 | 2014-09-16 |
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Lithographic apparatus and a method of operating the apparatus Grant 8,823,918 - Watso , et al. September 2, 2 | 2014-09-02 |
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